Measuring line edge roughness with pixel sizes larger than its value: a mathematical and computational approach
2021 ◽
Vol 20
(03)
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2008 ◽
Vol 47
(4)
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pp. 2501-2505
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Study of the acid-diffusion effect on line edge roughness using the edge roughness evaluation method
2002 ◽
Vol 20
(4)
◽
pp. 1342
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Keyword(s):
On Line
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2013 ◽
Vol 60
(10)
◽
pp. 3277-3284
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Keyword(s):
2021 ◽
Vol 39
(3)
◽
pp. 032602
Keyword(s):
2006 ◽
Vol 53
(11)
◽
pp. 2755-2763
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