Uniformity, composition, and surface tension in solution deposited PbZrxTi1-xO3 films

2007 ◽  
Vol 22 (1) ◽  
pp. 103-112 ◽  
Author(s):  
A. Etin ◽  
G.E. Shter ◽  
V. Gelman ◽  
G.S. Grader
Keyword(s):  
Surface Tension ◽  
Chemical Solution Deposition ◽  
Defect Formation ◽  
Cost Effective ◽  
Chemical Solution ◽  
High Quality ◽  
Solution Deposition ◽  
Pzt Films ◽  
By Products ◽  
Deposition Conditions

High quality, uniform PbZrxTi1-xO3(PZT) films were prepared on the 4 inch wafers by chemical solution deposition (CSD) of 1,3-propanediol precursors. Film uniformity was studied as a function of deposition conditions including spinning rates and co-solvents. Measurements of the surface tension and composition evolution during evaporation and spinning stages showed that the surface tension increases significantly when the co-solvent is nearly completely evaporated. The evaporation of the propanol co-solvent and volatile by-products occurs within the first 5 s of spinning giving rise to defects, whereas octanol is slowly evaporated during 60 s producing uniform coatings. Other co-solvents such as hexanol and pentanol produced uniform films as well. Therefore stabilization of the surface tension in the initial spinning stage is a key to prevent the defect formation. These findings facilitate the deposition of uniform PZT films over large substrates by a simple, scalable, and cost-effective process.

Fabrication of continuous ultrathin ferroelectric films by chemical solution deposition methods

2008 ◽  
Vol 23 (10) ◽  
pp. 2787-2795 ◽  
Author(s):  
J. Ricote ◽  
S. Holgado ◽  
Z. Huang ◽  
P. Ramos ◽  
R. Fernández ◽  
...  
Keyword(s):  
Chemical Solution Deposition ◽  
Precursor Solution ◽  
Cost Effective ◽  
Piezoresponse Force Microscopy ◽  
Nanoelectromechanical Systems ◽  
Chemical Solution ◽  
Ferroelectric Films ◽  
High Quality ◽  
Solution Deposition ◽  
Cost Effective Technique

The integration of ferroelectrics in nanodevices requires firstly the preparation of high-quality ultrathin films. Chemical solution deposition is considered a rapid and cost-effective technique for preparing high-quality oxide films, but one that has traditionally been regarded as unsuitable, or at least challenging, for fabricating films with good properties and thickness below 100 nm. In the present work we explore the deposition of highly diluted solutions of pure and Ca-modified lead titanates to prepare ultrathin ferroelectric films, the thickness of which is controlled by the concentration of the precursor solution. The results show that we are able to obtain single crystalline phase continuous films down to 18 nm thickness, one of the lowest reported using these methods. Below that thickness, the films start to be discontinuous, which is attributed to a microstructural instability that can be controlled by an adequate tailoring of the processing conditions. The effect of the reduction of thickness on the piezoelectric behavior is studied by piezoresponse force microscopy. The results indicate that films retain a significant piezoelectric activity regardless of their low thickness, which is promising for their eventual integration in nanodevices, for example, as transducer elements in nanoelectromechanical systems.

scholarly journals Chemical Solution Deposition of La-Substituted BiFe0.5Sc0.5O3 Perovskite Thin Films on Different Substrates

Coatings ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 307
Author(s):  
Diana Griesiute ◽  
Dovydas Karoblis ◽  
Lina Mikoliunaite ◽  
Aleksej Zarkov ◽  
Andrei N. Salak ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Solution Deposition ◽  
Cost Effective ◽  
Deposition Process ◽  
Stability Study ◽  
Fused Silica ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Optimal Annealing Temperature ◽  
Xrd Patterns

In the present work, polycrystalline Bi0.67La0.33Fe0.5Sc0.5O3 thin films were synthesized using a simple and cost-effective chemical solution deposition process employing the spin coating technique. In order to check the feasibility of the fabrication of thin films on various types of substrates, the films were deposited on Pt-coated silicon, silicon, sapphire, corundum, fused silica and glass. Based on the results of thermogravimetric analysis of precursor and thermal stability study, it was determined that the optimal annealing temperature for the formation of perovskite structure is 600 °C. It was observed that the relative intensity of the pseudocubic peaks (001)p and (011)p in the XRD patterns is influenced by the nature of substrates, suggesting that the formed crystallites have some preferred orientation. Roughness of the films was determined to be dependent on the nature of the substrate.

Enhanced Spontaneous Polarization of Dysprosium-substituted Lead Zirconate Titanate Thin Films by a Chemical Solution Deposition Method

2004 ◽  
Vol 830 ◽  
Author(s):  
Hiroshi Uchida ◽  
Hiroshi Nakaki ◽  
Shoji Okamoto ◽  
Shintaro Yokoyama ◽  
Hiroshi Funakubo ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Spontaneous Polarization ◽  
Chemical Solution Deposition ◽  
Lead Zirconate ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Crystal Anisotropy ◽  
Pzt Film ◽  
Zirconate Titanate ◽  
Pzt Films

ABSTRACTInfluences of the B-site substitution using Dy3+ ion on the crystal structure and ferroelectric properties of lead zirconate titanate (PZT) films were investigated. Dy3+-substituted PZT films with nominal chemical compositions of Pb1.00Dyx (Zr0.40Ti0.60)1-(3x/4)O3 (x = 0 ∼ 0.06) were fabricated by a chemical solution deposition (CSD). Polycrystalline PZT films with preferential orientation of (111)PZT were obtained on (111)Pt/TiO2/SiO2/(100)Si substrates, while epitaxially-grown (111)PZT films were fabricated on (111)SrRuO3//(111)Pt//(100)YSZ//(100)Si substrate. Ratio of PZT lattice parameters (c/a), which corresponds to its crystal anisotropy, was enhanced by the Dy3+-substitution with x = 0.02. Spontaneous polarization (Ps) of Dy3+-substituted PZT film (x = 0.02) along polar [001] axis of PZT lattice was estimated from saturation polarization (Psat) value of the epitaxially-grown (111)PZT film on (111)SrRuO3//(111)Pt//(100)YSZ//(100)Si to be 84 μC/cm2 that was significantly larger than that of non-substituted PZT (= 71 μC/cm2). We concluded that the enhancement of Ps value could be achieved by the Dy3+-substitution that promoted the crystal anisotropy of PZT lattice.

scholarly journals CSD-Grown Y1−xGdxBa2Cu3O7−δ-BaHfO3 Nanocomposite Films on Ni5W and IBAD Technical Substrates

Nanomaterials ◽  
2019 ◽  
Vol 10 (1) ◽  
pp. 21 ◽  
Author(s):  
Pablo Cayado ◽  
Hannes Rijckaert ◽  
Manuela Erbe ◽  
Marco Langer ◽  
Alexandra Jung ◽  
...  
Keyword(s):  
Chemical Solution Deposition ◽  
Growth Process ◽  
Growth Conditions ◽  
Coated Conductors ◽  
Nanocomposite Films ◽  
Chemical Solution ◽  
Superconducting Properties ◽  
High Quality ◽  
Solution Deposition ◽  
Structure Morphology

Chemical solution deposition (CSD) was used to grow Y1−xGdxBa2Cu3O7−δ-BaHfO3 (YGBCO-BHO) nanocomposite films containing 12 mol% BHO nanoparticles and various amounts of Gd, x, on two kinds of buffered metallic tapes: Ni5W and IBAD. The influence of the rare-earth stoichiometry on structure, morphology and superconducting properties of these films was studied. The growth process was carefully studied in order to find the most appropriate growth conditions for each composition and substrate. This led to a clear improvement in film quality, probably due to the reduction of BaCeO3 formation. In general, the superconducting properties of the films on Ni5W are significantly better. For x > 0.5, epitaxial ~270 nm thick YGBCO-BHO films with Tc > 93 K and self-field Jc at 77 K ~2 MA/cm² were obtained on Ni5W. These results highlight the potential of this approach for the fabrication of high-quality coated conductors.

Chemical Solution Deposition of High-Quality SrRu O3 Thin-Film Electrodes and the Dielectric Properties of Integrated Lead Lanthanum Zirconate Titanate Films for Embedded Passives

2011 ◽  
Vol 2011 (CICMT) ◽  
pp. 000235-000240
Author(s):  
Manoj Narayanan ◽  
Beihai Ma ◽  
Rachel Koritala ◽  
Sheng Tong ◽  
U. Balachandran
Keyword(s):  
Dielectric Properties ◽  
Chemical Solution Deposition ◽  
Sol Gel ◽  
Superior Performance ◽  
Silicon Substrates ◽  
Room Temperature Resistivity ◽  
Chemical Solution ◽  
High Quality ◽  
Solution Deposition ◽  
Nickel Substrates

Ferroelectric film-on-foil capacitors are suitable to replace discrete passive components in the quest to develop electronic devices that show superior performance and are smaller in size. The film-on-foil approach is the most viable method to fabricate such components. Films of Pb0.92La0.08Zr0.52Ti0.48O3 (PLZT) were deposited on SrRuO3 (SRO) buffer films over nickel and silicon substrates. High-quality polycrystalline SRO thinfilm electrodes were first deposited by chemical solution deposition. The optimized crystallization temperature of the SRO films was determined by studying the phase, microstructure, and electrical properties. A phase pure, dense, uniform microstructure with grain size < 100 nm was obtained in films crystallized between 700 and 750°C. The room-temperature resistivity of the SRO films crystallized at 700°C was ~800–900 μΩ-cm. The dielectric properties of sol-gel derived PLZT capacitors on SRO-buffered nickel were evaluated as a function of temperature, bias field, and frequency, and the results were compared to those of the same films on silicon substrates. The comparison demonstrated the integrity of the buffer layer and its compatibility with nickel substrates. Device-quality dielectric properties were measured on PLZT films deposited on SRObuffered nickel foils and found to be comparable to those for PLZT on SRO-buffered silicon and expensive platinized silicon. These results suggest that SRO films can act as an effective barrier layer on nickel substrates suitable for embedded capacitor applications.

Synthesis and evaluation of new copper ketoiminate precursors for a facile and additive-free solution-based approach to nanoscale copper oxide thin films

2017 ◽  
Vol 46 (8) ◽  
pp. 2670-2679 ◽  
Author(s):  
Sarah Karle ◽  
Detlef Rogalla ◽  
Arne Ludwig ◽  
Hans-Werner Becker ◽  
Andreas Dirk Wieck ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Chemical Solution Deposition ◽  
Free Solution ◽  
Chemical Solution ◽  
Oxide Thin Films ◽  
High Quality ◽  
Solution Deposition ◽  
P Type

A streamlined approach towards high-quality p-type CuOx nanostructures was successfully established based on rational precursor design for chemical solution deposition.

Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor

2010 ◽  
Vol 30 (2) ◽  
pp. 485-488 ◽  
Author(s):  
Katarina Vojisavljević ◽  
Goran Branković ◽  
Tatjana Srećković ◽  
Aleksander Rečnik ◽  
Zorica Branković
Keyword(s):  
Chemical Solution Deposition ◽  
Deposition Method ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Chemical Solution Deposition Method ◽  
Pzt Films ◽  
Citrate Precursor

Facile and Cost Effective Synthesis of Oxide-Derived Silver Catalyst Electrodes via Chemical Solution Deposition for CO2 Electro-Reduction

2017 ◽  
Vol 61 (5-6) ◽  
pp. 389-396 ◽  
Author(s):  
Eduardus Budi Nursanto ◽  
Da Hye Won ◽  
Michael Shincheon Jee ◽  
Haeri Kim ◽  
Nak-Kyoon Kim ◽  
...  
Keyword(s):  
Chemical Solution Deposition ◽  
Cost Effective ◽  
Silver Catalyst ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Effective Synthesis

scholarly journals Structural and Optical Properties Evolution of ‘Fused’ Multilayer Nano PbS Thin Films Deposited by Chemical Bath Deposition

2014 ◽  
Vol 25 ◽  
pp. 16-25
Author(s):  
Ali M. Mousa ◽  
Selma M. Al-Jawad ◽  
Suad M. Kadhim Al-Shammari
Keyword(s):  
Chemical Solution Deposition ◽  
Chemical Solution ◽  
X Ray Diffraction ◽  
Structural And Optical Properties ◽  
Unusual Behavior ◽  
Solution Deposition ◽  
X Ray ◽  
Glass Substrates ◽  
Chemical Solution Deposition Method ◽  
Deposition Conditions

Here, we report the unusual behavior shown by the PbS samples prepared using a multilayer deposition approach by chemical solution deposition method. Thin samples were prepared by depositing several films at different deposition conditions on glass substrates. X-ray diffraction showed that final multilayer samples showed a peculiar variation. Even when they showed well defined structure the intensities of the peaks do not correspond to those of the initial films.

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