Multi-Layer Means of Guiding a Large Displacement Microelectromechanical System
Keyword(s):
Large-displacment MEMS are susceptible to motion in off-axis directions, or motion deviating from the desired path of the device. The multi-layer means of guiding large displacement devices prevents the shuttle from moving away from the substrate, and effectively constrains the transverse motion; the guiding device does not inhibit the motion necessary for proper function of the device. The novelty of the device lies in the placement of the guide; positioning the guide inside of the the shuttle constrains the device without increasing the footprint size.
2017 ◽
Vol 137
(9)
◽
pp. 257-261
2004 ◽
2016 ◽
Vol 108
(7)
◽
pp. 722-749
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