Characteristics of μc-Si:H for Si Heterojunction Bipolar Transistors
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AbstractTo improve the thermal stability of the Si heterojunction bipolar transistors (HBTs), we studied the effect of carbon and fluorine doping on μc-Si:H characteristics. We found that carbon doping suppresses crystalline growth and increases the hydrogen concentration in the film, and that fluorine atoms are more thermally stable than hydrogen atoms. We confirmed that carbon or fluorine doping is promising for use with the μc-Si:H HBT.
2012 ◽
Vol 229-231
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pp. 832-836
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2000 ◽
Vol 5
(S1)
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pp. 540-550
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2015 ◽
Vol 639
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pp. 346-351
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