Concentration-Independent Solute Segregation in Laser Annealing of Semiconductor Crystals

1983 ◽  
Vol 23 ◽  
Author(s):  
Jun-ichi Chikawa ◽  
Fumio Sato ◽  
Tadasu Sunada

ABSTRACTAtomic processes at the interface in regrowth following laser induced melting were investigated by observing behavior of impurity segregation. The interfacial segregation coefficient k* was obtained from depth profiles of solute atoms redistributed by laser irradiation of uniformly doped Si, Ge, and GayAl1−yAs crystals. It was found that k*=k0 for B in Si, Ga in Ge ih the growth rate range of 1 m/s. It is concluded that rapid growth freezes a state of liquid monolayer adjacent to the interface which has the character of ideal solution from dilute to eutectic composition for dopant-silicon systems and in the entire range of composition for the mixed crystal.

1993 ◽  
Vol 07 (01n03) ◽  
pp. 528-533 ◽  
Author(s):  
PAVEL LEJČEK

Measurements of solute segregation to free surfaces and grain boundaries in well-defined samples of α-Fe-Si model alloys revealed pronounced differences. Segregation of C and P and depletion of Si are characteristic for grain boundaries. Cosegregation of Si and N resulting in formation of silicon nitrides prevails at the majority of free surfaces in samples containing nitrogen, but S segregation dominates at the surfaces of nitrogen free samples. The results are summarized from the viewpoint of the type of interface, alloy composition and segregation temperature.


2007 ◽  
Vol 13 (6) ◽  
pp. 503-516 ◽  
Author(s):  
Keith E. Knipling ◽  
David C. Dunand ◽  
David N. Seidman

Atom probe tomography was utilized to measure directly the chemical compositions of Al3(Zr1−xTix) precipitates with a metastable L12 structure formed in Al-0.1Zr-0.1Ti (at.%) alloys upon aging at 375°C or 425°C. The alloys exhibit an inhomogeneous distribution of Al3(Zr1−xTix) precipitates, as a result of a nonuniform dendritic distribution of solute atoms after casting. At these aging temperatures, the Zr:Ti atomic ratio in the precipitates is about 10 and 5, respectively, indicating that Ti remains mainly in solid solution rather than partitioning to the Al3(Zr1−xTix) precipitates. This is interpreted as being due to the very small diffusivity of Ti in α-Al, consistent with prior studies on Al-Sc-Ti and Al-Sc-Zr alloys, where the slower diffusing Zr and Ti atoms make up a small fraction of the Al3(Sc1−xTix/Zrx) precipitates. Unlike those alloys, however, the present Al-Zr-Ti alloys exhibit no interfacial segregation of Ti at the matrix/precipitate heterophase interface, a result that may be affected by a significant disparity in the evaporation fields of the α-Al matrix and Al3(Zr1−xTix) precipitates and/or a lack of local thermodynamic equilibrium at the interface.


2010 ◽  
Author(s):  
M. A. Marisov ◽  
E. Yu. Koryakina ◽  
A. K. Naumov ◽  
V. V. Semashko ◽  
S. L. Korableva ◽  
...  

1989 ◽  
Vol 157 ◽  
Author(s):  
Stephen J. Cook ◽  
Paulette Clancy

ABSTRACTNon-equilibrium Molecular Dynamics simulation methods have been used to study the trapping of “impurities” in an Ag5B15 Lennard-Jones alloy where the B atoms are 10% bigger in diameter than A. The observation of surface melting in this system is used to calculate an equilibrium interfacial segregation coefficient. Simulations of rapid melting and resolidification were performed for the (100) and (111) orientations at two different substrate temperatures (0.65 Tm and 0.95 Tm) for each orientation. Solute impurity atoms are shown to have been trapped at greater concentrations in the solid than under equilibrium conditions. Partitionless solidification is observed when the regrowth velocity greatly exceeds the diffusive velocity.


1988 ◽  
Vol 129 (3) ◽  
pp. 180-184 ◽  
Author(s):  
T.A. Kuzemchenko ◽  
A.A. Manenkov ◽  
G.N. Mikhailova ◽  
S.Yu. Sokolov

1989 ◽  
Vol 157 ◽  
Author(s):  
J. S. Custer ◽  
Michael O. Thompson ◽  
D. C. Jacobson ◽  
J. M. Poate

ABSTRACTThe interface velocity of Au and Ag doped amorphous Si during ion beam induced epitaxy was measured using in situ time resolved reflectivity. Interfacial segregation coefficients were determined as a function of composition from numerical simulations. At 320°C Au impurities enhanced the velocity by up to a factor of 2.5 compared to the intrinsic case. Silver slightly retarded re-growth by 10 %. These effects are qualitatively similar to the case of thermal solid phase epitaxy. Using the measured impurity profiles and interface velocity, computer simulations relate the segregation coefficient to the concentrations of the impurity at the interface. In both cases, the segregation coefficient increases with increasing interfacial impurity concentration.


1996 ◽  
Vol 458 ◽  
Author(s):  
D. A. Blom ◽  
Y.-M. Chiang

ABSTRACTGrain boundary segregation in cerium dioxide doped with varying amounts of gadolinium oxide and tantalum oxide has been measured with x-ray energy dispersive spectroscopy using a Vacuum Generators HB603 Scanning Transmission Electron Microscope (STEM). The data has been analyzed in the framework of both elastic relaxation and space charge segregation forces with a limited number of surface sites. Results show that multiple driving forces must be taken into account to explain aliovalent solute segregation.


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