Structure of Si:H Films Fabricated by Plasma-Enhanced Cvd using Hydrogen Diluted Plasma

2000 ◽  
Vol 609 ◽  
Author(s):  
F. Edelman ◽  
A. Chack ◽  
R. Weil ◽  
R. Beserman ◽  
P. Werner ◽  
...  
Keyword(s):  
High Rate ◽  
Hydrogen Dilution ◽  
Average Grain Size ◽  
Si Films ◽  
20 Nm ◽  
Spectroscopy Optical ◽  
Substrate Temperatures ◽  
Hydrogen Effusion ◽  
Nanocrystalline Si

ABSTRACTThe structure of undoped Si:H films deposited at a high rate of 6-9 Å/s in an RF (13.56 MHz) plasma from hydrogen-silane gas mixtures at various substrate temperatures was studied using TEM (with in-situ annealing), XRD, Raman spectroscopy, optical absorption and hydrogen effusion. It is found that under our conditions the amorphous to crystalline transition occurs in a relatively narrow range of parameters, influenced mainly by hydrogen dilution and to a lesser degree by the substrate temperature. In the crystalline range the material is found to be nanocrystalline (average grain size 20 nm) and the crystals are essentially stable up to 800°C annealing. The crystal structure of a mixed amorphousnanocrystalline phase of samples deposited near the edge of crystallinity is also found to be rather stable. Nanocrystalline Si films deposited under these latter deposition conditions reveal in hydrogen effusion a relatively compact material and show high solar cell efficiencies (6-8%) when incorporated as i-layers in pin solar cells.

In-Situ Mass Spectroscopy of ECR Silane Plasmas for Amorphous and Microcrystalline Silicon Growth

2000 ◽  
Vol 609 ◽  
Author(s):  
Young J. Song ◽  
Elena Guliants ◽  
Hak-Gyu Lee ◽  
Wayne A. Anderson
Keyword(s):  
Mass Spectroscopy ◽  
Atomic Hydrogen ◽  
Dark Conductivity ◽  
Input Power ◽  
Chamber Pressure ◽  
Film Properties ◽  
Hydrogen Dilution ◽  
Silicon Growth ◽  
Si Films

ABSTRACTECR silane plasmas for the deposition of a-Si:H and μc-Si films were investigated by in-situ mass spectroscopy (MS) using a quadrupole residual gas analyzer. The results showed that the intensities of ionic and neutral species (H, H2, He, Ar, Si and SiHx) in the 2 % SiH4/He plasma are strongly dependent on the deposition conditions such as chamber pressure, input power and hydrogen dilution. In all cases, the prevalence of Si ions was observed over SiH, SiH2 and SiH3 ions, suggesting a high decomposition rate of the silane in the plasma. In particular, the population of atomic hydrogen in the plasma seems to play a key role in the properties of both a-Si:H and μc-Si films. For example, the increased intensity of atomic hydrogen, compared to that of molecular hydrogen, resulted in the better quality a-Si:H film, showing a higher photo and dark conductivity ratio of ~105. The intensity of the hydrogen species was especially sensitive to the chamber pressure. The correlation between MS spectra and film properties is presented.

Residual stress in amorphous and nanocrystalline Si films prepared by PECVD with hydrogen dilution

2005 ◽  
Vol 124-125 ◽  
pp. 132-137 ◽  
Author(s):  
Y.Q. Fu ◽  
J.K. Luo ◽  
S.B. Milne ◽  
A.J. Flewitt ◽  
W.I. Milne
Keyword(s):  
Residual Stress ◽  
Hydrogen Dilution ◽  
Si Films ◽  
Nanocrystalline Si

Dopant Diffusion and Grain Growth in Arsenic-Implanted Poly-Si

1987 ◽  
Vol 106 ◽  
Author(s):  
L. R. Zheng ◽  
L. S. Hung ◽  
J. W. Mayer
Keyword(s):  
Grain Size ◽  
Grain Growth ◽  
Amorphous Layer ◽  
Crystal Nucleation ◽  
Initial Size ◽  
Diffusion Behavior ◽  
Transmission Electron ◽  
Average Grain Size ◽  
Si Films

ABSTRACTThe diffusion behavior of arsenic and the grain growth of Si in arsenic doped poly-Si were investigated by MeV4 He2+ backscattering techniques and transmission electron microscopy. By implanting arsenic ions into poly-Si films the surface portion was made amorphous and crystallized upon annealing. In-situ mssurements showed crystal nucleation and growth at temperatures of 650 – 700° C with a dimension comparable to the thickness of the amorphous layer. Annealing at temperatures up to 850°C increased the number of the large grains, but the average grain size did not change significantly. In the unimplanted region grains retained their initial size until 885°C, although implanted arsenic was found to diffuse into this region along grain boundaries. At 885°C penetration of arsenic into the interior of grains caused significant grain growth. We also found that single implants of boron somewhat increased grain size, whereas boron codoped with arsenic appeared to reduce the effect of arsenic doping. These observations support the hypothesis that the enhanced growth rate and the electrical activity of Si near the grain boundary are closely interrelated.

Structure of Palladium Single-Crystal Films Prepared by Flash Evaporation onto (001) NaCl Substrates

1970 ◽  
Vol 28 ◽  
pp. 456-457
Author(s):  
L. E. Murr ◽  
G. Wong
Keyword(s):  
Single Crystal ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Rate ◽  
Flash Evaporation ◽  
Optimum Load ◽  
Single Crystal Films ◽  
Crystal Films ◽  
A Current

Palladium single-crystal films have been prepared by Matthews in ultra-high vacuum by evaporation onto (001) NaCl substrates cleaved in-situ, and maintained at ∼ 350° C. Murr has also produced large-grained and single-crystal Pd films by high-rate evaporation onto (001) NaCl air-cleaved substrates at 350°C. In the present work, very large (∼ 3cm2), continuous single-crystal films of Pd have been prepared by flash evaporation onto air-cleaved (001) NaCl substrates at temperatures at or below 250°C. Evaporation rates estimated to be ≧ 2000 Å/sec, were obtained by effectively short-circuiting 1 mil tungsten evaporation boats in a self-regulating system which maintained an optimum load current of approximately 90 amperes; corresponding to a current density through the boat of ∼ 4 × 104 amperes/cm2.

In-Situ Observation of Clay Minerals Hydrated and Intercalated With Liquid Chemicals Using Film-Sealed Environmental Cell

1980 ◽  
Vol 38 ◽  
pp. 208-209 ◽  
Author(s):  
K. Fukushima ◽  
N. Kohyama ◽  
A. Fukami
Keyword(s):  
Carbon Film ◽  
Resolving Power ◽  
In Situ Observation ◽  
Interlayer Water ◽  
Saturated Water ◽  
Structure Changes ◽  
Environmental Cell ◽  
Gas Layer ◽  
20 Nm

A film-sealed high resolution environmental cell(E.C) for observing hydrated materials had been developed by us(l). Main specification of the E.C. is as follows: 1) Accelerated voltage; 100 kV. 2) Gas in the E.C.; saturated water vapour with carrier gas of 50 Torr. 3) Thickness of gas layer; 50 μm. 4) Sealing film; evaporated carbon film(20 nm thick) with plastic microgrid. 5) Resolving power; 1 nm. 6) Transmittance of electron beam; 60% at 100 kV. The E.C. had been successfully applied to the study of hydrated halloysite(2) (3). Kaolin minerals have no interlayer water and are basically non-expandable but form intercalation compounds with some specific chemicals such as hydrazine, formamide and etc. Because of these compounds being mostly changed in vacuum, we tried to reveal the structure changes between in wet air and in vacuum of kaolin minerals intercalated with hydrazine and of hydrated state of montmori1lonite using the E.C. developed by us.

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

On-site and in situ bioremediation of wood-preservative contaminated groundwater

2000 ◽  
Vol 42 (5-6) ◽  
pp. 371-376 ◽  
Author(s):  
J.A. Puhakka ◽  
K.T. Järvinen ◽  
J.H. Langwaldt ◽  
E.S. Melin ◽  
M.K. Männistö ◽  
...  
Keyword(s):  
Iron Oxidation ◽  
Wood Preservative ◽  
Pilot Scale ◽  
High Rate ◽  
Contaminated Groundwater ◽  
Groundwater Temperature ◽  
In Situ Bioremediation ◽  
Contaminated Aquifer ◽  
Fluidized Bed Process

This paper reviews ten years of research on on-site and in situ bioremediation of chlorophenol contaminated groundwater. Laboratory experiments on the development of a high-rate, fluidized-bed process resulted in a full-scale, pump-and-treat application which has operated for several years. The system operates at ambient groundwater temperature of 7 to 9°C at 2.7 d hydraulic retention time and chlorophenol removal efficiencies of 98.5 to 99.9%. The microbial ecology studies of the contaminated aquifer revealed a diverse chlorophenol-degrading community. In situ biodegradation of chlorophenols is controlled by oxygen availability, only. Laboratory and pilot-scale experiments showed the potential for in situ aquifer bioremediation with iron oxidation and precipitation as a potential problem.

scholarly journals In-Situ Annealed Ti3C2Tx MXene Based All-Solid-State Flexible Zn-Ion Hybrid Micro Supercapacitor Array with Enhanced Stability

2021 ◽  
Vol 13 (1) ◽  
Author(s):  
La Li ◽  
Weijia Liu ◽  
Kai Jiang ◽  
Di Chen ◽  
Fengyu Qu ◽  
...  
Keyword(s):  
High Energy ◽  
High Rate ◽  
High Energy Density ◽  
Electrochemical Performances ◽  
Integrated Electronics ◽  
Long Term Stability ◽  
Hybrid Supercapacitors ◽  
Portable Electronics

AbstractZn-ion hybrid supercapacitors (SCs) are considered as promising energy storage owing to their high energy density compared to traditional SCs. How to realize the miniaturization, patterning, and flexibility of the Zn-ion SCs without affecting the electrochemical performances has special meanings for expanding their applications in wearable integrated electronics. Ti3C2Tx cathode with outstanding conductivity, unique lamellar structure and good mechanical flexibility has been demonstrated tremendous potential in the design of Zn-ion SCs, but achieving long cycling stability and high rate stability is still big challenges. Here, we proposed a facile laser writing approach to fabricate patterned Ti3C2Tx-based Zn-ion micro-supercapacitors (MSCs), followed by the in-situ anneal treatment of the assembled MSCs to improve the long-term stability, which exhibits 80% of the capacitance retention even after 50,000 charge/discharge cycles and superior rate stability. The influence of the cathode thickness on the electrochemical performance of the MSCs is also studied. When the thickness reaches 0.851 µm the maximum areal capacitance of 72.02 mF cm−2 at scan rate of 10 mV s−1, which is 1.77 times higher than that with a thickness of 0.329 µm (35.6 mF cm−2). Moreover, the fabricated Ti3C2Tx based Zn-ion MSCs have excellent flexibility, a digital timer can be driven by the single device even under bending state, a flexible LED displayer of “TiC” logo also can be easily lighted by the MSC arrays under twisting, crimping, and winding conditions, demonstrating the scalable fabrication and application of the fabricated MSCs in portable electronics.

New determinations of tides on the north-western Ross Ice Shelf

2020 ◽  
pp. 1-14
Author(s):  
Richard D. Ray ◽  
Kristine M. Larson ◽  
Bruce J. Haines
Keyword(s):  
Time Series ◽  
Tide Gauge ◽  
High Rate ◽  
Ice Shelf ◽  
Ross Ice Shelf ◽  
The North ◽  
Global Positioning ◽  
North Western

Abstract New determinations of ocean tides are extracted from high-rate Global Positioning System (GPS) solutions at nine stations sitting on the Ross Ice Shelf. Five are multi-year time series. Three older time series are only 2–3 weeks long. These are not ideal, but they are still useful because they provide the only in situ tide observations in that sector of the ice shelf. The long tide-gauge observations from Scott Base and Cape Roberts are also reanalysed. They allow determination of some previously neglected tidal phenomena in this region, such as third-degree tides, and they provide context for analysis of the shorter datasets. The semidiurnal tides are small at all sites, yet M2 undergoes a clear seasonal cycle, which was first noted by Sir George Darwin while studying measurements from the Discovery expedition. Darwin saw a much larger modulation than we observe, and we consider possible explanations - instrumental or climatic - for this difference.

Encapsulating Tin Nanoflowers into Microcapsules for High‐Rate‐Performance Secondary Battery Anodes through In Situ Polymerizing Oil‐in‐Water Interface

2020 ◽  
Vol 8 (5) ◽  
pp. 1901404 ◽  
Author(s):  
Tianli Han ◽  
Yong Wu ◽  
Yingyi Ding ◽  
Yan Zhong ◽  
Ping Zhou ◽  
...  
Keyword(s):  
High Rate ◽  
Water Interface ◽  
Rate Performance ◽  
Secondary Battery ◽  
Oil In Water ◽  
High Rate Performance
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