A General Nonlithographic Method for Producing Nanodots by RIE Etching

2007 ◽  
Vol 1059 ◽  
Author(s):  
Jacob H. Leach ◽  
Hadis Morkoç

ABSTRACTIn this work, thin layers of poly(methyl methacrylate) (PMMA) on Ni on silicon <111> substrates were etched almost completely away by oxygen RIE, leaving only the topmost portion of the roughness, generating nanodots of PMMA approximately 30-40nm or smaller in size. After sufficiently hard baking the samples to promote PMMA adhesion to the Ni and to increase the robustness of the PMMA, the nanodots were used as a mask to etch the thin Ni films, thus generating Ni nanodots on Si. The Ni nanodots were then used as a reactive ion (RIE) etch mask, thereby generating Si nanopillars. With further understanding of the mechanism of the generation of the roughness of the PMMA, or with the use of other polymeric materials suitable as wet etching masks, nanodots of varying size should be attainable. This method represents a very simple, low cost, scalable, and general technique to produce nanodots of various thin metals on various substrates.

Biosensors ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 162
Author(s):  
Mathias Busek ◽  
Steffen Nøvik ◽  
Aleksandra Aizenshtadt ◽  
Mikel Amirola-Martinez ◽  
Thomas Combriat ◽  
...  

Polydimethylsiloxane (PDMS) has been used in microfluidic systems for years, as it can be easily structured and its flexibility makes it easy to integrate actuators including pneumatic pumps. In addition, the good optical properties of the material are well suited for analytical systems. In addition to its positive aspects, PDMS is well known to adsorb small molecules, which limits its usability when it comes to drug testing, e.g., in organ-on-a-chip (OoC) systems. Therefore, alternatives to PDMS are in high demand. In this study, we use thermoplastic elastomer (TPE) films thermally bonded to laser-cut poly(methyl methacrylate) (PMMA) sheets to build up multilayered microfluidic devices with integrated pneumatic micro-pumps. We present a low-cost manufacturing technology based on a conventional CO2 laser cutter for structuring, a spin-coating process for TPE film fabrication, and a thermal bonding process using a pneumatic hot-press. UV treatment with an Excimer lamp prior to bonding drastically improves the bonding process. Optimized bonding parameters were characterized by measuring the burst load upon applying pressure and via profilometer-based measurement of channel deformation. Next, flow and long-term stability of the chip layout were measured using microparticle Image Velocimetry (uPIV). Finally, human endothelial cells were seeded in the microchannels to check biocompatibility and flow-directed cell alignment. The presented device is compatible with a real-time live-cell analysis system.


2019 ◽  
Vol 7 (40) ◽  
pp. 23019-23027 ◽  
Author(s):  
Zongfeng Sha ◽  
Shengqiang Qiu ◽  
Qing Zhang ◽  
Zhiyong Huang ◽  
Xun Cui ◽  
...  

A solvothermal polymerization approach to graphene/poly(methyl methacrylate) thermoplastic nanocomposites as low-cost alternative anode materials with superior lithium storage capability.


2005 ◽  
Vol 38 (17) ◽  
pp. 7274-7285 ◽  
Author(s):  
Géraldine Rohman ◽  
Daniel Grande ◽  
Françoise Lauprêtre ◽  
Sylvie Boileau ◽  
Philippe Guérin

2012 ◽  
Vol 21 (01) ◽  
pp. 1250012 ◽  
Author(s):  
RAN TAO ◽  
JIANG-ZHUAN ZHU ◽  
DONG SHEN ◽  
XIAO-YAN GU ◽  
DUAN-BIN LUO

Amorphous bulk composites were prepared by doping azo-dye Disperse Red 13 (DR13) in poly(methyl methacrylate) (PMMA) matrices. Photo-induced anisotropy of such kind of bulk polymer material was investigated experimentally by measuring the birefringence when irradiating it with linearly polarized green light. We report the first observation of self-trapping of an optical vortex based on such effect in bulk poly(methyl methacrylate) materials containing photosensitive azo-dye molecules. The dependence of the average core width of a single-charge optical vortex versus time and input power was investigated in detail.


1990 ◽  
Vol 67 (5) ◽  
pp. 2240-2244 ◽  
Author(s):  
Akira Itaya ◽  
Akihiko Kurahashi ◽  
Hiroshi Masuhara ◽  
Yoshio Taniguchi ◽  
Masashi Kiguchi

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Shwetabh Verma ◽  
Juergen Hesser ◽  
Samuel Arba-Mosquera

Abstract Smoother surfaces after laser vision correction have been widely accepted as a factor for improving visual recovery regardless of the used technique (PRK, LASIK, or even SMILE). We tested the impact of laser beam truncation, dithering (expressing a continuous profile on a basis of lower resolution causing pixels to round up/down the number of pulses to be placed), and jitter (a controlled random noise (up to ±20 µm in either direction) added to the theoretical scanner positions) on residual smoothness after Poly(methyl methacrylate) (PMMA) ablations, using a close-to-Gaussian beam profile. A modified SCHWIND AMARIS system has been used providing a beam profile with the following characteristics: close-to-Gaussian beam profile with full width at half maximum (FWHM) of 540 µm, 1050 Hz. Laser parameters have been optimized following Invest. Ophthalmol. Vis. Sci., vol. 58, no. 4, pp. 2021–2037, 2017, the pulse energy has been optimized following Biomed. Opt. Express vol. 4, pp. 1422–1433, 2013. For the PMMA ablations, two configurations (with a 0.7 mm pinhole and 0.75 mJ and without pinhole and 0.9 mJ (for fluences of 329 mJ/cm2 and 317 mJ/cm2 and corneal spot volumes of 174 and 188 pl)) were considered, along with two types of lattices (with and without ordered dithering to select the optimum pulse positions), and two types of spot placement (with and without jitter). Real ablations on PMMA (ranging from −12D to +6D with and without astigmatism of up to 3D) completed the study setup. The effect of the 2 × 2 × 2 different configurations was analyzed based on the roughness in ablation estimated from the root mean square error in ablation. Truncation of the beam is negatively associated to a higher level of residual roughness; ordered dithering to select the optimum pulse positions is positively associated to a lower level of residual roughness; jitter is negatively associated to a higher level of residual roughness. The effect of dithering was the largest, followed by truncation, and jitter had the lowest impact on results. So that: Dithering approaches help to further minimize residual roughness after ablation; minimum (or no) truncation of the beam is essential to minimize residual roughness after ablation; and jitter shall be avoided to minimize residual roughness after ablation. The proposed model can be used for optimization of laser systems used for ablation processes at relatively low cost and would directly improve the quality of results. Minimum (or no) truncation of the beam is essential to minimize residual roughness after ablation. Ordered dithering without jitter helps to further minimize residual roughness after ablation. Other more complex dithering approaches may further contribute to minimize residual roughness after ablation.


Materials ◽  
2020 ◽  
Vol 13 (21) ◽  
pp. 4822
Author(s):  
Szabolcs Pásztor ◽  
Bálint Becsei ◽  
Györgyi Szarka ◽  
Yi Thomann ◽  
Ralf Thomann ◽  
...  

The glass transition temperature (Tg) is one of the most important properties of polymeric materials. In order to reveal whether the scissors effect, i.e., the Fox–Flory relationship between Tg and the average molecular weight between crosslinking points (Mc), reported only in one case for polymer conetworks so far, is more generally effective or valid only for a single case, a series of poly(methyl methacrylate)-l-polyisobutylene (PMMA-l-PIB) conetworks was prepared and investigated. Two Tgs were found for the conetworks by DSC. Fox–Flory type dependence between Tg and Mc of the PMMA component (Tg = Tg,∞ − K/Mc) was observed. The K constants for the PMMA homopolymer and for the PMMA in the conetworks were the same in the margin of error. AFM images indicated disordered bicontinuous, mutually nanoconfined morphology with average domain sizes of 5–20 nm, but the correlation between Tg and domain sizes was not found. These new results indicate that the macrocrosslinkers act like molecular scissors (scissors effect), and the Tg of PMMA depend exclusively on the Mc in the conetworks. Consequently, these findings mean that the scissors effect is presumably a general phenomenon in nanophase-separated polymer conetworks, and this finding could be utilized in designing, processing, and applications of these novel materials.


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