Position Alignment of Micro Manipulator Using Root Mean Square Errors for Maskless Lithography System

2013 ◽  
Author(s):  
Yong Seok Ihn ◽  
Sae Whan Park ◽  
Ja Choon Koo
Keyword(s):  
Micro Electro Mechanical System ◽  
Maskless Lithography ◽  
Flat Panel Display ◽  
Mems Devices ◽  
System A ◽  
The Status ◽  
Volume Production ◽  
Mean Square Errors ◽  
Lithography System ◽  
Exposure Process

A precision optical exposure process of lithography has become one of the essential processes to manufacture and develop micro electro mechanical system (MEMS) devices, flat panel display (FPD), and semiconductor. For a typical exposure process for the lithography, a photomask that is often very expensive is required to generate patterns[1]. So it is very inefficient not only in terms of cost but also the time due to the reliance on the photomasks in development. The alternative solution is the maskless lithography system, which does not use photomasks since the patterns are generated by using a digital mirror device (DMD). The unit mirror of a digital mirror device has two kinds of status which are on and off, then the status of unit mirrors configures a pattern called point array method. The maskless lithography system can reduce the amount of work forces significantly and save money as well. However, the maskless lithography system has a critical drawback, which is a low throughput since the patterns are generated in a line. This is an intrinsic problem of point array method. So in most volume production processes of maskless lithography system, a number of optical heads are used in order to maximize throughput of the expositing process. And to guarantee the exposure quality, multiple numbers of optical heads should be accurately aligned to each other, and then the focal plane of each optical head is also well aligned with chuck.

scholarly journals Seabird Biologging System with Compact Waterproof Airflow Sensor

2021 ◽  
Vol 33 (3) ◽  
pp. 466-474
Author(s):  
Hidetoshi Takahashi ◽  
Masaru Naruoka ◽  
Yoshinobu Inada ◽  
Katsufumi Sato ◽  
◽  
...  
Keyword(s):  
Dorsal Surface ◽  
Micro Electro Mechanical System ◽  
Pitot Tube ◽  
Flight Performance ◽  
Airflow Velocity ◽  
Mems Sensor ◽  
System A ◽  
Tube Type ◽  
Direct Measurement Method ◽  
Airflow Sensor

This paper presents a seabird biologging system with a compact waterproof airflow sensor. Although biologging methods have attracted attention in the evaluation of seabird flight performance, a direct measurement method of airflow velocity has not yet been established. When an airflow sensor is added to a biologging system, a more accurate assessment of the flight performance can be obtained. We developed a compact Pitot tube-type airflow sensor that is specialized for seabird biologging systems. Here, we integrated micro electro mechanical system (MEMS) sensor chips and a sensing circuit into the Pitot tube housing. Then, we conducted a wind tunnel experiment using a stuffed seabird and the fabricated sensor. The results confirmed that the sensor responds to the wind speed even when attached to the dorsal surface of the seabird. Based on the above, we believe that the proposed sensor can be applied to practical seabird biologging systems.

scholarly journals Multi-Weather Evaluation of Nowcasting Methods Including a New Empirical Blending Scheme

Atmosphere ◽  
2020 ◽  
Vol 11 (11) ◽  
pp. 1166
Author(s):  
Hsin-Hung Lin ◽  
Chih-Chien Tsai ◽  
Jia-Chyi Liou ◽  
Yu-Chun Chen ◽  
Chung-Yi Lin ◽  
...  
Keyword(s):  
Numerical Model ◽  
Model Prediction ◽  
Radar Data ◽  
False Alarms ◽  
Rainfall Events ◽  
System A ◽  
Radar Echo ◽  
Grid Points ◽  
Mean Square Errors ◽  
Heavy Rainfall Events

This study utilized a radar echo extrapolation system, a high-resolution numerical model with radar data assimilation, and three blending schemes including a new empirical one, called the extrapolation adjusted by model prediction (ExAMP), to carry out 150 min reflectivity nowcasting experiments for various heavy rainfall events in Taiwan in 2019. ExAMP features full trust in the pattern of the extrapolated reflectivity with intensity adjustable by numerical model prediction. The spatial performance for two contrasting events shows that the ExAMP scheme outperforms the others for the more accurate prediction of both strengthening and weakening processes. The statistical skill for all the sampled events shows that the nowcasts by ExAMP and the extrapolation system obtain the lowest and second lowest root mean square errors at all the lead time, respectively. In terms of threat scores and bias scores above certain reflectivity thresholds, the ExAMP nowcast may have more grid points of misses for high reflectivity in comparison to extrapolation, but serious overestimation among the points of hits and false alarms is the least likely to happen with the new scheme. Moreover, the event type does not change the performance ranking of the five methods, all of which have the highest predictability for a typhoon event and the lowest for local thunderstorm events.

scholarly journals The Ocean Pout, Zoarces americanus, and the Ocean Sunfish, Mola mola: Additions to the Marine Ichthyofauna of the Lower Saint John River System, New Brunswick, with a Summary of Marine Fish Reported from the Estuary

2013 ◽  
Vol 127 (1) ◽  
pp. 38 ◽  
Author(s):  
Donald F. McAlpine
Keyword(s):  
New Brunswick ◽  
River System ◽  
Marine Species ◽  
Sensu Stricto ◽  
Marine Fishes ◽  
Ocean Sunfish ◽  
System A ◽  
Mola Mola ◽  
Saint John ◽  
The Status

Recent records for the Ocean Pout, Zoarces americanus (collected 11 February 2011), and the Ocean Sunfish, Mola mola (photograph taken 24 June 2012), in the lower Saint John River system, New Brunswick, add to the list of marine fishes reported from this oceanographically unique estuary system. A total of 62 species of strictly freshwater, anadromous, catadromous, and marine fishes have now been recorded in the Saint John River system, with 49 of these in the Saint John River sensu stricto. The Acadian Redfish, Sebastes faciatus, a species assessed as threatened by the Committee on the Status of Endangered Wildlife in Canada, appears to be among these. While strictly marine fishes may contribute relatively little to the overall biomass of fishes in the Saint John River system, marine species account for 30.6% of the biodiversity of fishes in the river to date. This suggests that marine fishes may be a more significant component of the ichthyofauna of the lower Saint John River system than is generally recognized.

Perceived Level of Benefits and Risk Core Functionalities of an EHR System

2011 ◽  
pp. 297-312 ◽  
Author(s):  
Diane C. Davis ◽  
Minal Thakkar
Keyword(s):  
Significant Relationship ◽  
Institute Of Medicine ◽  
The Core ◽  
System A ◽  
The Status ◽  
Research Questions ◽  
Results Management ◽  
Core Functionality ◽  
Benefit And Risk

The need to adopt an electronic health record (EHR) system in United States (U.S.) hospitals seems to be more and more obvious when evaluating the benefits of improved patient safety, quality of care, and efficiency. The purpose of the study was to identify the status of EHR systems in U.S. hospitals in regard to the core functionalities implemented (as identified by the Institute of Medicine) and to determine if there was a significant relationship between perceived level of benefit and risk with the use of each core functionality, as well as if there was a significant relationship between the status of the EHR system and size of hospital. A national survey of U.S. hospitals was conducted to answer the research questions. The results showed that 37% had some components in all.of the core functionalities of an EHR system, while 27% were using at least some functionalities. Health information and data, administrative processes, and results management were the three core functionalities that a majority of hospitals had as a part of their EHR system. A significant positive correlation between perceived benefits and risks was found in all of the eight core functionalities. There was no significant relationship found between status of EHR system and size of hospitals.

scholarly journals Ritual Systems, Ritualized Bodies, and the Laws of Liturgical Development

2019 ◽  
Vol 49 (1) ◽  
pp. 89-110
Author(s):  
Kimberly Hope Belcher
Keyword(s):  
Status Quo ◽  
Performance Theory ◽  
Theory Approach ◽  
System A ◽  
Colonial Expansion ◽  
Rapid Changes ◽  
Liturgical Texts ◽  
The Status ◽  
Ritual Systems ◽  
And Linguistics

The “laws” of comparative liturgical development (Baumstark, Taft) are derived from pre-modern liturgical texts and the findings of early biology and linguistics. Yet Christian liturgy is not an organically evolving species; it is a ritual system, a cultural, political, self-regulating, self-reproducing set of rites that are used to interpret and correct one another. Focusing on the reception of new practices by practiced communities, a performance theory approach spotlights the systemic interrelationships of rites and the ritual habitus of human bodies. A ritual system makes particular meanings seem natural, permitting some new liturgical developments, impeding others. Ritualized bodies constrain rapid changes, while the entrance of bodies ritualized in a different system changes the environment, leading some to attempt to reinforce the status quo. Technologies for passing on liturgies are developed and used when a crisis demands change or imperils valued practice. Accounting for differences in liturgical recording, early and medieval liturgical reception may inform our understanding of the colonial expansion of liturgy, when technologies for transmitting liturgical rites were brought to bear on bodies ritualized in indigenous systems of the Americas, Africa, and Asia. Performative evidence from the colonial context may in turn help interpret ambiguous sources from earlier periods.

A high-speed exposure method for digital micromirror device based scanning maskless lithography system

Optik ◽  
2019 ◽  
Vol 185 ◽  
pp. 1036-1044 ◽  
Author(s):  
Chao Peng ◽  
Zezhou Zhang ◽  
Jianxiao Zou ◽  
Wenming Chi
Keyword(s):  
High Speed ◽  
Maskless Lithography ◽  
Digital Micromirror Device ◽  
Exposure Method ◽  
Lithography System

The status of inhibition in Hull's system: A theoretical revision.

1958 ◽  
Vol 65 (3) ◽  
pp. 179-182 ◽  
Author(s):  
H. Gwynne Jones
Keyword(s):  
System A ◽  
The Status

Development of New Evaluation Method for Adhesive Strength between Microsized Photoresist and Si Substrate of MEMS Devices

2007 ◽  
Vol 345-346 ◽  
pp. 1185-1188 ◽  
Author(s):  
Chiemi Ishiyama ◽  
Masato Sone ◽  
Yakichi Higo
Keyword(s):  
Adhesive Strength ◽  
Evaluation Method ◽  
Testing Machine ◽  
Micro Electro Mechanical System ◽  
Shear Loading ◽  
Cylindrical Shape ◽  
Mems Devices ◽  
Si Substrate ◽  
Loading Mode ◽  
Adhesive Shear Strength

An evaluation method for adhesive bending and shear strengths between microsized components and silicon substrate were developed to quantitively determine micro-sized adhesive strength for micro-electro mechanical system (MEMS) devices. Cylindrical shape is employed as a micro-sized adhesive specimen to simply analyze adhesive stresses of both shear and bending. Micro-sized adhesive tests between micro-sized SU-8 cylindrical specimen and Si substrate were performed using a mechamical testing machine for micro-sized material that has developed by our group. Delamination of all the specimens occurred within the SU-8 near by the substrate in a brittle manner under both bending and shear loading conditions. The adhesive bending stress is 57 % lower than the bend strength of the SU-8 material. The adhesive shear strength under bend loading is 15 % lower than the adhesive strength under shear loading and the delamination surface is different in each loading mode. All the results suggest that some defects at the interface must induce the stress concentration, which may make the apparent strength of SU-8 decrease.

The Local Government Body Member and the Local Government Employee as a Passive Bribery Offender under Polish Criminal Law

2020 ◽  
Vol 18 (2) ◽  
pp. 433-448
Author(s):  
Marek Kulik
Keyword(s):  
Local Government ◽  
Criminal Law ◽  
Legal System ◽  
Penal Code ◽  
Government Employee ◽  
The Public ◽  
System A ◽  
The Status ◽  
Government Body

The study addresses the status of a local government body member and a local government employee as a person holding a public function in the meaning of Polish criminal law. In the Polish legal system, a person who holds a public function may be held criminally liable for passive bribery (bribe accepting) defined in Article 229 of the Polish Penal Code.  Pursuant to Article 115 § 19 PC, a public officer and persons belonging to several other categories are persons holding a public function, while  Article 115 § 13 PC defines the public officer by detailed enumeration of specific persons. The study provides an analysis of these concepts in view of the provisions governing the status of local government officers and persons employed with local government organisational units.

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