Thermal Oxidation of Silicon in Dry Oxygen: Growth‐Rate Enhancement in the Thin Regime: II . Physical Mechanisms
1985 ◽
Vol 132
(11)
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pp. 2693-2700
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1985 ◽
Vol 132
(11)
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pp. 2685-2693
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2011 ◽
Vol 322
(1)
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pp. 10-14
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1993 ◽
Vol 140
(9)
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pp. 2703-2709
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