Structure and Vibrational Spectra of thin Films β-Ga2O3
Keyword(s):
The structure, phase composition and surface morphology of thin films b-Ga2O3, obtained by high-frequency ion-plasma sputtering, after annealing at different atmosphere was investigated. The spectra of IR reflection of system thin film b-Ga2O3 - fused quartz substrate υ-SiO2 in region 400–1600 cm-1 at 295 K were measured. The peaks in the spectrum of films b-Ga2O3, associated with vibration of Ga – O fragments in structural tetrahedral GaO4 and octahedral GaO6 complexes was interpreted.
2013 ◽
Vol 39
(1)
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pp. 130-133
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2017 ◽
Vol 31
(1)
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pp. 107-116
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Keyword(s):
2012 ◽
Vol E95.C
(5)
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pp. 936-941
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2016 ◽
Vol 10
(5)
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pp. 1092-1095
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Keyword(s):