The saw tooth grooves of blazed grating ruled by ruling engine are formed by diamond
tool which presses on the aluminum film evaporated on the substrate of optical glass or metal. The
real shape of ruled saw tooth groove is different from that of the ideal groove and the ruling process
indicates that there are the zero order planes, similar to the flat tops, on the grating grooves. The
results of Fourier analysis for the real ruled grating featuring the zero order plane structure shows
that the flat top width is an important factor for grating efficiency. Additionally, bigger pressure
value loaded on the diamond tool and bigger lateral pressure value on the aluminum film will be
benefit to the improvement of grating diffraction efficiency. Based on the grating interferometer,
the high precision positioning control system of ruling engine guarantees the accuracy of the
grooves space. High density blazed grating whose space is 0.83μm is manufactured and its’ grooves
spaces are very equidistant and uniform under the view field of AFM. And the infrared blazed
grating, whose diffraction efficiency in the first order is up to 97 percent, is ruled successfully also.
Bragg Grating Diffraction light at Different Wavelength and Incident Light