Investigation of Metal Induced Surface Defects in Czochralski Si Following Rapid Thermal Processing by Thermal Wave Modulated Reflectance Method

1991 ◽  
Vol 224 ◽  
Author(s):  
S. Hahn ◽  
W.L Smith ◽  
H. Suga ◽  
J.-G. Park ◽  
C.-S. Lim ◽  
...  

AbstractUsing thermal wave mapping and imaging techniques in conjunction with x-ray transmission topography and transmission electron microscopy, precipitation behavior of various fast and slowly diffusing metallic impurities such as Au, Co, Cu, Fe, Mo, Ni, Pd, Pt, W and Zn in Czochralski Si following rapid thermal processing are investigated. Our data have shown that thermal wave signal is sensitive to certain types of metal-induced surface defects (most likely metal silicides) and associated crystallographic defects. In addition, the comparison between thermal wave and x-ray imaging methods shows an interesting speciesdependent complimentary relationship.

1991 ◽  
Vol 220 ◽  
Author(s):  
Yih Chang ◽  
J. Kramer ◽  
S. Y. Chou ◽  
T. W. Sigmon ◽  
A. F. Marshall

ABSTRACTPatterned GexSi1−x/Si wells are fabricated for the first time by pulsed laser induced epitaxy technique, employing two different semiconductor processing steps to grow these structures selectively. Two different dimensions of Gt0.12 Si0.55 /Si wells are sucessfully formed, in which one is 3.5 μm wide and 1700Å deep while another is 6 μm wide and 1300Å deep. Transmission electron microscopy combined with energy-dispersive X-ray imaging reveals that the 2-D Ge redistribution profiles are well defined and no significant line or surface defects observed. The 2-D Ge well redistribution behavior, governed by heat and mass transport during laser processing, are also discussed.


1993 ◽  
Vol 307 ◽  
Author(s):  
Michael Dudley

ABSTRACTA review of the technique of White Beam Synchrotron X-ray Topography is presented along with some examples of its applications in materials science. Among the topics covered are: the characterization of growth defects in KTiOPO4, ZnTe, and SiC single crystals; studies of phase transitions in perovskite-like crystals; and studies of rapid thermal processing damage in semiconductors. Methodologies for analyzing dislocations, twins (rotational, mirror and inversion twins), precipitates and other crystallographic defects, will be reviewed.


1990 ◽  
Vol 103 (1-4) ◽  
pp. 206-216 ◽  
Author(s):  
S. Hahn ◽  
W.L. Smith ◽  
H. Suga ◽  
R. Meinecke ◽  
R.R. Kola ◽  
...  

2021 ◽  
Vol 655 (1) ◽  
pp. 012073
Author(s):  
J. A. Achuka ◽  
M. R. Usikalu ◽  
M. A. Aweda ◽  
O. A. Olowoyeye ◽  
C. A. Enemuwe ◽  
...  

1997 ◽  
Vol 485 ◽  
Author(s):  
Chih-hung Chang ◽  
Billy Stanbery ◽  
Augusto Morrone ◽  
Albert Davydov ◽  
Tim Anderson

AbstractCuInSe2 thin films have been synthesized from binary precursors by Rapid Thermal Processing (RTP) at a set-point temperature of 290°C for 70 s. With appropriate processing conditions no detrimental Cu2-xSe phase was detected in the CIS films. The novel binary precursor approach consisted of a bilayer structure of In-Se and Cu-Se compounds. This bilayer structure was deposited by migration enhanced physical vapor deposition at a low temperature (200°C) and the influence of deposition parameters on the precursor film composition was determined. The bilayer structure was then processed by RTP and characterized for constitution by X-ray diffraction and for composition by Wavelength Dispersive X-ray Spectroscopy.


2012 ◽  
Vol 31 (4-5) ◽  
pp. 451-458 ◽  
Author(s):  
S. Fujieda ◽  
K. Shinoda ◽  
T. Inanaga ◽  
M. Abumiya ◽  
S. Suzuki

AbstractA novel process for preparing scorodite particles with a diameter of approximately 20 µm from Fe(II) and As(V) in aqueous solution has been developed by DOWA Metals and Mining. In the present study, the dissolution characteristics of iron and arsenic from the scorodite particles synthesized by this process have been investigated under different conditions. The results show that the concentration of arsenic dissolved from the particles in aqueous solution is very low, but it has a complicated dependence on the temperature and pH of the solution. Transmission electron microscopy (TEM) with an energy dispersive X-ray spectrometer (EDS) was used to analyze the morphology, structure, and composition of the scorodite particles. The results indicate that the scorodite particles exhibit a nearly octahedral shape with planes composed of almost (111) planes in the orthorhombic structure. The concentration of iron at the surface of the particles is higher than that of iron inside of the particles. This characteristic morphology, along with the minimal surface defects of the scorodite particles, is considered to be responsible for the low dissolution of arsenic from the particles in aqueous solution. Atmospheric temperature and solution conditions were also found to be important for the safe, long-term storage of arsenic using scorodite particles.


Author(s):  
Dipayan Das ◽  
KC Santosh ◽  
Umapada Pal

Abstract Since December 2019, the Coronavirus Disease (COVID-19) pandemic has caused world-wide turmoil in less than a couple of months, and the infection, caused by SARS-CoV-2, is spreading at an unprecedented rate. AI-driven tools are used to identify Coronavirus outbreaks as well as forecast their nature of spread, where imaging techniques are widely used, such as CT scans and chest X-rays (CXRs). In this paper, motivated by the fact that X-ray imaging systems are more prevalent and cheaper than CT scan systems, a deep learning-based Convolutional Neural Network (CNN) model, which we call Truncated Inception Net, is proposed to screen COVID-19 positive CXRs from other non-COVID and/or healthy cases. To validate our proposal, six different types of datasets were employed by taking the following CXRs: COVID-19 positive, Pneumonia positive, Tuberculosis positive, and healthy cases into account. The proposed model achieved an accuracy of 99.96% (AUC of 1.0) in classifying COVID- 19 positive cases from combined Pneumonia and healthy cases. Similarly, it achieved an accuracy of 99.92% (AUC of 0.99) in classifying COVID-19 positive cases from combined Pneumonia, Tuberculosis and healthy CXRs. To the best of our knowledge, as of now, the achieved results outperform the existing AI-driven tools for screening COVID-19 using CXRs.


2021 ◽  
Vol 54 (2) ◽  
pp. 409-426
Author(s):  
Peng Qi ◽  
Xianbo Shi ◽  
Nazanin Samadi ◽  
Dean Chapman

X-ray Laue-type monochromators are common and essential optical components at many high-power X-ray facilities, e.g. synchrotron facilities. The X-ray optics of bent Laue crystals is a well developed area. An incident X-ray beam penetrating a bent Laue crystal will result in a diffracted beam with different angles and energies. There is a need for a way of organizing the rays that allows one to sort out the energy and spatial properties of the diffracted beam. The present work introduces a new approach for describing the general behaviour of bent Laue crystals from a ray-tracing point of view. This quasi-monochromatic beam approach provides an intuitive view of bent-crystal diffraction and leads to deeper understanding. It explains the energy and spatial properties of common and special cases of bent Laue optics, predicts phenomena that can improve energy-dispersion-related X-ray imaging techniques and provides a theoretical framework that makes ray-tracing simulation easier to realize.


2021 ◽  
pp. 223-247
Author(s):  
Lei Du ◽  
Nan Sun ◽  
Yajie Song ◽  
Hanwen An ◽  
Jian Liu

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