Line-Shaped Electron Beam System and Soi Films Prepared by The System

1985 ◽  
Vol 45 ◽  
Author(s):  
Y. Hayafuji ◽  
A. Shibata ◽  
T. Yanada ◽  
A. Sawada ◽  
S. Usui ◽  
...  
Keyword(s):  
Electron Beam ◽  
Crystalline Silicon ◽  
Semiconductor Industry ◽  
High Energy ◽  
Silicon Films ◽  
High Energy Density ◽  
Present System ◽  
Single Crystalline ◽  
Beam System ◽  
Scanning Area

ABSTRACTThe line-shaped electron beam annealing system which generates an electron beam of a length of 4 cm and a width af less than 100 um with a high energy density exceeding well over 100 kW/cm2 was developed for the first time with a purpose of SOI processing as its primary application. An pccelaration voltage of up to 20 kV can be used in this system. Seeded single crystalline islands with areas several mm long and 30 to 100 um in width were obtained by a single scan of the electron beam. The electron beam is generated in a pulsed way in the system due to the power restriction of the power supplies. An area of 4×5 cm2 was processed by a single scan of an electron beam at a sample speed of 530 cm/sec and a beam duration of 9.5 msec. The scanning area for one scan is determined by the beam length and the duration of the beam and sample speed.The present system could give single crystalline silicon films without any grain boundaries. The electron mobility of the electron beam recrystallized films, obtained from FETs made as a vehicle to test the electrical properties of the films, was comparable to that of the bulk silicon. A very rapid migration of silicon atoms in solid polycrystalline silicon films, which is controllable by process parameters, was also found with a migration speed of the order of 1 m/sec in a capped structure. The present electron beam system is useful in studying basic mechanisms of crystal growth in thin films. The system can have a very high throughput, a desirable feature in semiconductor industry. The present system can also be used to study the rapid thermal treatment of materials other than semiconductors including rapidly solidified materials.

Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon

2002 ◽  
Vol 74 (9) ◽  
pp. 1631-1641 ◽  
Author(s):  
P. Sen ◽  
J. Akhtar
Keyword(s):  
Vibrational Energy ◽  
Crystalline Silicon ◽  
Ion Irradiation ◽  
Heavy Ion ◽  
High Energy ◽  
Crystalline Lattice ◽  
Periodic Lattice ◽  
Silicon Nanostructures ◽  
Nonlinear Transport ◽  
Single Crystalline

The possibility of modifying existing materials through technology has become the recipe for preparation of advanced materials. Nonequilibrium processing of silicon through MeV ion irradiation will be shown here to yield interesting properties. We propose localization of vibrational energy following an ion irradiation process and their transport (nonlinear transport of energy) through linear chains of a single-crystalline lattice. The localization of energy can involve 3­4 atoms, and, hence, nanometer-sized entities evolve, distinguishable from the remaining periodic lattice owing to their unique interatomic distances. The energy required to produce these structures is supplied by a single high-energy heavy ion, incident normal to a suitable crystal face so as to lose energy by the electronic energy loss mechanism. These entities can be trapped at a desired location that leads to silicon nanostructures with modified band-gaps.

scholarly journals High energy electron radiography scheme with high spatial and temporal resolution in three dimension based on a e-LINAC

2016 ◽  
Vol 34 (2) ◽  
pp. 338-342 ◽  
Author(s):  
Y. Zhao ◽  
Z. Zhang ◽  
W. Gai ◽  
Y. Du ◽  
S. Cao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Temporal Resolution ◽  
Inertial Confinement Fusion ◽  
High Energy ◽  
High Energy Density ◽  
Inertial Confinement ◽  
Three Dimension ◽  
Scattered Electron ◽  
Electron Linear Accelerator ◽  
Confinement Fusion

AbstractWe present a scheme of electron beam radiography to dynamically diagnose the high energy density (HED) matter in three orthogonal directions simultaneously based on electron Linear Accelerator. The dynamic target information such as, its profile and density could be obtained through imaging the scattered electron beam passing through the target. Using an electron bunch train with flexible time structure, a very high temporal evolution could be achieved. In this proposed scheme, it is possible to obtain 1010 frames/second in one experimental event, and the temporal resolution can go up to 1 ps, spatial resolution to 1 µm. Successful demonstration of this concept will have a major impact for both future inertial confinement fusion science and HED physics research.

Development of Cathode Filament Power Supply for EBW Based on ARM

2014 ◽  
Vol 960-961 ◽  
pp. 1300-1303
Author(s):  
Ze Ting Wang ◽  
Peng Liu ◽  
Sheng Wen Fan
Keyword(s):  
Electron Beam ◽  
Power Supply ◽  
Electron Beam Welding ◽  
High Volume ◽  
High Energy ◽  
High Energy Density ◽  
Shipping Industry ◽  
Soft Start ◽  
Power Frequency ◽  
Low Efficiency

The electron beam welding has high energy density, and has been widely applied in air space, the car and shipping industry. Traditional electron beam welding machine power supply system adopts the technology of the power frequency or medium frequency, with high volume, low efficiency and poor stability of electron beam. I put forward a digital filament power control scheme based on STM32, and introduce the hardware and software implementation method in detail. Experiments show that it can realize soft-start and soft-down process, and also be quickly identified and promptly forbid the output when filament fracture, which realize the intellectualization of filament power supply.

Field Evaluation of High Voltage Electron Beam Technology for Treating VOC-Contaminated Groundwater. Part II: Acute Toxicity Changes and By-Product Formation

1998 ◽  
Vol 3 (1) ◽  
Author(s):  
Kirankumar Topudurti ◽  
Michael Keefe ◽  
Chriso Petropoulou ◽  
Tim Schlichting ◽  
Franklin Alvarez
Keyword(s):  
South Carolina ◽  
Electron Beam ◽  
Acute Toxicity ◽  
Organic Compounds ◽  
High Voltage ◽  
High Energy ◽  
Department Of Energy ◽  
Innovative Technology ◽  
Beam System ◽  
The U.S

AbstractAs part of the Superfund Innovative Technology Evaluation program, the U.S. Environmental Protection Agency evaluated the High Voltage jEnvironmental Applications, Inc. (HVEA), electron beam (E-beam) technology at the U.S. Department of Energy Savannah River Site (SRS) in Aiken, South Carolina. This technology irradiates water with a beam of high-energy electrons, causing the formation of three primary transient reactive species: aqueous electrons, hydroxyl radicals, and hydrogen radicals. Target organic compounds are either mineralized or broken down into low molecular weight organic compounds, primarily by these species. The E-beam system used for the evaluation is housed in an 8- by 48-foot trailer and is rated for a maximum flow rate of 50 gpm. During two different periods totaling 3 weeks in September and November 1994, about 70,000 gallons of SRS M-area groundwater contaminated with volatile organic compounds (VOCs) was treated with the E-beam system. E-beam treatment increased groundwater acute toxicity for fathead minnows but not for water fleas. Although several VOCs were removed, lack of decrease in toxicity appears to be due to formation of toxic by-products, including haloacetic acids and aldehydes, during E-beam treatment of groundwater. An increase in inorganic carbon and chloride concentrations was observed, in the treated groundwater indicating that some VOCs were mineralized during E-beam treatment. Formation of CO

X-ray spectroscopy and spectropolarimetry of high energy density plasma complemented by LLNL electron beam ion trap experiments

2003 ◽  
Vol 74 (3) ◽  
pp. 1947-1950 ◽  
Author(s):  
A. S. Shlyaptseva ◽  
D. A. Fedin ◽  
S. M. Hamasha ◽  
S. B. Hansen ◽  
C. Harris ◽  
...  
Keyword(s):  
Electron Beam ◽  
Energy Density ◽  
Ion Trap ◽  
High Energy ◽  
High Energy Density ◽  
X Ray ◽  
Electron Beam Ion Trap ◽  
Density Plasma

scholarly journals The importance of EBIT data for Z-pinch plasma diagnostics

2008 ◽  
Vol 86 (1) ◽  
pp. 267-276 ◽  
Author(s):  
A S Safronova ◽  
V L Kantsyrev ◽  
P Neill ◽  
U I Safronova ◽  
D A Fedin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Lawrence Livermore National Laboratory ◽  
National Laboratory ◽  
Theoretical Models ◽  
High Energy ◽  
High Energy Density ◽  
Strong Electron ◽  
Model Calculations ◽  
X Ray ◽  
Z Pinch

The results from the last six years of X-ray spectroscopy and spectropolarimetry of high-energy density Z-pinch plasmas complemented by experiments with the electron beam ion trap (EBIT) at the Lawrence Livermore National Laboratory (LLNL) are presented. The two topics discussed are the development of M-shell X-ray W spectroscopic diagnostics and K-shell Ti spectropolarimetry of Z-pinch plasmas. The main focus is on radiation from a specific load configuration called an “X-pinch”. In this work the study of X-pinches with tungsten wires combined with wires from other, lower Z materials is reported. Utilizing data produced with the LLNL EBIT at different energies of the electron beam the theoretical prediction of line positions and intensity of M-shell W spectra were tested and calibrated. Polarization-sensitive X-pinch experiments at the University of Nevada, Reno (UNR) provide experimental evidence for the existence of strong electron beams in Ti and Mo X-pinch plasmas and motivate the development of X-ray spectropolarimetry of Z-pinch plasmas. This diagnostic is based on the measurement of spectra recorded simultaneously by two spectrometers with different sensitivity to the linear polarization of the observed lines and compared with theoretical models of polarization-dependent spectra. Polarization-dependent K-shell spectra from Ti X-pinches are presented and compared with model calculations and with spectra generated by a quasi-Maxwellian electron beam at the LLNL EBIT-II electron beam ion trap.PACS Nos.: 32.30.Rj, 52.58.Lq, 52.70.La

Nonrelativistic electron beam expansion in the solar corona/wind  and their type III radio bursts observed with LOFAR

2021 ◽  
Author(s):  
Hamish Reid ◽  
Eduard Kontar
Keyword(s):  
Electron Beam ◽  
Energy Density ◽  
Solar Corona ◽  
Electron Beams ◽  
Low Frequency ◽  
High Energy ◽  
High Energy Density ◽  
Moderate Intensity ◽  
Radio Bursts ◽  
Type Iii

<div> <div><span>Solar type III radio bursts contain a wealth of information about the dynamics of near-relativistic electron beams in the solar corona and the inner heliosphere; this information is currently unobtainable through other means.  Whilst electron beams expand along their trajectory, the motion of different regions of an electron beam (front, middle, and back) had never been systematically analysed before.  Using LOw Frequency ARray (LOFAR) observations between 30-70 MHz of type III radio bursts, and kinetic simulations of electron beams producing derived type III radio brightness temperatures, we explored the expansion as electrons propagate away from the Sun.  From relatively moderate intensity type III bursts, we found mean electron beam speeds for the front, middle and back of 0.2, 0.17 and 0.15 c, respectively.  Simulations demonstrated that the electron beam energy density, controlled by the initial beam density and energy distribution have a significant effect on the beam speeds, with high energy density beams reaching front and back velocities of 0.7 and 0.35 c, respectively.  Both observations and simulations found that higher inferred velocities correlated with shorter FWHM durations of radio emission at individual frequencies.  Our radial predictions of electron beam speed and expansion can be tested by the upcoming in situ electron beam measurements made by Solar Orbiter and Parker Solar Probe.</span></div> </div>

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