The Mechanism of Haze and Defectivity Reduction in a New Generation of High Performance Silicon Final Polishing Slurries

2010 ◽  
Vol 1249 ◽  
Author(s):  
Michael L White ◽  
Richard Romine ◽  
Lamon Jones ◽  
William Ackerman

AbstractThe mechanism of haze reduction during silicon polishing using a new generation of additives has been explored. These additives are thought to decrease haze by adsorbing to the wafer surface and increasing the activation energy of the reaction between the silanolates on the silica particle surface with the surface silicon. This leads to greater selectivity between the peaks and valleys resulting in a net decrease in surface roughness.

2010 ◽  
Vol 1249 ◽  
Author(s):  
Michael L. White ◽  
Lamon Jones ◽  
Richard Romine

AbstractThe mechanism of oxide polishing at low pH in the presence of an organic cation is discussed. The role of the cation is thought to involve increasing the nucleophilicity of the silanolate active site on the particle surface by lowering the hydration state. Additionally, the activation energy of the reaction may be lowered by charge attraction between the particle and wafer surface and by increased hydrophobic interactions.


Author(s):  
zhikun zhang ◽  
lianlian xia ◽  
Lizhao Liu ◽  
Yuwen Chen ◽  
zuozhi wang ◽  
...  

Large surface roughness, especially caused by the large particles generated during both the transfer and the doping processes of graphene grown by chemical vapor deposition (CVD) is always a critical...


Coatings ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 327
Author(s):  
Morwenna J. Spear ◽  
Simon F. Curling ◽  
Athanasios Dimitriou ◽  
Graham A. Ormondroyd

Wood modification is now widely recognized as offering enhanced properties of wood and overcoming issues such as dimensional instability and biodegradability which affect natural wood. Typical wood modification systems use chemical modification, impregnation modification or thermal modification, and these vary in the properties achieved. As control and understanding of the wood modification systems has progressed, further opportunities have arisen to add extra functionalities to the modified wood. These include UV stabilisation, fire retardancy, or enhanced suitability for paints and coatings. Thus, wood may become a multi-functional material through a series of modifications, treatments or reactions, to create a high-performance material with previously impossible properties. In this paper we review systems that combine the well-established wood modification procedures with secondary techniques or modifications to deliver emerging technologies with multi-functionality. The new applications targeted using this additional functionality are diverse and range from increased electrical conductivity, creation of sensors or responsive materials, improvement of wellbeing in the built environment, and enhanced fire and flame protection. We identified two parallel and connected themes: (1) the functionalisation of modified timber and (2) the modification of timber to provide (multi)-functionality. A wide range of nanotechnology concepts have been harnessed by this new generation of wood modifications and wood treatments. As this field is rapidly expanding, we also include within the review trends from current research in order to gauge the state of the art, and likely direction of travel of the industry.


2018 ◽  
Vol 199 ◽  
pp. 09001
Author(s):  
Renaud Franssen ◽  
Serhan Guner ◽  
Luc Courard ◽  
Boyan Mihaylov

The maintenance of large aging infrastructure across the world creates serious technical, environmental, and economic challenges. Ultra-high performance fibre-reinforced concretes (UHPFRC) are a new generation of materials with outstanding mechanical properties as well as very high durability due to their extremely low permeability. These properties open new horizons for the sustainable rehabilitation of aging concrete structures. Since UHPFRC is a young and evolving material, codes are still either lacking or incomplete, with recent design provisions proposed in France, Switzerland, Japan, and Australia. However, engineers and public agencies around the world need resources to study, model, and rehabilitate structures using UHPFRC. As an effort to contribute to the efficient use of this promising material, this paper presents a new numerical modelling approach for UHPFRC-strengthened concrete members. The approach is based on the Diverse Embedment Model within the global framework of the Disturbed Stress Field Model, a smeared rotating-crack formulation for 2D modelling of reinforced concrete structures. This study presents an adapted version of the DEM in order to capture the behaviour of UHPFRC by using a small number of input parameters. The model is validated with tension tests from the literature and is then used to model UHPFRC-strengthened elements. The paper will discuss the formulation of the model and will provide validation studies with various tests of beams, columns and walls from the literature. These studies will demonstrate the effectiveness of the proposed modelling approach.


2019 ◽  
Vol 17 ◽  
pp. 700-706
Author(s):  
N.N. Alias ◽  
K.A. Yaacob ◽  
C.K.Yew

2014 ◽  
Vol 971-973 ◽  
pp. 143-147 ◽  
Author(s):  
Ping Dai ◽  
Shuang Xiu Li

The development of a new generation of high performance gas turbine engines requires gas turbines to be operated at very high inlet temperatures, which are much higher than the allowable metal temperatures. Consequently, this necessitates the need for advanced cooling techniques. Among the numerous cooling technologies, the film cooling technology has superior advantages and relatively favorable application prospect. The recent research progress of film cooling techniques for gas turbine blade is reviewed and basic principle of film cooling is also illustrated. Progress on rotor blade and stationary blade of film cooling are introduced. Film cooling development of leading-edge was also generalized. Effect of various factor on cooling effectiveness and effect of the shape of the injection holes on plate film cooling are discussed. In addition, with respect to progress of discharge coefficient is presented. In the last, the future development trend and future investigation direction of film cooling are prospected.


2009 ◽  
Vol 69-70 ◽  
pp. 253-257
Author(s):  
Ping Zhao ◽  
Jia Jie Chen ◽  
Fan Yang ◽  
K.F. Tang ◽  
Ju Long Yuan ◽  
...  

Semi-fixed abrasive is a novel abrasive. It has a ‘trap’ effect on the hard large grains that can prevent defect effectively on the surface of the workpiece which is caused by large grains. In this paper, some relevant experiments towards silicon wafers are carried out under the different processing parameters on the semi-fixed abrasive plates, and 180# SiC is used as large grains. The processed workpieces’ surface roughness Rv are measured. The experimental results show that the surface quality of wafer will be worse because of higher load and faster rotating velocity. And it can make a conclusion that the higher proportion of bond of the plate, the weaker of the ‘trap’ effect it has. Furthermore the wet environment is better than dry for the wafer surface in machining. The practice shows that the ‘trap’ effect is failure when the workpiece is machined by abrasive plate which is 4.5wt% proportion of bond in dry lapping.


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