Microstructures and interdiffusions of Pt/Ti electrodes with respect to annealing in the oxygen ambient

1995 ◽  
Vol 10 (7) ◽  
pp. 1790-1794 ◽  
Author(s):  
Kyu Ho Park ◽  
Cha Yeon Kim ◽  
Young Woo Jeong ◽  
Hyun Ja Kwon ◽  
Kwang Young Kim ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Annealed Sample ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Layer Structures ◽  
Degree Of Oxidation ◽  
Increasing Temperature

The microstructural variation and the interdiffusion of Pt (80 nm)/Ti (70 nm)/SiO2/Si during annealing in O2 were investigated using Auger electron spectroscopy, x-ray diffraction, transmission electron microscopy, and scanning electron microscopy. While the as-deposited and 400 °C annealed samples showed well-defined layer structures without any significant interfacial reaction, the degree of oxidation remarkably increased with increasing temperature above 500 °C. The PtTi alloy phase with Pmma structure (AuCd type) was observed from the 500 °C annealed sample. Drastic interdiffusion occurring above 600 °C changed the Pt/Ti bilayer into a very entangled structure. Some TiO2 phases were exposed to the ambient between Pt hillocks. In addition, a small amount of Pt-silicide was found near the TiOx/SiO2 interface.

Modifications in the Course of Reaction Between Co and GaAs Due To The Presence of a Ge Film

1987 ◽  
Vol 102 ◽  
Author(s):  
M. Genut ◽  
M. Eizenberg
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Spectroscopy ◽  
Gaas Substrate ◽  
Auger Electron ◽  
Metal Layer ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Crystal Gaas

ABSTRACTModifications in the course of reaction between Co thin films and single crystal GaAs substrate due to the addition of a Ge film either on top or below the metal layer have been studied. The microstructure and phase formation for the systems: Co/GaAs, Co/Ge/GaAs, and Ge/Co/GaAs have been studied by Auger electron spectroscopy, transmission electron microscopy and X-ray diffraction.

OMCVD of thin films from metal diketonates and triphenylbismuth

1990 ◽  
Vol 5 (6) ◽  
pp. 1169-1175 ◽  
Author(s):  
A. D. Berry ◽  
R. T. Holm ◽  
M. Fatemi ◽  
D. K. Gaskill
Keyword(s):  
Electron Microscopy ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Strontium Barium ◽  
X Ray ◽  
Scanning Electron

Films containing the metals copper, yttrium, calcium, strontium, barium, and bismuth were grown by organometallic chemical vapor deposition (OMCVD). Depositions were carried out at atmospheric pressure in an oxygen-rich environment using metal beta-diketonates and triphenylbismuth. The films were characterized by Auger electron spectroscopy, Nomarski and scanning electron microscopy, and x-ray diffraction. The results show that films containing yttrium consisted of Y2O3 with a small amount of carbidic carbon, those with copper and bismuth were mixtures of oxides with no detectable carbon, and those with calcium, strontium, and barium contained carbonates. Use of a partially fluorinated barium beta-diketonate gave films of BaF2 with small amounts of BaCO3.

The Distribution of Phosphorus in Romano-British Ironwork

1990 ◽  
Vol 185 ◽  
Author(s):  
Alain E. Kaloyeros ◽  
Robert M. Ehrenreich
Keyword(s):  
Electron Microscopy ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Materials Analysis ◽  
X Ray ◽  
Transmission Electron ◽  
Depth Study ◽  
Iron Artifacts ◽  
And Performance ◽  
Secondary Ion

AbstractPhosphorus is found to be a common impurity in many of the iron tools and weapons produced during the pre-Roman and Roman Iron Ages of Britain (600 BC - 300 AD). The effects of this impurity on the properties and performance of antiquarian materials is not well understood, however. This paper presents the initial findings of an in-depth study of the distribution, chemistry, and effects of phosphorus in Romano-British ironwork. For this purpose, two Romano-British iron artifacts from the site of Ircheoter, Northamptonshire, were examined using powerful techniques for archeological materials analysis that include electron microprobe, secondary ion mass spectroscopy (SIMS), transmission electron microscopy (TEM) with energydispersive x-ray spectroscopy capabilities (EDXS), and Auger electron spectroscopy (AES). It was found that phosphorous was indeed present in the artifacts. The phosphorus atoms were predominantly segregated at grain boundaries and thus should have led to a lowering of grain boundary cohesion and a degradation in the performance of the tools.

Analyse des Stuckgipses der Abtei Villers / Analysis of Stucco from the Abbey of Villers

1997 ◽  
Vol 3 (4) ◽  
pp. 381-396
Author(s):  
S. Chandra ◽  
D. Van Gemert
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Analysis ◽  
Electron Spectroscopy ◽  
Natural Polymer ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Scanning Electron

Abstract Interior plaster from the Abbot's Palace of the Abbey of Villers-la-Ville, Brabant Wallon province, Belgium has been investigated. It is done by using chemical analysis, x-ray diffraction analysis, scanning electron microscopy, energy dispersive electron spectroscopy, and transmission electron microscopy. It is found that the rendering was made with lime rich mortar and animal hairs. The sand used was very fine and the hairs were very short. The solid constituents and the hairs were uniformly dispersed, which could have been obtained by the addition of some other natural polymer, containing protein.

Microstructural Characterization of Pt/Ti and RuO2 Electrodes on SiO2/Si Annealed in the Oxygen Ambient

1996 ◽  
Vol 433 ◽  
Author(s):  
Jeong Soo Lee ◽  
Hyun JA Kwon ◽  
Young Woo Jeong ◽  
Hyun HA Kim ◽  
Kyu HO Park ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Film Surface ◽  
Microstructural Characterization ◽  
Silicide Phase ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Degree Of Oxidation ◽  
Thin Interlayer ◽  
Increasing Temperature

AbstractMicrostructures and interdiffusions of Pt/Ti/SiO2/Si and RuO2/SiO2/Si during annealing in O2 were investigated using x-ray diffraction, Auger electron spectroscopy, scanning electron microscopy, and transmission electron microscopy. The degree of oxidation and the interdiffusion of elements have remarkably increased with increasing temperature above 500 °C for the Pt/Ti/SiO2/Si case. The generation of Pt hillocks commenced at 500 °C. The Pt-silicide phase was also observed near the TiOx/SiO2 interface. The microstructural variations occurred to only a small amount for the RuO2/SiO2/Si case over the temperature range 300 – 700 °C. While there was no hillock formation, the RuO2 film surface was roughened by the thermal grooving phenomenon. A thin interlayer phase was found at the RuO2/SiO2 interface.

Structural, morphological, and magnetic study of nanocrystalline cobalt-copper powders synthesized by the polyol process

1995 ◽  
Vol 10 (6) ◽  
pp. 1546-1554 ◽  
Author(s):  
G.M. Chow ◽  
L.K. Kurihara ◽  
K.M. Kemner ◽  
P.E. Schoen ◽  
W.T. Elam ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Face Centered Cubic ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Copper Powders ◽  
Face Centered ◽  
Increasing Temperature ◽  
X Ray Absorption

Nanocrystalline CoxCu100−x (4 ⋚ x ⋚ 49 at. %) powders were prepared by the reduction of metal acetates in a polyol. The structure of powders was characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), high resolution transmission electron microscopy (HRTEM), extended x-ray absorption fine structure (EXAFS) spectroscopy, solid-state nuclear magnetic resonance (NMR) spectroscopy, and vibrating sample magnetometry (VSM). As-synthesized powders were composites consisting of nanoscale crystallites of face-centered cubic (fcc) Cu and metastable face-centered cubic (fcc) Co. Complementary results of XRD, HRTEM, EXAFS, NMR, and VSM confirmed that there was no metastable alloying between Co and Cu. The NMR data also revealed that there was some hexagonal-closed-packed (hcp) Co in the samples. The powders were agglomerated, and consisted of aggregates of nanoscale crystallites of Co and Cu. Upon annealing, the powders with low Co contents showed an increase in both saturation magnetization and coercivity with increasing temperature. The results suggested that during preparation the nucleation of Cu occurred first, and the Cu crystallites served as nuclei for the formation of Co.

Self-Lubricating, TiN-MoS2 Composite Coatings Produced by Simultaneous Deposition from Ti((CH3) 2N)4/NH3/MoF6/H2S GAS Mixtures

1994 ◽  
Vol 363 ◽  
Author(s):  
Y. W. Bae ◽  
W. Y. Lee ◽  
T. M. Besmann ◽  
P. J. Blau ◽  
K. L. More ◽  
...  
Keyword(s):  
Electron Spectroscopy ◽  
Auger Electron ◽  
Composite Coatings ◽  
Gas Mixtures ◽  
Ambient Condition ◽  
Kinetic Friction ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Computer Controlled

AbstractComposite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

Rapid Thermal Annealing of Composite TaSi2/n+ Poly-Si Silicide Films

1983 ◽  
Vol 23 ◽  
Author(s):  
D.L. Kwong ◽  
R. Kwor ◽  
B.Y. Tsaur ◽  
K. Daneshvar
Keyword(s):  
Electron Microscopy ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealed Sample ◽  
Vlsi Circuits ◽  
X Ray Diffraction ◽  
Furnace Annealing ◽  
X Ray ◽  
Transmission Electron ◽  
Average Grain Size

ABSTRACTThe formation of composite TaSi2/n+ Poly-Si silicide films through the use of rapid thermal annealing (RTA) is investigated by x-ray diffraction, four point probe, scanning Auger microprobes (SAM) with ion sputter etching, transmission electron microscopy (TEM), scanning electron microscopy (SEM), and capacitance-voltage (C-V) measurements. 0.2 μm polysilicon is deposited on oxidized Si wafer by LPCVD and doped with phosphorus. A layer of 2200 A TaSix is then co-sputtered on polysilicon samples from separate targets. These as-deposited films are then annealed by RTA in an argon ambient for 1 sec. and 10 sec. at various temperatures. X-ray diffraction and SAM results show the rapid formation of a uniform stoichiometric tantalum disilicide via Si migration from polysilicon. TEM micrographs show simlilar results for samples annealed at 1000°C in furnace for 30 min. or by RTA for 1 sec., exhibiting average grain size greater than 1000 A. Sheet resistance of samples annealed by furnace annealing and RTA are comparable. SEM micrographs indicate that the surface morphology of the RTA-annealed sample is superior to that obtained by furnace annealing. These results show that RTA may offer a practical solution to low-resistivity silicide formation in VLSI circuits.

scholarly journals Investigation of the γ′ Precipitates Dissolution in a Ni-Based Superalloy During Stress-Free Short-Term Annealing at High Homologous Temperatures

2021 ◽  
Author(s):  
Łukasz Rakoczy ◽  
Małgorzata Grudzień-Rakoczy ◽  
Fabian Hanning ◽  
Grzegorz Cempura ◽  
Rafał Cygan ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Lattice Parameters ◽  
X Ray Diffraction ◽  
Short Term ◽  
X Ray ◽  
Transmission Electron ◽  
Thermodynamic Simulations ◽  
The Matrix ◽  
Increasing Temperature

AbstractThe equiaxed Ni-based superalloy René 108 was subjected to short-term annealing at five temperatures between 900 °C and 1100 °C. The phase composition, phase lattice parameters, microstructure, stereological parameters, and chemical composition of γ′ precipitates were investigated by thermodynamic simulations, X-ray diffraction, scanning and transmission electron microscopy, and energy-dispersive X-ray spectroscopy. Analysis of the γ and γ′ lattice parameters using the Nelson-Riley extrapolation function showed that the misfit parameter for temperatures 900 °C to 1050 °C is positive (decreasing from 0.32 to 0.11 pct). At 1100 °C, the parameter becomes negative, δ = − 0.18 pct. During the short-term annealing, γ′ precipitates dissolution occurred progressing more rapidly with increasing temperatures. The surface fraction of γ′ precipitates decreased with increasing temperature from 0.52 to 0.34. The dissolution of γ′ precipitates did not only proceed through uninterrupted thinning of each individual precipitate, but also included more complex mechanisms, including splitting. Based on transmission electron microscopy, it was shown that after γ′ precipitates dissolution, the matrix close to the γ/γ′ interface is strongly enriched in Co and Cr and depleted in Al.

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