Top-down and bottom-up nanofabrication for multipurpose applications.

2006 ◽  
Vol 921 ◽  
Author(s):  
Enzo Di Fabrizio ◽  
Filippo Romanato ◽  
Stefano Cabrini ◽  
Francesco Deangelis ◽  
Arum Amy Yu ◽  
...  
Keyword(s):  
Electron Beam Lithography ◽  
Ion Beam ◽  
Sol Gel ◽  
Top Down ◽  
Bottom Up ◽  
Direct Patterning ◽  
Focus Ion Beam ◽  
Fluorescent Molecules ◽  
Beam Technique ◽  
Nanoscale Level

AbstractIn this article we will show three recent examples of combined strategies aiming at merging top-down and bottom-up approach for nanofabrication at nanoscale level. The first example shows the fabrication of nanogaps performed by Focus Ion Beam technique that have been used to measure the conductivity of few gold nanoparticles aggregates deposited by Dip Pen lithography. The second example deals with the parallel replica of high resolution master generated by Electron Beam lithography by means of an innovative lithographic process based on DNA supramolecular nano-stamping. The latter example proposes the possibility to generate, through radiation exposure, direct patterning of hybrid sol gel material doped with fluorescent molecules. The outline of the fabrication approaches and their scientific and technical perspective are discussed.

EBAC Analysis with Chemically Enhanced FIB Milling Assists Technique on Large Kerf/PCM Test Structure

2018 ◽  
Author(s):  
H.H. Yap ◽  
C.K. Oh
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Electron Beam ◽  
Ion Beam ◽  
Test Structure ◽  
Top Down ◽  
Area Of Interest ◽  
Milling Method ◽  
Focus Ion Beam ◽  
Scanning Electron

Abstract The ability to expose a huge kerf/PCM (Process Control Monitor) test structure at the same level is limited from top down finger polishing. Also, in Scanning Electron Microscopy (SEM) the electron beam (e-beam) shift for electron beam absorbed current (EBAC) analysis is not able to cover the whole structure. The recently implemented technique described herein combines the focus ion beam (FIB) chemical enhanced milling method with EBAC analysis to stop the polishing at the upper layer and split the EBAC analysis into portions from the test structure. These help to improve the area of interest (AOI) evenness and enable the extension of the EBAC analysis.

Optimization of TEM Sample Preparation to Reduce the Overlapping of TEM Images

2014 ◽  
Author(s):  
Shuqing Duan ◽  
Summer Chen ◽  
Paul Yu ◽  
Ming Li ◽  
Mark Zhang ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Cross Section ◽  
Ion Beam ◽  
Top Down ◽  
Preparation Methods ◽  
Plan View ◽  
Transmission Electron ◽  
Focus Ion Beam ◽  
Sample Preparation Methods ◽  
Section Sample

Abstract This paper reports optimized Transmission Electron Microscopy (TEM) sample preparation methods with Focus Ion Beam (FIB), which are used to reduce or avoid the overlapping of TEM images. Several examples of optimized cross-section sample preparation on 38nm and 45nm pitch are provided with general and novel FIB methods. And its application to plan view TEM sample preparation is also shown. The results establish that the proposed method is useful to reduce or remove pattern overlapping effects in dense structures and can produce higher quality TEM images than can be obtained using conventional top-down FIB-based TEM preparation methods.

scholarly journals Applications of Focus Ion Beam Technique in the Characterization of Nanocrystal Nonvolatile Memory Devices

2013 ◽  
Vol 19 (S2) ◽  
pp. 888-889
Author(s):  
J.-G. Zheng
Keyword(s):  
Nonvolatile Memory ◽  
Ion Beam ◽  
Memory Devices ◽  
Nonvolatile Memory Devices ◽  
Focus Ion Beam ◽  
Beam Technique

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Interfacial Reactions during Explosive Bonding

2014 ◽  
Vol 783-786 ◽  
pp. 1476-1481 ◽  
Author(s):  
Henryk Paul
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Dislocation Structure ◽  
Energy Dispersive Spectrometry ◽  
Ion Beam ◽  
Intermetallic Phases ◽  
Thin Foils ◽  
Transmission Electron ◽  
Focus Ion Beam ◽  
Beam Technique

The layers near the interface of explosively welded plates were investigated by means of microscopic observations, mostly with the use of transmission electron microscopy (and Focus Ion Beam technique for the thin foils preparation) equipped with energy dispersive spectrometry. The metal compositions based on steels and Ti, Zr, Ta or Cu, were analyzed. The study was focused on the identification of the intermetallic phases inside the melted zones, the possible interdiffusion between the bonded metals and the changes in the dislocation structure.

Top-Down Delayering with Planar Slicing Focus Ion Beam (TD-PS-XFIB)

2013 ◽  
Author(s):  
G.R. Low ◽  
P.K. Tan ◽  
T.H. Ng ◽  
H.H. Yap ◽  
H. Feng ◽  
...  
Keyword(s):  
Real Time ◽  
Process Improvement ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Layer By Layer ◽  
Top Down ◽  
Cross Sectional ◽  
Imaging Capability ◽  
Focus Ion Beam ◽  
Scanning Electron

Abstract Top-down, layer-by-layer de-layering inspection with a mechanical polisher and serial cross-sectional Focused Ion Beam (XFIB) slicing are two common approaches for physical failure analysis (PFA). This paper uses XFIB to perform top-down, layer-by-layer de-layering followed by Scanning Electron Microscope (SEM) inspection. The advantage of the FIB-SEM de-layering technique over mechanical de-layering is better control of the de-layering process. Combining the precise milling capability of the FIB with the real-time imaging capability of the SEM enables the operator to observe the de-layering as it progresses, minimizing the likelihood of removing either too much or too little material. Furthermore, real time SEM view during top-down XFIB de-layering is able to provide a better understanding of how the defects are formed and these findings could then be feedback to the production line for process improvement.

Markers prepared by focus ion beam technique for nanopositioning procedures

2007 ◽  
Vol 84 (3) ◽  
pp. 524-527 ◽  
Author(s):  
H. Romanus ◽  
J. Schadewald ◽  
V. Cimalla ◽  
M. Niebelschütz ◽  
T. Machleidt ◽  
...  
Keyword(s):  
Ion Beam ◽  
Focus Ion Beam ◽  
Beam Technique

Synthesis of Barium Hexaferrite with Addition of Tapioca as Rodlike Template

2014 ◽  
Vol 660 ◽  
pp. 290-296
Author(s):  
Arifin Septiadi ◽  
Bambang Sunendar Purwasasmita
Keyword(s):  
Energy Requirement ◽  
Sol Gel ◽  
Barium Hexaferrite ◽  
Molar Ratio ◽  
High Coercivity ◽  
Temperature Anisotropy ◽  
Top Down ◽  
Sem Images ◽  
Bottom Up ◽  
Shaped Particle

Barium hexaferrite is categorized as hexagonal ferrite material with ferrimagnet properties. Barium hexaferrite has high coercivity, curie temperature, anisotropy magnetic field, and chemical stability that is often used as permanent magnet. It can be synthesized by using bottom up or top down method. The bottom up method of sol-gel has potential advantages in industry application compared to the top down method because of low energy requirement, more homogeneous product, and low time consuming to achieve nanometer size. The development of sol-gel method by using tapioca and chitosan as surfactant increases the quality of the product. Tapioca is used to increase anisotropy properties of particles by changing the particles shape into rodlike shape whereas chitosan is used to stabilize them at small size. Molar ratio of Fe3+/Ba2+ is set on 12 and the ratio of tapioca/chitosan is set on 1/3, 1/2, and 1. Iron (III) nitrate is used as Fe3+ source whereas barium nitrate is used as Ba2+ source. Condensation is done by heating up the sol system in the oven at 100OC. The product then is calcined at 1000OC with holding time of 3 hours. The calcined product is then characterized by X-Ray Diffraction (XRD), Scanning Electron Microscope (SEM), and Vibrating Sample Magnetometer (VSM). XRD result shows that the hematite phase has still been formed. The occurrence of the phase indicates that the reaction between iron and barium is uncompleted. SEM images show the existence of needle and rod-shaped particles with diameter of 200nm–550nm. It explains that tapioca can be used as rodlike template. The increase of tapioca tends to enlarge the rod-shaped particle and remove the needle-shaped particle. VSM result shows that the highest value of Br is found in the sample of tapioca/chitosan with the ratio of 1/3 and the value of 24 emu/g. The fact indicates that the optimal ratio of tapioca/chitosan is 1/3.

Sign in / Sign up

Export Citation Format

Share Document