Growth and Characterizations of Gaas on Inp with Different Buffer Structures by Molecular Beam Epitaxy

1989 ◽  
Vol 148 ◽  
Author(s):  
Xiaoming Liu ◽  
Henry P. Lee ◽  
Shyh Wang ◽  
Thomas George ◽  
Eicke R. Weber ◽  
...  
Keyword(s):  
Low Temperature ◽  
Buffer Layer ◽  
Gaas Layer ◽  
Optical Quality ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Layer Structures ◽  
Gaas Films ◽  
Initial Deposition ◽  
Strained Layer Superlattices

ABSTRACTWe report the growth and characterizations of 31μm thick GaAs films grown on (100) InP substrates by MBE employing different buffer layer structures during the initial deposition. The buffer layer structures under study are: 1) GaAs layer grown at low temperature; 2) GaAs layer grown at low temperature plus two sets of In0.08Ga0.92As/GaAs strained layer superlattices (SLS) and 3) a transitional compositionally graded InxGal-xAs layer between the InP substrate and the GaAs film. After the buffer layer deposition, the growth was continued by conventionalMBE to a total thickness of 3μm for all samples. From the 77K photoluminescence (PL) measurement, it was found that the sample with SLS layers has the highest PL intensity and the narrowest PL linewidth. Cross-sectional transmission electron microscopy (TEM) studies showed that the SLS is effective in reducing the propagation of threading dislocations and explains the observed superior optical quality from the PL measurement.

The Role of thin Low Temperature Deposited GaAs Films on the two Step Growth of GaAs on Si By Mocvd

1988 ◽  
Vol 116 ◽  
Author(s):  
Hajine Inuzuka ◽  
Yasutoshi Suzuki ◽  
Naomi Awano ◽  
Kunihiko Hara
Keyword(s):  
Structural Change ◽  
Low Temperature ◽  
Three Dimensional ◽  
Gaas Layer ◽  
High Quality ◽  
Cross Sectional ◽  
Temperature Growth ◽  
Gaas Films ◽  
Step Growth

AbstractThe structural change of the thin low temperature (~450°C) deposited GaAs films and the role for conventional temperature growth were studied by RHEED and cross-sectional TEN observation. The formation of the threedimensional high quality single crystalline islands from continuous twin GaAs layer deposited at low temperature (~450°C) was clarified. These three-dimensional islands act as the seeds for conventional temperature growth.

Interfacial Reactions of Co and Si/Co Films on GaAs

1994 ◽  
Vol 337 ◽  
Author(s):  
J. S. Kwak ◽  
H. K. Baik ◽  
J. I. Lee ◽  
S. K. Noh ◽  
D. W. Shin ◽  
...  
Keyword(s):  
Ternary Phase ◽  
Gaas Layer ◽  
Interfacial Reactions ◽  
X Ray Diffraction ◽  
Subsequent Reaction ◽  
Cross Sectional ◽  
Quaternary Phase ◽  
Transmission Electron ◽  
Layer Structures ◽  
Higher Temperature

ABSTRACTInterfacial reactions of Co and Si/Co films on GaAs have been investigated using X-ray diffraction(XRD), Auger electron spectroscopy(AES), cross-sectional transmission electron microscopy(XTEM), microdiffraction, and energy dispersive spectroscopy(EDS). Cobalt starts to react with GaAs at 380°C by formation of ternary phase, most probably Co2GaAs. At 420°C, CoGa nucleates at the Co and Co2GaAs interface and grows with Co2GaAs. At higher temperature, Co2GaAs disappears and CoGa/GaAs layer structures are formed. Annealing of the layer-deposited Si/Co films at 380°C results in the formation of Co2GaAs. At 420°C, the entire layer of Co is consumed, while Co2Si transforms to CoSi, and binary phases, CoGa and CoAs, are formed on top of the ternary phase beneath the CoSi layer. In the subsequent reaction, CoSi grows at the expense of the decompositions of CoGa and CoAs at 460°C. At 600°C, ternary phase is decomposed, and CoSi forms interface with GaAs. This finding can be understood from the calculated Si-Co-Ga-As quaternary phase diagram.

scholarly journals Influence of Low Temperature-Grown GaAs on Lateral Thermal Oxidation of Al0.98Ga0.02As

2000 ◽  
Vol 623 ◽  
Author(s):  
J. C. Ferrer ◽  
Z. Liliental-Weber ◽  
H. Reese ◽  
Y.J. Chiu ◽  
E. Hu
Keyword(s):  
Low Temperature ◽  
Thermal Oxidation ◽  
Oxidation Process ◽  
Gaas Layer ◽  
Transmission Electron ◽  
Low Temperature Gaas ◽  
Reference Samples ◽  
Thermal Oxidation Process ◽  
Low Temperature Grown Gaas

AbstractThe lateral thermal oxidation process of Al0.98Ga0.02As layers has been studied by transmission electron microscopy. Growing a low-temperature GaAs layer below the Al0.98Ga0.02As has been shown to result in better quality of the oxide/GaAs interfaces compared to reference samples. While the later have As precipitation above and below the oxide layer and roughness and voids at the oxide/GaAs interface, the structures with low-temperature have less As precipitation and develop interfaces without voids. These results are explained in terms of the diffusion of the As toward the low temperature layer. The effect of the addition of a Si02 cap layer is also discussed.

scholarly journals The Structure of GaAs/Si(211) Heteroepitaxial Layers

1987 ◽  
Vol 91 ◽  
Author(s):  
Zuzanna Liliental-Weber ◽  
E.R. Weber ◽  
J. Washburn ◽  
T.Y. Liu ◽  
H. Kroemer
Keyword(s):  
Buffer Layer ◽  
Surface Preparation ◽  
Gaas Layer ◽  
Misfit Dislocations ◽  
Strained Layer ◽  
Si Substrates ◽  
Density Of Dislocations ◽  
Gaas Buffer Layer ◽  
Graded Layers ◽  
Strained Layer Superlattices

ABSTRACTGallium arsenide films grown on (211)Si by molecular-beam epitaxy have been investigated using transmission electron microscopy. The main defects observed in the alloy were of misfit dislocations, stacking faults, and microtwin lamellas. Silicon surface preparation was found to play an important role on the density of defects formed at the Si/GaAs interface.Two different types of strained-layer superlattices, InGaAs/InGaP and InGaAs/GaAs, were applied either directly to the Si substrate, to a graded layer (GaP-InGaP), or to a GaAs buffer layer to stop the defect propagation into the GaAs films. Applying InGaAs/GaAs instead of InGaAs/InGaP was found to be more effective in blocking defect propagation. In all cases of strained-layer superlattices investigated, dislocation propagation was stopped primarily at the top interface between the superlattice package and GaAs. Graded layers and unstrained AlGaAs/GaAs superlattices did not significantly block dislocations propagating from the interface with Si. Growing of a 50 nm GaAs buffer layer at 505°C followed by 10 strained-layer superlattices of InGaAs/GaAs (5 nm each) resulted in the lowest dislocation density in the GaAs layer (∼;5×l07/cm2) among the structures investigated. This value is comparable to the recently reported density of dislocations in the GaAs layers grown on (100)Si substrates [8]. Applying three sets of the same strained layersdecreased the density of dislocations an additional ∼2/3 times.

Tem Assessment of Defects in (CdHg)Te Heterostructures

1990 ◽  
Vol 216 ◽  
Author(s):  
S.G. Lawson-Jack ◽  
I.P. Jones ◽  
D.J. Williams ◽  
M.G. Astles
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Buffer Layer ◽  
High Density ◽  
Misfit Dislocations ◽  
Cross Sectional ◽  
Burgers Vector ◽  
Density Of Dislocations ◽  
Transmission Electron ◽  
Interfacial Plane

ABSTRACTTransmission electron microscopy has been used to assess the defect contents of the various layers and interfaces in (CdHg) Te heterostructures. Examination of cross sectional specimens of these materials suggests that the density of misfit dislocations at the interfaces is related to the layer thicknesses, and that the high density of dislocations which are generated at the GaAs/CdTe interface are effectively prevented from penetrating into the CdHgTe epilayer by a 3um thick buffer layer. The majority of the dislocations in the layers were found to have a Burgers vector b = a/2<110> and either lie approximately parallel or inclined at an angle of ∼ 60° to the interfacial plane.

Characterization of Structure and Mechanical Properties of MoSi2-SiC Nanolayer Composites

1993 ◽  
Vol 322 ◽  
Author(s):  
H. Kung ◽  
T. R. Jervis ◽  
J-P. Hirvonen ◽  
M. Nastasi ◽  
T. E. Mitchell
Keyword(s):  
Mechanical Properties ◽  
Structural Changes ◽  
Crystallization Process ◽  
Mechanical Response ◽  
Cross Sectional ◽  
Annealing Conditions ◽  
Transmission Electron ◽  
Layer Structures ◽  
Amorphous Structures

AbstractA systematic study of the structure-mechanical properties relationship is reported for MoSi2-SiC nanolayer composites. Alternating layers of MoSi2 and SiC were synthesized by DCmagnetron and if-diode sputtering, respectively. Cross-sectional transmission electron microscopy was used to examine three distinct reactions in the specimens when exposed to different annealing conditions: crystallization and phase transformation of MoSi2, crystallization of SiC, and spheroidization of the layer structures. Nanoindentation was employed to characterize the mechanical response as a function of the structural changes. As-sputtered material exhibits amorphous structures in both types of layers and has a hardness of 11GPa and a modulus of 217GPa. Subsequent heat treatment induces crystallization of MoSi2 to form the C40 structure at 500°C and SiC to form the a structure at 700°C. The crystallization process is directly responsible for the hardness and modulus increase in the multilayers. A hardness of 24GPa and a modulus of 340GPa can be achieved through crystallizing both MoSi2 and SiC layers. Annealing at 900°C for 2h causes the transformation of MoSi2 into the Cllb structure, as well as spheroidization of the layering to form a nanocrystalline equiaxed microstructure. A slight degradation in hardness but not in modulus is observed accompanying the layer break-down.

TEM Analysis of Planar Defects in InGaAsN and GaAs Grown on Ge (001) by MOVPE

2016 ◽  
Vol 675-676 ◽  
pp. 639-642
Author(s):  
Pornsiri Wanarattikan ◽  
Sakuntam Sanorpim ◽  
Somyod Denchitcharoen ◽  
Visittapong Yordsri ◽  
Chanchana Thanachayanont ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Buffer Layer ◽  
Growth Direction ◽  
Dark Field ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Planar Defects ◽  
Transmission Electron ◽  
Gaas Buffer Layer ◽  
Field Emission Electron Microscopy

InGaAsN on Ge (001) is proposed to be a part of the InGaP(N)/InGaAs/InGaAsN/Ge four-junction solar cell to increase a conversion efficiency over 40%. In this work, InGaAsN lattice-matched film and GaAs buffer layer grown on Ge (001) substrate by metal organic vapor phase epitaxy (MOVPE) were examined by transmission electron microscopy (TEM). Electron diffraction pattern of InGaAsN taken along the [110]-zone axis illustrates single diffracted spots, which represent a layer with a uniformity of alloy composition. Cross-sectional bright field TEM image showed line contrasts generated at the GaAs/Ge interface and propagated to the InGaAsN layer. Dark field TEM images of the same area showed the presence of boundary-like planar defects lying parallel to the growth direction in the InGaAsN film and GaAs buffer layer but not in the Ge substrate. TEM images with the (002) and (00-2) reflections and the four visible {111} planes reflections illustrated planar defects which are expected to attribute to antiphase boundaries (APBs). Moreover, the results observed from atomic force microscopy (AFM) and field emission electron microscopy (FE-SEM) demonstrated the surface morphology of InGaAsN film with submicron-sized domains, which is a characteristic of the APBs.

Anisotropic Surface Roughness in Strain Relaxed In0.40GA0.60As on Gaas with a Step-Graded InxGA1-xAs Buffer Layer

1993 ◽  
Vol 312 ◽  
Author(s):  
J. C. P. Chang ◽  
B. K. Kad ◽  
S. R. Nutt ◽  
K. L. Kavanagh
Keyword(s):  
Electron Microscopy ◽  
Surface Roughness ◽  
Buffer Layer ◽  
Strain Relaxation ◽  
Phase Segregation ◽  
Periodic Variation ◽  
Cross Sectional ◽  
Anisotropic Surface ◽  
Transmission Electron ◽  
Plane Direction

AbstractWe report the structural characterization of the 3-D relaxation morphology of In0.4Ga0.6As grown on a step-graded InxGa1-xAs buffer layer on GaAs. Scanning electron microscopy showed “grooves” spaced on the order of microns running only in the [110] direction. Each groove was observed with cross-sectional transmission electron microscopy to mark the location of a vertical low-angle tilt and/or twist boundary. The veiy rough layer morphology may be the result of island coalescence or severe surface roughness that created the grain boudnaries as the layer grew. Strain relaxation in the In0.4Ga0.6As layer was much reduced in the [101] in-plane direction. The asymmetry in residual in-plane strains in the In0.3Ga0.7AS layer and/or the increased In composition may be responsible for the development of an anisotropic surface roughness. X-ray microanalysis revealed a periodic variation in layer composition which correlated with a fine contrast modulation presumably the result of phase segregation.

Electro- and Photoluminescence from Ultrathin SImGEn Superlattices

1991 ◽  
Vol 256 ◽  
Author(s):  
H. Presting ◽  
U. Menczigar ◽  
G. Abstreiter ◽  
H. Kibbel ◽  
E. Kasper
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Buffer Layer ◽  
Molecular Beam ◽  
Electrical Power ◽  
Silicon Substrates ◽  
Short Period ◽  
Strained Layer Superlattices ◽  
First Time ◽  
Layer Composition

ABSTRACTP-i-n doped short-period SimGen strained layer superlattices (SLS) are grown on (100) silicon substrates by low temperature molecular beam epitaxy (300C°<∼Tg<∼400C°). The SLS's are grown with period lengths around 10 monolayers (ML) to a thickness of 250nm on a rather thin (50nm) homogeneous Si1−ybGeyb alloy buffer layer serving as strain symmetrizing substrate. Photoluminescence at T=5K is observed for various SimGen SLS samples, the strongest signal was found for a Si5 Ge5 SLS. Samples with identical SLS's but different buffer layer composition and thicknesses are grown to study the influence of strain on the PL. Electroluminescence (EL) at the same energy range is observed from mounted SimGen SLS mesa and waveguide diodes up to T=130K – for the first time reported in strain symmetrized short-period SimGen SLS. The intensity and peak positon of the EL signal was found to be dependent on the injected electrical power.

Sign in / Sign up

Export Citation Format

Share Document