Investigation of RuO[sub 2]-Incorporated Pt Layer as a Bottom Electrode and Diffusion Barrier for High Epsilon Capacitor Applications
1999 ◽
Vol 3
(8)
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pp. 373
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2019 ◽
Vol 450
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pp. 114-117
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1977 ◽
Vol 42
(5)
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pp. 758-760
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2016 ◽
Vol 34
(4)
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pp. 041504
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