Heteroepitaxy and Characterization of Low-Dislocation-Density GaN on Periodically Grooved Substrates
Keyword(s):
ABSTRACTWe have developed a new method to prepare low-dislocation-density GaN by using periodically grooved substrates in a conventional MOVPE growth technique. This new approach was demonstrated for GaN grown on periodically grooved α-Al2O3(0001), 6H-SiC(0001)Si and Si(111) substrates. Dislocation densities were 2×107 cm−2 in low-dislocation-density area.
Keyword(s):
2001 ◽
Vol 40
(Part 2, No. 1A/B)
◽
pp. L16-L19
◽
Keyword(s):
2007 ◽
Vol 305
(2)
◽
pp. 340-345
◽
2001 ◽
Vol 188
(2)
◽
pp. 799-802
◽
2011 ◽
Vol 685
◽
pp. 141-146
◽
1978 ◽
Vol 82
(1-2)
◽
pp. 51-70
◽
Keyword(s):
2011 ◽
Vol 20
(03)
◽
pp. 497-504
◽
2011 ◽
Vol 230-232
◽
pp. 154-158
◽