Fabrication and characterization of a micromachined 5 mm inductively coupled plasma generator

2000 ◽  
Vol 18 (5) ◽  
pp. 2446 ◽  
Author(s):  
J. Hopwood ◽  
O. Minayeva ◽  
Y. Yin
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Generator ◽  
Inductively Coupled ◽  
Fabrication And Characterization

scholarly journals Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching

2020 ◽  
Author(s):  
Jing Ma ◽  
Yongqiang Zhao ◽  
Wen Liu ◽  
Fuhua Yang ◽  
Xiaodong Wang
Keyword(s):  
Inductively Coupled Plasma ◽  
Fabrication Process ◽  
Etching Process ◽  
Photon Absorption ◽  
Hydrophobic Property ◽  
Water Contact ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Fabrication And Characterization

Abstract GaAs nanostructures has attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate were rarely reported and most of the preparation processes are complex. Here, we reported a black GaAs fabrication process using a simple Inductively coupled plasma (ICP) etching process，with no extra lithography process. The fabricated sample has a low Reflectance value，close to zero. Besides, the black GaAs also displayed hydrophobic property, with a water contact angle (CA) of 125°. This kind of black GaAs etching process could be added to the fabrication workflow of photodetectors and solar cell devices to further improve their characteristics.

scholarly journals Speciation of organometals using a synchronizing GC-EIMS and GC-ICPMS system for simultaneous detection

2014 ◽  
Vol 29 (6) ◽  
pp. 1132-1137 ◽  
Author(s):  
Lucia D'Ulivo ◽  
Lu Yang ◽  
Yong-Lai Feng ◽  
John Murimboh ◽  
Zoltán Mester
Keyword(s):  
Gas Chromatography ◽  
Mass Spectrometer ◽  
Inductively Coupled Plasma ◽  
Simultaneous Detection ◽  
Electron Ionization ◽  
Ionization Mass ◽  
Inductively Coupled

Accurate quantitation and characterization of organometals are successfully achieved by splitting the gas chromatography (GC) flow to both an electron ionization mass spectrometer (EIMS) and an inductively coupled plasma mass spectrometer (ICPMS).

Geochemical Characterization of Lapita Pottery Via Inductively Coupled Plasma-mass Spectrometry (ICP-MS)

Archaeometry ◽  
2004 ◽  
Vol 46 (1) ◽  
pp. 35-46 ◽  
Author(s):  
D. J. Kennett ◽  
A. J. Anderson ◽  
M. J. Cruz ◽  
G. R. Clark ◽  
G. R. Summerhayes
Keyword(s):  
Mass Spectrometry ◽  
Inductively Coupled Plasma ◽  
Geochemical Characterization ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Plasma Mass Spectrometry
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