Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

Author(s):  
Jesus Yanez ◽  
Arantxa Uranga ◽  
Nuria Barniol
Author(s):  
Chung-Hsien Lin ◽  
Hong-Ren Chen ◽  
Chen-Hsun Du ◽  
Weileun Fang

A high frequency thin film resonator using single reflective layer is presented. The reflective layer is chosen to have a low acoustic impedance to reflect acoustic waves, which is generated by the piezoelectric layer above it. With an air interface serves as a free boundary at the other end of piezoelectric layer, a high frequency resonator can be formed. Since the fabrication process included no bulk etching and multi-layer, a high manufacturability can be achieved. Moreover, the novel device and its applications can be designed to be suit many mobile communication applications.


Author(s):  
Hironori Tohmyoh ◽  
Shu Terashima

This paper describes a new concept to monitor the temperature of water utilizing the acoustic resonance, which occurs when ultrasound passes through a thin layer. In the ultrasonic transmission system that comprises of the reflection plate, thin film, and water, the reflection coefficient of the ultrasound at the plate/film/water interface depends on the frequency and takes its minimum value at the resonant frequency. Notably, this is closely related to the acoustic impedance of the water; moreover, it is a known fact that the acoustic impedance of the water demonstrates temperature dependence. Against this background, the present study aims to develop a technique in order to monitor the temperature of water utilizing the aforementioned correlation between the reflection coefficient and water temperature. First, a theoretical model was developed to determine the acoustic impedance of water from the difference in the amplitude spectra of echoes reflected at the back of the plate in the cases both with and without the film. It was found that the ratio of the amplitude spectrum of the echo recorded in the case with the film to that in the case without the film clearly decreased with a drop in water temperature. From this, we obtained the equation for determining water temperature experimentally. Finally, the temperature of water, which was brought down by air or ice cooling, was monitored by the proposed method. It was found that the behavior of temperature determined by the proposed method was congruent with that which was measured by a thermocouple.


2021 ◽  
Vol 12 (1) ◽  
pp. 163-168
Author(s):  
Andrzej Kociubiński

Abstract In this paper, the possibility of using cell culture impedance measurements to assess the biocompatibility of a material in contact with cells was analyzed. For this purpose, the Electric Cell-substrate Impedance Sensing (ECIS) method and a commercial measuring device were used. The test substrates with thin-film electrodes made of various metals were prepared using the magnetron sputtering method. The choice of metals was dictated by their varying degrees of biocompatibility. Cultures of mouse fibroblasts were cultured on the prepared substrates. The experiment showed that the complete cycle of culture from attachment and reproduction to apoptosis occurred. The results obtained indicate that it is possible to use the ECIS method to study the influence of metal on cell culture activity.


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