Sticking coefficient as a single parameter to characterize step coverage of SiO/sub 2/ processes

2002 ◽  
Author(s):  
L.-Y. Cheng ◽  
J.C. Rey ◽  
J.P. McVittie ◽  
K.C. Saraswat
Keyword(s):  
Single Parameter ◽  
Sticking Coefficient ◽  
Step Coverage

The Calder´on-Zygmund Theory I: Ellipticity

2017 ◽  
Author(s):  
Brian Street
Keyword(s):  
Classical Theory ◽  
Singular Integral ◽  
Singular Integrals ◽  
Differential Operators ◽  
Integral Operators ◽  
Singular Integral Operators ◽  
Single Parameter ◽  
Partial Differential ◽  
Translation Invariant ◽  
Partial Differential Operators

This chapter discusses a case for single-parameter singular integral operators, where ρ‎ is the usual distance on ℝn. There, we obtain the most classical theory of singular integrals, which is useful for studying elliptic partial differential operators. The chapter defines singular integral operators in three equivalent ways. This trichotomy can be seen three times, in increasing generality: Theorems 1.1.23, 1.1.26, and 1.2.10. This trichotomy is developed even when the operators are not translation invariant (many authors discuss such ideas only for translation invariant, or nearly translation invariant operators). It also presents these ideas in a slightly different way than is usual, which helps to motivate later results and definitions.

A parameter hierarchy for agreement

2017 ◽  
Author(s):  
András Bárány
Keyword(s):  
Full Range ◽  
Single Parameter

This chapter models some of the results of the previous chapter. It builds on the recently developed notion of parameter hierarchies. Parameter hierarchies are sets of dependent parameters giving rise to chains of implicational relations among languages. The languages discussed in this book are positioned on a parameter hierarchy of ϕ‎-probes: some languages do not show any kind of agreement, others with a single ϕ‎-probe can agree with one argument, yet others with more than one probe with more arguments. It is argued that this hierarchy restricts agreement across languages in some ways, but that other parameters are needed to account for the full range of data studied in the book. This chapter concludes that there is no single parameter that governs differential object and differential subject marking.

scholarly journals Ripple Formation during Oblique Angle Etching

Coatings ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 272
Author(s):  
Mehmet F. Cansizoglu ◽  
Mesut Yurukcu ◽  
Tansel Karabacak
Keyword(s):  
Plasma Etching ◽  
Incidence Angle ◽  
Incident Beam ◽  
Root Mean Square Roughness ◽  
Sticking Coefficient ◽  
Oblique Angle ◽  
Nano Fabrication ◽  
Ripple Formation ◽  
Rapid Formation ◽  
Roughness Analysis

Chemical removal of materials from the surface is a fundamental step in micro- and nano-fabrication processes. In conventional plasma etching, etchant molecules are non-directional and perform a uniform etching over the surface. However, using a highly directional obliquely incident beam of etching agent, it can be possible to engineer surfaces in the micro- or nano- scales. Surfaces can be patterned with periodic morphologies like ripples and mounds by controlling parameters including the incidence angle with the surface and sticking coefficient of etching particles. In this study, the dynamic evolution of a rippled morphology has been investigated during oblique angle etching (OAE) using Monte Carlo simulations. Fourier space and roughness analysis were performed on the resulting simulated surfaces. The ripple formation was observed to originate from re-emission and shadowing effects during OAE. Our results show that the ripple wavelength and root-mean-square roughness evolved at a more stable rate with accompanying quasi-periodic ripple formation at higher etching angles (θ > 60°) and at sticking coefficient values (Sc) 0.5 ≤ Sc ≤ 1. On the other hand, smaller etching angle (θ < 60°) and lower sticking coefficient values lead to a rapid formation of wider and deeper ripples. This result of this study can be helpful to develop new surface patterning techniques by etching.

scholarly journals Study on the Influence of Geometric Characteristics of Grain Membranes on Permeability Properties in Porous Sandstone

Membranes ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 587
Author(s):  
Run Shi ◽  
Huaiguang Xiao ◽  
Chengmeng Shao ◽  
Mingzheng Huang ◽  
Lei He
Keyword(s):  
Fluid Flow ◽  
Single Parameter ◽  
Control Group ◽  
Porous Rock ◽  
Permeability Characteristics ◽  
Natural Rock ◽  
Porous Sandstone ◽  
Novel Method ◽  
Boltzmann Method ◽  
Flow Laws

Studying the influence of grain characteristics on fluid flow in complex porous rock is one of the most important premises to reveal the permeability mechanism. Previous studies have mainly investigated the fluid flow laws in complex rock structures using an uncontrollable one single parameter of natural rock models or oversimplified control group models. In order to solve these problems, this paper proposes a novel method to reconstruct models that can independently control one single parameter of rock grain membranes based on mapping and reverse-mapping ideas. The lattice Boltzmann method is used to analyze the influence of grain parameters (grain radius, space, roundness, orientation, and model resolution) on the permeability characteristics (porosity, connectivity, permeability, flow path, and flow velocity). Results show that the grain radius and space have highly positive and negative correlations with permeability properties. The effect of grain roundness and resolution on permeability properties shows a strong regularity, while grain orientation on permeability properties shows strong randomness. This study is of great significance to reveal the fluid flow laws of natural rock structures.

Structire, Properties, and Process Characteristics of Low-K Materials Prepared by PECVD

1999 ◽  
Vol 565 ◽  
Author(s):  
Y. Shimogaki ◽  
S. W. Lim ◽  
E. G. Loh ◽  
Y. Nakano ◽  
K. Tada ◽  
...  
Keyword(s):  
Growth Rate ◽  
Dielectric Constant ◽  
Gas Flow ◽  
Structural Changes ◽  
Silicon Oxide ◽  
Reactive Species ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Step Coverage ◽  
Low K

AbstractLow dielectric constant F-doped silicon oxide films (SiO:F) can be prepared by adding fluorine source, like as CF4 to the conventional PECVD processes. We could obtain SiO:F films with dielectric constant as low as 2.6 from the reaction mixture of SiH4/N2 O/CF4. The structural changes of the oxides were sensitively detected by Raman spectroscopy. The three-fold ring and network structure of the silicon oxides were selectively decreased by adding fluorine into the film. These structural changes contribute to the decrease ionic polarization of the film, but it was not the major factor for the low dielectric constant. The addition of fluorine was very effective to eliminate the Si-OH in the film and the disappearance of the Si-OH was the key factor to obtain low dielectric constant. A kinetic analysis of the process was also performed to investigate the reaction mechanism. We focused on the effect of gas flow rate, i.e. the residence time of the precursors in the reactor, on growth rate and step coverage of SiO:F films. It revealed that there exists two species to form SiO:F films. One is the reactive species which contributes to increase the growth rate and the other one is the less reactive species which contributes to have uniform step coverage. The same approach was made on the PECVD process to produce low-k C:F films from C2F4, and we found ionic species is the main precursor to form C:F films.

scholarly journals A single parameter approach to enhance the microstructural and mechanical properties of beta Ti-Nb alloy via open-air fiber laser nitriding

2020 ◽  
Vol 383 ◽  
pp. 125269 ◽  
Author(s):  
Chi-Wai Chan ◽  
Xianwen Chang ◽  
Mohammad Amin Bozorgzadeh ◽  
Graham C. Smith ◽  
Seunghwan Lee
Keyword(s):  
Mechanical Properties ◽  
Fiber Laser ◽  
Single Parameter ◽  
Laser Nitriding ◽  
Parameter Approach

Adsorption energy as a promising single-parameter descriptor for single atom catalysis in the oxygen evolution reaction

2021 ◽  
Author(s):  
Hai-Cai Huang ◽  
Jun Li ◽  
Yang Zhao ◽  
Jing Chen ◽  
Yu-Xiang Bu ◽  
...  
Keyword(s):  
Oxygen Evolution ◽  
Adsorption Energy ◽  
Oxygen Evolution Reaction ◽  
Single Parameter ◽  
Single Atom ◽  
Highly Efficient

A highly efficient and reliable single-parameter descriptor for offering a strategy to rationally design SACs for the OER.

Growth Kinetics of Molecular Beam Epitaxy on Non-Singular Surfaces

1992 ◽  
Vol 280 ◽  
Author(s):  
J. F. Egler ◽  
N. Otsuka ◽  
K. Mahalingam
Keyword(s):  
Surface Roughness ◽  
Monte Carlo ◽  
Growth Kinetics ◽  
Molecular Beam ◽  
Singular Surface ◽  
Sticking Coefficient ◽  
Singular Surfaces ◽  
Vicinal Surfaces ◽  
Kinetics Of ◽  
Multiple Configurations

ABSTRACTGrowth kinetics on non-singular surfaces were studied by Monte Carlo simulations. In contrast to the growth on singular and vicinal surfaces, the sticking coefficient on the non-singular surfaces was found to decrease with increase of the surface roughness. Simulations of annealing processes showed that surface diffusion of atoms leads to a stationary surface roughness, which is explained by multiple configurations having the lowest energy in the non-singular surface.

Water-Quality Assessment of Lv-Tang River in Zhanjiang, China

2013 ◽  
Vol 295-298 ◽  
pp. 755-758 ◽  
Author(s):  
Ya Yun Liu ◽  
Zhi Hong Li ◽  
Xiao Jian Liang ◽  
Yan Peng Lin ◽  
Rong Hao Wu ◽  
...  
Keyword(s):  
Water Quality ◽  
Water Quality Index ◽  
Quality Index ◽  
Oxygen Demand ◽  
Pollution Index ◽  
Ammonia Nitrogen ◽  
Single Parameter ◽  
Water Quality Parameter ◽  
National Quality

Based on the water quality investigation data of December in 2010, the water environment quality of Lv-tang River in Zhanjiang national urban wetland park was assessed using single water quality parameter model and integrated water quality index model. The results show that the water quality of Lv-tang River is worse than the national quality standards for Grade V. The water is polluted seriously. The main pollutants are total nitrogen (TN), ammonia nitrogen (NH3-N) and chemical oxygen demand CODCr with their average concentrations of 60.49 mg/L, 30.57 mg/L and 227.38mg/L, respectively. The averages of their single parameter pollution index are 30.25 , 19.79 and 8.74. The average of single parameter pollution index of the river is 8.23 which indicated that the river belongs to heavy pollution zone. The integrated water quality index was 22.5 showing that the river belongs to serious pollution zone.

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