Gas-Assisted Focused Ion Beam Etching of Indium–Tin Oxide Film

2008 ◽  
Vol 47 (1) ◽  
pp. 347-350 ◽  
Author(s):  
Ming-Kwei Lee ◽  
Kwei-Kuan Kuo
Author(s):  
Thomas Barilero ◽  
Thomas Le Saux ◽  
Ludovic Julien ◽  
Vincent Croquette ◽  
Pierre-Olivier Chapuis ◽  
...  

Ion beam etching (IBE) was used to microfabricate resistive heaters in indium-tin-oxide (ITO). The device was then closed with a microfluidic chamber and its thermal behavior was investigated using the 3ω method. Experiments and finite element model (FEM) simulations both satisfactorily agreed with a simple one-dimensional model for heat diffusion.


2012 ◽  
Vol 564 (1) ◽  
pp. 185-190 ◽  
Author(s):  
Sung Ho Lee ◽  
Sang Hyun Cho ◽  
Hyo Jin Kim ◽  
Sung Hong Kim ◽  
Sang Geul Lee ◽  
...  

The Analyst ◽  
1995 ◽  
Vol 120 (10) ◽  
pp. 2579-2583 ◽  
Author(s):  
Xiaohua Cai ◽  
Božidar Ogorevc ◽  
Gabrijela Tavčar ◽  
Joseph Wang

Author(s):  
Qi Chen ◽  
W. D. Griffiths

AbstractIn this work, Mo was added into Al melt to reduce the detrimental effect of double-oxide film defect. An air bubble was trapped in a liquid metal (2L99), served as an analogy for double-oxide film defect in aluminum alloy castings. It was found that the addition of Mo significantly accelerated the consumption of the entrapped bubble by 60 pct after holding for 1 hour. 2 sets of testbar molds were then cast, with 2L99 and 2L99+Mo alloy, with a badly designed running system, intended to deliberately introduce double oxide film defects into the liquid metal. Tensile testing showed that, with the addition of Mo, the Weibull modulus of the Ultimate Tensile Strength and pct Elongation was increased by a factor of 2.5 (from 9 to 23) and 2 (from 2.5 to 4.5), respectively. The fracture surface of 2L99+Mo alloy testbars revealed areas of nitrides contained within bi-film defects. Cross-sections through those defects by Focused Ion Beam milling suggested that the surface layer were permeable, which could be as thick as 30 μm, compared to around 500 nm for the typical oxide film thickness. Transmission Electron Microscopy analysis suggested that the nitride-containing layer consisted of nitride particles as well as spinel phase of various form. The hypothesis was raised that the permeability of the nitride layers promote the reaction between the entrapped atmosphere in the defect and the surrounding liquid metal, reducing the defect size and decreasing their impact on mechanical properties.


2008 ◽  
Vol 47 (1) ◽  
pp. 197-201 ◽  
Author(s):  
Kwang Ho Kim ◽  
Sang Jik Kwon ◽  
Tae Oh Tak

2011 ◽  
Vol 7 (4) ◽  
pp. 594-597
Author(s):  
Zhan-Shuo Hu ◽  
Fei-Yi Hung ◽  
Shoou-Jinn Chang ◽  
Bohr-Ran Huang ◽  
Bo-Cheng Lin ◽  
...  

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