Characterization of fully depleted SOI transistors after removal of the silicon substrate

Author(s):  
J. Burns ◽  
K. Warner ◽  
P. Gouker
2014 ◽  
Author(s):  
Stefan Prorok ◽  
Marvin Schulz ◽  
Alexander Petrov ◽  
Manfred Eich ◽  
Jingdong Luo ◽  
...  

2015 ◽  
Vol 1109 ◽  
pp. 381-384
Author(s):  
M. Safwan Azmi ◽  
Sharipah Nadzirah ◽  
Uda Hashim

The purpose of this paper is to study the morphological characterization of aluminum interdigitated electrodes (IDE) of different gap sizes on silicon substrate. The electrodes were fabricated using standard photolithography process and were done so with sizes of 12 μm, 10 μm and 7 μm. The electrodes were morphologically characterized using scanning electron microscope (SEM) and high-powered microscope (HPM).Keywords: morphological, interdigitated electrodes, aluminum


2020 ◽  
Vol 568 (1) ◽  
pp. 62-70
Author(s):  
Aep Setiawan ◽  
Endah Kinarya Palupi ◽  
Rofiqul Umam ◽  
Husin Alatas ◽  
Irzaman

1996 ◽  
Vol 458 ◽  
Author(s):  
Seung-Joon Jeon ◽  
Arun Kumar Chawla ◽  
Young-Joon Baik ◽  
Changmo Sung

ABSTRACTHighly oriented diamond films were deposited on a (001) silicon substrate by bias enhanced MPCVD technique. Three-dimensional TEM characterizations were carried out to understand the nucleation and growth mechanism of diamond grains. The surface morphology, defects, and misorientations of diamond films were compared as a function of synthesizing temperatures and thickness of the films. From our experimental results the texture formation mechanism of diamond films is discussed.


2008 ◽  
Vol 123 (5) ◽  
pp. 3039-3039 ◽  
Author(s):  
Jérôme Vasseur ◽  
Anne‐Christine Hladky‐Hennion ◽  
Bertrand Dubus ◽  
Bahram Djafari‐Rouhani ◽  
Bruno Morvan

Author(s):  
Timothy Boles ◽  
Wayne Struble ◽  
Gabriel Cueva ◽  
Robert J. Hillard ◽  
Win Ye ◽  
...  

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