Synthesis of AlOx thin films by atmospheric-pressure mist chemical vapor deposition for surface passivation and electrical insulator layers
2020 ◽
Vol 38
(3)
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pp. 033413
2014 ◽
Vol 244
◽
pp. 98-108
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2006 ◽
Vol 45
(8A)
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pp. 6342-6345
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Keyword(s):
2013 ◽
Vol 1
(39)
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pp. 6188
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Keyword(s):
Atmospheric Pressure Chemical Vapor Deposition of Copper Thin Films: I . Horizontal Hot Wall Reactor
1991 ◽
Vol 138
(11)
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pp. 3499-3504
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Keyword(s):
1996 ◽
Vol 288
(1-2)
◽
pp. 116-119
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Keyword(s):