SiN$_{x}$ Double Layer Antireflection Coating by Plasma-Enhanced Chemical Vapor Deposition for Single Crystalline Silicon Solar Cells

2011 ◽  
Vol 50 (8) ◽  
pp. 08KE01 ◽  
Author(s):  
Daeyeong Gong ◽  
Youn-Jung Lee ◽  
Minkyu Ju ◽  
Jisoo Ko ◽  
Doohwan Yang ◽  
...  
Keyword(s):  
Solar Cells ◽  
Chemical Vapor Deposition ◽  
Double Layer ◽  
Vapor Deposition ◽  
Crystalline Silicon ◽  
Chemical Vapor ◽  
Antireflection Coating ◽  
Silicon Solar Cells ◽  
Single Crystalline Silicon ◽  
Crystalline Silicon Solar Cells

Mist chemical vapor deposition of aluminum oxide thin films for rear surface passivation of crystalline silicon solar cells

2014 ◽  
Vol 7 (2) ◽  
pp. 021303 ◽  
Author(s):  
Takayuki Uchida ◽  
Toshiyuki Kawaharamura ◽  
Kenji Shibayama ◽  
Takahiro Hiramatsu ◽  
Hiroyuki Orita ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Aluminum Oxide ◽  
Vapor Deposition ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Rear Surface ◽  
Chemical Vapor ◽  
Silicon Solar Cells ◽  
Crystalline Silicon Solar Cells
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