Microfluidic Cell Heating Characterized by 3-ω Measurements
Keyword(s):
Ion Beam
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Ion beam etching (IBE) was used to microfabricate resistive heaters in indium-tin-oxide (ITO). The device was then closed with a microfluidic chamber and its thermal behavior was investigated using the 3ω method. Experiments and finite element model (FEM) simulations both satisfactorily agreed with a simple one-dimensional model for heat diffusion.
2016 ◽
Vol 4
(3)
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pp. 1161-1168
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Keyword(s):
2020 ◽
Vol 22
(13)
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pp. 6881-6887
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Keyword(s):