Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature
Keyword(s):
2016 ◽
Vol 61
(22)
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pp. 2536-2542
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2007 ◽
Vol 46
(4A)
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pp. 1415-1426
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1988 ◽
Vol 17
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pp. 139-148
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1992 ◽
Vol 139
(4)
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pp. 1151-1159
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1989 ◽
Vol 24
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pp. 213-219
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1992 ◽
Vol 10
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pp. 18-28
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2002 ◽
Vol 41
(Part 1, No. 9)
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pp. 5734-5738
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