Spectroscopic-ellipsometric study of native oxide removal by liquid phase HF process
2014 ◽
Vol 219
◽
pp. 59-62
◽
Keyword(s):
2005 ◽
Vol 8
(1-3)
◽
pp. 231-237
◽
Native Oxide Removal on Si Surfaces byNF3-Added Hydrogen and Water Vapor Plasma Downstream Treatment
1994 ◽
Vol 33
(Part 1, No. 4B)
◽
pp. 2207-2211
◽
2020 ◽
Vol 1004
◽
pp. 284-289
◽
Keyword(s):
Keyword(s):