Integration and Characterization of Low Carbon Content SiOxCyHz Low κ Materials for < 0.18μm[ Dual Damascene Application

2000 ◽  
Vol 612 ◽  
Author(s):  
Ju-Hyung Lee ◽  
Nasreen Chopra ◽  
Jim Ma ◽  
Yung-Cheng Lu ◽  
Tzu-Fang Huang ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Chemical Composition ◽  
Carbon Content ◽  
Moisture Absorption ◽  
Compositional Analysis ◽  
Low Density ◽  
Network Structures ◽  
Low Carbon ◽  
Film Density

AbstractA CVD-based low κ film was evaluated for inter-metal dielectric in < 0.18 [.proportional]m generation devices. The film was deposited by conventional rf PECVD method using organosilane compound and oxygen. The measured dielectric constant of the film was 2.7∼2.75. The κ value of the film was stable over several weeks and the moisture absorption was minimal. The chemical composition was in the form of SiOxCyHz, where the carbon content was less than 5 atomic %. Blanket film integration study was conducted to find out the manufacturing compatibility. The largest increase in κ value occurred during etching and ashing steps. However, SIMS compositional analysis revealed that the damage from these steps were limited to within top 300 Å, and the initial low κ value was recovered after the top damaged layer was removed by CMP. The final integrated dielectric constant was less than 3.0. The film density was measured as 1.4, compared to 2.3 g/cm3 of conventional SiO2. The low density of the film resulted from the termination of SiO2 network structures by Si-CH3 and Si-H.

Tailoring Carbon Nanoclusters to Desired Morphologies

1998 ◽  
Vol 13 (9) ◽  
pp. 2438-2444 ◽  
Author(s):  
Jun Jiao ◽  
Supapan Seraphin
Keyword(s):  
Carbon Monoxide ◽  
High Temperature ◽  
Carbon Content ◽  
Arc Discharge ◽  
Low Carbon ◽  
High Carbon ◽  
High Carbon Content ◽  
Carbon Nanoclusters ◽  
Comparative Manner

The preparation and structural characterization of carbon nanoclusters of different morphologies produced by three different methods and under a variety of conditions is reported. In a comparative manner, the growth phenomena and structural properties of carbon nanoclusters are investigated as synthesized by (a) the high temperature (˜3000 °C) and high carbon-content process of the conventional arc-discharge, (b) the high temperature but low carbon-content process of the modified arc-discharge, and finally (c) the relatively low temperature (˜500 °C) process of Ni catalytic disproportionation of carbon monoxide.

Effects of Cellulosic and Basic Flux on the Structure, Composition and Hardness of SMAW Welds on Steel X42

2016 ◽  
Vol 27 ◽  
pp. 11-19 ◽  
Author(s):  
Farida Khamouli ◽  
Mosbah Zidani ◽  
Hichem Farh ◽  
Adel Saoudi ◽  
L'hadi Atoui
Keyword(s):  
Chemical Composition ◽  
Carbon Content ◽  
Acicular Ferrite ◽  
Mass Concentration ◽  
Chemical Compositions ◽  
Low Carbon ◽  
Micro Hardness ◽  
Microstructure Formation ◽  
Basic Flux ◽  
Metallic Inclusions

This paper studied the effects of cellulosic and basic flux on the chemical composition, microstructure, formation of inclusions and micro hardness of X42 steel SMAW welds. The commercialized chemical compositions of flux used are: E6010, E8010-P1 and E8018-G, with electrodes of low carbon content. Welding conditions are not constant. The microstructure of the fusion zone for each flux consists mainly of acicular ferrite. It is found that manganese increases in the fusion zones (C, B and A) respectively .The change in mass concentration of manganese is homogeneous through the three points with all the used flux. Regardless of the flux used, the non-metallic inclusions observed are of two types: white and black. The micro-hardness decreasing values were obtained in the fusion zones (C, B and A).

Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices

2003 ◽  
Vol 782 ◽  
Author(s):  
Alireza Modafe ◽  
Nima Ghalichechian ◽  
Benjamin Kleber ◽  
Reza Ghodssi
Keyword(s):  
Dielectric Constant ◽  
Electrical Properties ◽  
Energy Loss ◽  
Leakage Current ◽  
Moisture Absorption ◽  
Breakdown Strength ◽  
Electrical Characterization ◽  
Electrical Energy ◽  
Low K

ABSTRACTElectrical properties and thickness of insulating dielectric films directly affect electrical energy loss and electrical breakdown limit in electric micromachines. A thick, low-k film exhibits low parasitic capacitive effects that help with the reduction of electrical energy loss. The electrical performance can be deteriorated due to degradation of the electrical properties of the insulating dielectric material caused by process, device structure, and moisture. In this paper, we introduce the application of CYCLOTENE, a spin-on, low-k, BCB-based polymer in electric micromachines as insulating layer and interlevel dielectric. A novel approach using interdigitated capacitors for electrical characterization of CYCLOTENE and the effect of moisture absorption is introduced in this paper. The dielectric constant of CYCLOTENE is extracted from two steps of capacitance measurements, giving an average value of 2.49 with a standard deviation of 1.5 %. The dielectric constant increases by 1.2 % after a humidity stress of 85 %RH at 85 °C. The measured I-V characteristics of CYCLOTENE show a dependency of the breakdown strength and leakage current on the geometrical dimensions of the device under test. A breakdown strength of 225 V/μm for 2 μm finger spacing and 320 V/μm for 3 μm finger spacing, and a leakage current of a few to tens of pA are measured. The I-V characteristics degrades drastically after a humidity stress of 85 %RH at 85 °C, showing a breakdown strength of 100 V/μm for 2 μm finger spacing and 180 V/μm for 3 μm finger spacing. Based on the results of this study, it is expected that the electrical efficiency of an electric micromachine is improved using BCB-based polymers with negligible dependency on moisture absorption. On the other hand, the maximum performance that depends on the maximum operating voltage is adversely affected by the degradation of the breakdown voltage after moisture absorption.

Ba0.9 A0.1TiO3 (A = Al and Mg) Powders Synthesized by Solid State Reaction Technique and their Dielectric Properties

2013 ◽  
Vol 747 ◽  
pp. 603-606 ◽  
Author(s):  
Tunchanoke Khongnakhon ◽  
Oratai Jongprateep
Keyword(s):  
Dielectric Constant ◽  
Dielectric Properties ◽  
Chemical Composition ◽  
Solid State ◽  
Barium Titanate ◽  
Solid State Reaction ◽  
Low Density ◽  
Solid State Reaction Technique ◽  
Synthesis Of Barium Titanate

Barium titanate has been a common material for fabrication of capacitors. Synthesis of barium titanate can be achieved by various techniques. These techniques are believed to affect dielectric properties. This research was aimed at synthesizing BaTiO3 and Ba0.9 A0.1TiO3 (A = Al and Mg) powders by solid state reaction technique. Dielectric constant of barium titanate and the ones doped with 10 at% Al and Mg prepared by the solid state reaction technique had dielectric constant ranging from 109 to 280 at 1 MHz. Results from density examination revealed that barium titanate samples prepared by the solid state reaction had low density. This may leads to the decrease of dielectric constant. Results from this study suggested that the decline of the dielectric properties was attributed to chemical composition and density of samples.

Characterization of carbides in M50NiL

1991 ◽  
Vol 49 ◽  
pp. 606-607
Author(s):  
L. S. Lin ◽  
K. P. Gumz ◽  
A. V. Karg ◽  
C. C. Law
Keyword(s):  
Temperature Effects ◽  
Base Composition ◽  
Lattice Parameter ◽  
Control Surface ◽  
Carbide Formation ◽  
Particle Sizes ◽  
Low Carbon ◽  
Fee Structure ◽  
Heat Treated

Carbon and temperature effects on carbide formation in the carburized zone of M50NiL are of great importance because they can be used to control surface properties of bearings. A series of homogeneous alloys (with M50NiL as base composition) containing various levels of carbon in the range of 0.15% to 1.5% (in wt.%) and heat treated at temperatures between 650°C to 1100°C were selected for characterizations. Eleven samples were chosen for carbide characterization and chemical analysis and their identifications are listed in Table 1.Five different carbides consisting of M6C, M2C, M7C3 and M23C6 were found in all eleven samples examined as shown in Table 1. M6C carbides (with least carbon) were found to be the major carbide in low carbon alloys (<0.3% C) and their amounts decreased as the carbon content increased. In sample C (0.3% C), most particles (95%) encountered were M6C carbide with a particle sizes range between 0.05 to 0.25 um. The M6C carbide are enriched in both Mo and Fe and have a fee structure with lattice parameter a=1.105 nm (Figure 1).

Thermomechanical Treatment of a 4340 Ni-Cr-Mo Alloy Steel

1981 ◽  
Vol 39 ◽  
pp. 314-315 ◽  
Author(s):  
M.T. Jahn ◽  
J.C. Yang ◽  
C.M. Wan
Keyword(s):  
Mechanical Property ◽  
Chemical Composition ◽  
Alloy Steel ◽  
Thermomechanical Treatment ◽  
Room Temperature ◽  
Good Combination ◽  
Thermal Treatments ◽  
Low Carbon ◽  
4340 Steel ◽  
Good Improvement

4340 Ni-Cr-Mo alloy steel is widely used due to its good combination of strength and toughness. The mechanical property of 4340 steel can be improved by various thermal treatments. The influence of thermomechanical treatment (TMT) has been studied in a low carbon Ni-Cr-Mo steel having chemical composition closed to 4340 steel. TMT of 4340 steel is rarely examined up to now. In this study we obtain good improvement on the mechanical property of 4340 steel by TMT. The mechanism is explained in terms of TEM microstructures4340 (0.39C-1.81Ni-0.93Cr-0.26Mo) steel was austenitized at 950°C for 30 minutes. The TMTed specimen (T) was obtained by forging the specimen continuously as the temperature of the specimen was decreasing from 950°C to 600°C followed by oil quenching to room temperature. The thickness reduction ratio by forging is 40%. The conventional specimen (C) was obtained by quenching the specimen directly into room temperature oil after austenitized at 950°C for 30 minutes. All quenched specimens (T and C) were then tempered at 450, 500, 550, 600 or 650°C for four hours respectively.

Characterization of machined polystyrene foam

1989 ◽  
Vol 47 ◽  
pp. 372-373
Author(s):  
C. W. Price ◽  
E. F. Lindsey ◽  
R. M. Franks ◽  
M. A. Lane
Keyword(s):  
Surface Finish ◽  
Cell Walls ◽  
Surface Structures ◽  
Efficient Technique ◽  
Low Density ◽  
Polystyrene Foam ◽  
Planar Surfaces ◽  
Machining Characteristics

Diamond-point turning is an efficient technique for machining low-density polystyrene foam, and the surface finish can be substantially improved by grinding. However, both diamond-point turning and grinding tend to tear and fracture cell walls and leave asperities formed by agglomerations of fragmented cell walls. Vibratoming is proving to be an excellent technique to form planar surfaces in polystyrene, and the machining characteristics of vibratoming and diamond-point turning are compared.Our work has demonstrated that proper evaluation of surface structures in low density polystyrene foam requires stereoscopic examinations; tilts of + and − 3 1/2 degrees were used for the stereo pairs. Coating does not seriously distort low-density polystyrene foam. Therefore, the specimens were gold-palladium coated and examined in a Hitachi S-800 FESEM at 5 kV.

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