Appling Micro Devices to Scanning Probe Microscopes for Micro/Nano Tribology Study (Keynote)

2005 ◽  
Author(s):  
Yasuhisa Ando ◽  
Shiraishi Naoki
Keyword(s):  
Three Dimensional ◽  
Force Sensor ◽  
Lateral Force ◽  
Scanning Probe Microscope ◽  
Silicon On Insulator ◽  
Experimental Results ◽  
The Other ◽  
Scanning Probe ◽  
Electromechanical Systems ◽  
Probe Microscope

We have designed and fabricated two kinds of micro devices. The mechanisms of the micro devices and some experimental results using the micro devices are described in this paper. The first device is a three-dimensional (3D) microstage and the other is a lateral force sensor. Each device was fabricated on an SOI (silicon on insulator) wafer using MEMS (micro electromechanical systems) technology. We applied these devices to an SPM (scanning probe microscope) and conducted tribology tests.

scholarly journals A Scanning Probe Microscope in My Scanning Electron Microscope?

1995 ◽  
Vol 3 (2) ◽  
pp. 22-23
Author(s):  
George J. Collins
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scientific Literature ◽  
Scanning Probe Microscope ◽  
The Other ◽  
Scanning Probe ◽  
Primary Reason ◽  
Probe Microscope ◽  
Scanning Electron

Scanning probe microscopes (SPMs) designed to fit into scanning elec- tron microscopes (SEMs) are now becoming commercially available and you might ask, "Why would I want to put an SPM in my SEM"? The primary reason is that the too forms of microscope are very complimentary. Each microscope extends the power of the other. The SEM can do things that are hard to do with an SPM, and vice versa.Not long after the introduction of the STM and the AFM, a few re- searchers built custom SPMs and installed them in their SEMs. The reports of these projects to build hybrid microscopes and examples of the data they produced can be found in the scientific literature.

AFM-Based Testing and Measurements of Contact and Stiction in a Micromechanical Switch

2004 ◽  
Author(s):  
Lei Chen ◽  
Nicol E. McGruer ◽  
George G. Adams
Keyword(s):  
Contact Resistance ◽  
Scanning Probe Microscope ◽  
The Other ◽  
Scanning Probe ◽  
Repeated Loading ◽  
Experimental Setup ◽  
Fundamental Physics ◽  
High Stiffness ◽  
Probe Microscope

Cycling of a micromechanical switch with gold-on-gold contacts demonstrates that the contact resistance decreases and the adherence force increases. An experimental setup using a Scanning Probe Microscope (SPM) is allowing the fundamental physics of this behavior to be better understood. The setup includes two side-by-side cantilevers — one of high stiffness which applies the repeated loading and the other a standard profiling cantilever allowing in-situ measurements of topographical changes.

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

Sign in / Sign up

Export Citation Format

Share Document