Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device

2010 ◽  
Author(s):  
Vijay Kumar ◽  
Jeffrey F. Rhoads
Keyword(s):  
Transient Behavior ◽  
Distributed Parameter ◽  
Mems Devices ◽  
Lumped Mass ◽  
Modeling And Analysis ◽  
Mems Switch ◽  
The Rich ◽  
Predictive Design ◽  
Commercial Applications ◽  
Excitation Parameters

Bistable microsystems have drawn considerable interest from the MEMS/NEMS research community not only due to their broad applicability in commercial applications, such as switching, but also because of the rich dynamic behavior they commonly exhibit. While a number of prior investigations have studied the dynamics of bistable microsystems, comparatively few works have sought to characterize their transient behavior. The present effort seeks to address this through the modeling and analysis of an optically-actuated, bistable MEMS switch. The work begins with the development of a distributed-parameter representation for the system, which is subsequently reduced to a lumped-mass analog and analyzed through the use of numerical simulation. The influence of various system and excitation parameters, including the applied axial load and optical actuation profile, on the system’s transient response is then investigated. Ultimately, the methodologies and results presented herein should provide for a refined predictive design capability for optically-actuated, bistable MEMS devices.

Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device

2012 ◽  
Vol 7 (2) ◽  
Author(s):  
Vijay Kumar ◽  
Jeffrey F. Rhoads
Keyword(s):  
Transient Behavior ◽  
Distributed Parameter ◽  
Mems Devices ◽  
Lumped Mass ◽  
Modeling And Analysis ◽  
Mems Switch ◽  
The Rich ◽  
Predictive Design ◽  
Commercial Applications ◽  
Excitation Parameters

Bistable microsystems have drawn considerable interest from the MEMS/NEMS research community not only due to their broad applicability in commercial applications, such as switching, but also because of the rich dynamic behavior they commonly exhibit. While a number of prior investigations have studied the dynamics of bistable microsystems, comparatively few works have sought to characterize their transient behavior. The present effort seeks to address this through the modeling and analysis of an optically-actuated, bistable MEMS switch. This work begins with the development of a distributed-parameter representation for the system, which is subsequently reduced to a lumped-mass analog and analyzed through the use of numerical simulation. The influence of various system and excitation parameters, including the applied axial load and optical actuation profile, on the system’s transient response is then investigated. Ultimately, the methodologies and results presented herein should provide for a refined predictive design capability for optically-actuated, bistable MEMS devices.

Equivalent Active Circuits of Distributed Control Systems

2000 ◽  
Author(s):  
H. S. Tzou ◽  
J. H. Ding
Keyword(s):  
Finite Difference ◽  
Distributed Parameter ◽  
Equivalent Circuits ◽  
Electronic Circuits ◽  
Research Issues ◽  
Modeling And Analysis ◽  
Finite Difference Equations ◽  
Dynamics And Control ◽  
Electric Signals ◽  
And Control

Abstract Modeling distributed parameter systems (DPS) by electronic circuits and fabricating the complicated equivalent circuits to evaluate the system characteristics always poses many challenging research issues for years. Modeling and analysis of distributed sensing/control of smart structures and distributed structronic systems are even scarce. This paper is to present a technique to model distributed structronic systems with electronic circuits and to evaluate control behaviors with the fabricated equivalent circuits. Electrical analogies and analysis of distributed structronic systems is proposed and dynamics and control of beam/sensor/actuator systems are investigated. To determine the equivalent circuits and system parameters, higher order partial derivatives are simplified using the finite difference method; partial differential equations (PDE) are transformed to finite difference equations and further represented by electronic components and circuits. To provide better signal management and stability, active electronic circuit systems are designed and fabricated. Electric signals from the distributed system circuits (i.e., soft and hard) are compared with results obtained by classical theoretical and other (e.g., the finite element, and experimental) techniques.

On Adaptive-Passive Vibration Suppression Using Distributed-Parameter Absorbers

2000 ◽  
Author(s):  
Nader Jalili
Keyword(s):  
Vibration Suppression ◽  
Excitation Frequency ◽  
Wide Band ◽  
Distributed Parameter ◽  
Vibration Absorber ◽  
Frequency Bandwidth ◽  
Lumped Mass ◽  
Adaptive Capability ◽  
Active Vibration ◽  
Tuning Strategy

Abstract A semi-active vibration absorber with adaptive capability is presented to improve wide band vibration suppression characteristics of harmonically excited structures. The absorber subsection consists of a double-ended cantilever beam carrying an intermediate lumped mass. The adaptive capability is achieved through concurrent adjustment of the position of the moving mass, along the beam, to comply with the desired optimal performance. If such an absorber is attached to a vibrating body, it effectively absorbs vibrations at all frequencies that belong to the absorber frequency bandwidth. Numerical simulations are provided to verify the effectiveness of the proposed absorption scheme. It is shown that the tuning strategy tries to follow and match the absorber natural frequency with the excitation frequency. The optimally tuned absorber provides considerable vibration suppression improvement over the passive and de-tuned absorbers, for wide band excitation disturbances.

scholarly journals Modeling and Analysis of Amplitude-Frequency Characteristics of Torsional Vibration for Automotive Powertrain

2020 ◽  
Vol 2020 ◽  
pp. 1-17
Author(s):  
Jinli Xu ◽  
Jiwei Zhu ◽  
Feifan Xia
Keyword(s):  
Torsional Vibration ◽  
Transmission Error ◽  
Frequency Characteristics ◽  
Response Analysis ◽  
Lumped Mass ◽  
Modeling And Analysis ◽  
Gear Mesh ◽  
Runge Kutta Method ◽  
Lumped Mass Method ◽  
Automotive Powertrain

In the present paper, the amplitude-frequency characteristics of torsional vibration are discussed theoretically and experimentally for automotive powertrain. A bending-torsional-lateral-rocking coupled dynamic model with time-dependent mesh stiffness, backlash, transmission error etc. is proposed by the lumped-mass method to analysis the amplitude-frequency characteristic of torsional vibration for practical purposes, and equations of motive are derived. The Runge–Kutta method is employed to conduct a sweep frequency response analysis numerically. Furthermore, a torsional experiment is performed and validates the feasibility of the theoretical model. As a result, some torsional characteristics of automotive powertrain are obtained. The first three-order nature torsional frequencies are predicted. Torsional behaviors only affect the vibration characteristics of a complete vehicle at low-speed condition and will be reinforced expectedly while increasing torque fluctuation. Gear mesh excitations have little effects on torsional responses for such components located before mesh point but a lot for ones behind it. In particular, it is noted that the torsional system has a stiffness-softening characteristic with respect to torque fluctuation.

scholarly journals Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Hatem Samaali ◽  
Fehmi Najar ◽  
Slim Choura
Keyword(s):  
Transmission Line ◽  
Electrostatic Force ◽  
Equations Of Motion ◽  
Actuation Voltage ◽  
Transient Behavior ◽  
Mems Switch ◽  
Grid Points ◽  
Capacitive Mems ◽  
Better Than ◽  
Rf Performances

We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is applied between the two microbeams to yield the switch to its ON and OFF states. We derive the equations of motion of the system and associated boundary conditions and solve the static and dynamic problems using the differential quadratic method. We show that using only nine grid points gives relatively accurate results when compared to those obtained using FEM. We also examine the transient behavior of the microswitch and obtain results indicating that subsequent reduction in actuation voltage, switching time, and power consumption are expected along with relatively good RF performances. ANSYS HFSS simulator is used in this paper to extract the RF characteristics of the microswitch. HFSS simulation results show that the insertion loss is as low as −0.31 dB and that the return loss is better than −12.41 dB at 10 GHz in the ON state. At the OFF state, the isolation is lower than −23 dB in the range of 10 to 50 GHz.

Vibration Characteristics Analysis of a Pair of Aviation Herringbone Gears

2013 ◽  
Vol 706-708 ◽  
pp. 1666-1671
Author(s):  
Ning Zhao ◽  
Chen Xi Fu ◽  
Yong Zhi Zhao ◽  
Meng Qi Zhang
Keyword(s):  
Efficiency Analysis ◽  
Helical Gear ◽  
Vibration Characteristics ◽  
Lumped Mass ◽  
Mass Model ◽  
Coupling Relationship ◽  
Characteristics Analysis ◽  
Lumped Mass Model ◽  
Herringbone Gear ◽  
Excitation Parameters

The lumped mass model of an aviation herringbone gear is established, which takes coupling relationship between the two helical gear into consideration. Based on this model, motional differential equation is derived, and excitation parameters of gear pair are calculated at the same time. The dynamic differential equations are solved to obtain the dynamic response of each degree of freedom, then vibration characteristics of aviation herringbone gear in different speed and power is analyzed and the appropriate rotational speed and power of different flight status is determined. Research on the reliability analysis of aviation herringbone gear and the dynamic efficiency analysis is of great significance.

3D Heterogeneous Integration using MEMS Devices for RF Applications

2012 ◽  
Vol 1427 ◽  
Author(s):  
Fumihiko Nakazawa ◽  
Xiaoyu Mi ◽  
Takeaki Shimanouchi ◽  
Tadashi Nakatani ◽  
Takashi Katsuki ◽  
...  
Keyword(s):  
Rf Mems ◽  
Acoustic Resonator ◽  
Tunable Filter ◽  
Wafer Surface ◽  
Heterogeneous Integration ◽  
Mems Devices ◽  
Mems Switches ◽  
Mems Switch ◽  
Film Bulk ◽  
Rf Applications

ABSTRACTThis paper presents novel 3D heterogeneous integrations using MEMS Devices for RF applications. We propose a 3D heterogeneous integration method that combines the advantages of LTCC, passive integration, and MEMS technologies. The basic concept is to form a large-size LTCC wiring wafer and then to form high-Q passives or MEMS filters directly on the wafer surface. Other functional devices such as ICs, SAWs, and MEMS switches are mounted above the surface-formed devices. A miniaturized duplexer consisted of IPD, SAW, and film bulk acoustic resonator (FBAR); and a next generation duplexer module consisted of an MEMS tunable filter and a piezoelectric transducer (PZT)-actuated RF MEMS switch were constructed to demonstrate its feasibility and effectiveness.

The Dynamics of Rotor-Bearing Systems Using Finite Elements

1976 ◽  
Vol 98 (2) ◽  
pp. 593-600 ◽  
Author(s):  
H. D. Nelson ◽  
J. M. McVaugh
Keyword(s):  
Element Model ◽  
Variable Cross Section ◽  
Distributed Parameter ◽  
Viscous Damping ◽  
Variable Cross ◽  
Mass Analysis ◽  
Lumped Mass ◽  
Rotatory Inertia ◽  
Rigid Disks ◽  
Rotor Bearing

A procedure is presented for dynamic modeling of rotor-bearing systems which consist of rigid disks, distributed parameter finite rotor elements, and discrete bearings. The formulation is presented in both a fixed and rotating frame of reference. A finite element model including the effects of rotatory inertia, gyroscopic moments, and axial load is developed using the consistent matrix approach. A reduction of coordinates procedure is utilized to model elements with variable cross-section properties. The bearings may be nonlinear, however, only the linear stiffness and viscous damping case is considered. The natural whirl speeds and unbalance response of a typical overhung system is presented for two sets of bearing parameters: (i) undamped isotropic, (ii) undamped orthotropic. A comparison of results is made with an independent lumped mass analysis.

A Virtual Velocity Sensor for Improved Transient Performance of Electrostatically-Actuated MEMS

2003 ◽  
Author(s):  
D. H. S. Maithripala ◽  
Jordan M. Berg ◽  
W. P. Dayawansa
Keyword(s):  
Transient Behavior ◽  
Observer Design ◽  
Nonlinear Observer ◽  
Dynamics Simulation ◽  
Mems Devices ◽  
Electrostatically Actuated ◽  
Stabilizing Controllers ◽  
Bifurcation Phenomenon ◽  
Direct Sensing ◽  
Error Dynamics

Electrostatically-actuated MEMS devices suffer from a non-linear bifurcation phenomenon called “snap-through” or “pull-in.” This bifurcation severely limits the operating region of such devices. Control schemes have been proposed to eliminate snapthrough. These stabilizing controllers can be implemented using relatively straight forward current and voltage measurements. However, in order to alter the transient behavior of the system, for example to reduce settling time, or to minimize the likelihood of contacting the bottom electrode, the controller should also include terms dependent on the velocity of the movable electrode. Direct sensing of this velocity during normal device operation is typically not feasible. In this paper we show how the electrode velocity may be indirectly sensed using only capacitance and voltage measurements. Our approach is based on well known techniques of nonlinear observer design, and provides arbitrary fast linear error dynamics. Simulation results show excellent performance.

Package Designs and Associated Challenges for Environment Sensitive MEMS Sensors

2009 ◽  
Author(s):  
Vijay Sarihan ◽  
Jian Wen ◽  
Gary Li
Keyword(s):  
Design Methodology ◽  
Failure Modes ◽  
Electrical Response ◽  
Cost Effective ◽  
Mems Devices ◽  
Mems Sensors ◽  
Package Design ◽  
Sensor Applications ◽  
Predictive Design ◽  
Package Reliability

Effective packaging of MEMS devices has lagged the development of unique sensors suitable for a variety of applications. Packaging challenges are often what prevent wider application and extensive commercialization of MEMS Sensors. MEMS devices are designed for sensing the environment. Their detection capability should not be adversely impacted by the package and the package reliability should not be compromised by the environment. Two different Sensor applications are used to highlight the packaging challenges. In one case the Sensor electrical output response was becoming nonlinear in the range of valid operating temperatures after packaging. The ASIC controller was not able to compensate for this nonlinearity. In the second application package design caused electrical response resonance within the operating environment range. Advanced package design methodology was developed to couple simulations for package reliability prediction for different failure modes with Sensor performance predictions to deliver cost effective and reliable packages. The predictive design methodology was extensively validated with experimental results at every stage.

Sign in / Sign up

Export Citation Format

Share Document