Properties and Effects of Hydrogen in GaN
Keyword(s):
AbstractThe status of understanding of the behavior of hydrogen in GaN and related materials is reviewed. In particular, we discuss the amount of residual hydrogen in MOCVD-grown device structures such as heterojunction bipolar transistors, thyristors and p-i-n diodes intended for high power, high temperature applications. In these structures, the residual hydrogen originating from the growth precursors decorates Mgdoped layers and AlGaN/GaN interfaces. There is a significant difference in the diffusion characteristics and thermal stability of implanted hydrogen between n- and p-GaN, due to the stronger affinity of hydrogen to pair with acceptor dopants and possibly to the difference in H2 formation probability.
2000 ◽
Vol 5
(S1)
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pp. 540-550
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2012 ◽
Vol 229-231
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pp. 832-836
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2011 ◽
Vol 197-198
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pp. 606-609
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Keyword(s):
2013 ◽
Vol 807-809
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pp. 2718-2721