Novel Carbon Source (1,3-Disilabutane) for the Deposition of P-Type a-SiC

2002 ◽  
Vol 715 ◽  
Author(s):  
Shuhei Yagi ◽  
Takashi Okabayashi ◽  
Katsuya Abe ◽  
Akira Yamada ◽  
Makoto Konagai
Keyword(s):  
Carbon Source ◽  
Vapor Deposition ◽  
Energy Gap ◽  
Hydrogenated Amorphous Silicon ◽  
Type A ◽  
Optical Energy Gap ◽  
P Type ◽  
Photochemical Vapor Deposition ◽  
Hydrogenated Amorphous ◽  
Sic Films

AbstractWe proposed a new carbon source, 1,3-disilabutane (H3Si-CH2-SiH2-CH3:1,3-DSB), to grow hydrogenated amorphous silicon carbide (a-SiC:H) films by mercury-sensitized photochemical vapor deposition (photo-CVD). We described preliminary results of undoped and p-type a-SiC films deposited using 1,3-DSB. It was found that the optical energy gap of the films was changed even at very small 1,3-DSB/silane ratios of few percents. P-type doping was carried out by using diborane and we obtained the films with a darkconductivity of 1.3x10-4 S/cm at the optical bandgap of 2.1 eV. In addition, we applied this material for a p-layer of a p-i-n type a-Si based solar cell and we have achieved relatively high conversion efficiency of 9.55%.

Boron doping in a-SiO:H,

2014 ◽  
Vol 92 (7/8) ◽  
pp. 586-588 ◽  
Author(s):  
Y. Kitani ◽  
T. Maeda ◽  
S. Kakimoto ◽  
K. Tanaka ◽  
R. Okumoto ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hole Mobility ◽  
Boron Doping ◽  
Type A ◽  
Dark Conductivity ◽  
Wide Range ◽  
P Type ◽  
Hydrogenated Amorphous ◽  
Silicon Oxygen

Boron-doping characteristics in hydrogenated amorphous silicon–oxygen alloys (a-SiO:H) have been studied in contrast to those in hydrogenated amorphous silicon (a-Si:H). Although the boron-incorporation efficiency shows almost the same value between a-SiO:H and a-Si:H, p-type a-SiO:H (p-a-SiO:H) exhibits lower dark conductivity by one or two orders of magnitude as compared to p-type a-Si:H (p-a-Si:H) in a wide range of doping levels. We have found that p-a-SiO:H exhibits low dark conductivity as compared to p-a-Si:H even when we choose samples showing the same activation energy from a variety of as-deposited and thermally annealed samples. We have concluded from the different Urbach-energy values between high quality intrinsic a-SiO:H and a-Si:H that the origin of low dark conductivity in p-a-SiO:H is due to low hole mobility.

Dangling-Bond Relaxation and Metastability in P-Type Hydrogenated Amorphous Silicon

1995 ◽  
Vol 377 ◽  
Author(s):  
Richard S. Crandall ◽  
Martin W. Carlen ◽  
Klaus Lips ◽  
Yueqin Xu
Keyword(s):  
Elevated Temperature ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Type A ◽  
Dangling Bond ◽  
Dangling Bonds ◽  
Hole Trapping ◽  
P Type ◽  
Hydrogenated Amorphous

ABSTRACTWe discuss the subtle effects involved in observing slow dangling bond relaxation by studying capacitance transients in p-type hydrogenated amorphous silicon (a-Si:H). The data suggest that neutral dangling bonds are reversibly converted into metastable positive charged dangling bonds by hole trapping. These metastable positive dangling bonds reconvert to neutral dangling bonds upon annealing at elevated temperature. The annealing kinetics for this process are the same as those observed for annealing of quenched in conductivity changes in p-type a-Si:H.

Morphological characteristics and optical properties of hydrogenated amorphous silicon thin films

2016 ◽  
Vol 30 (12) ◽  
pp. 1650140
Author(s):  
Haihua Tang ◽  
Shuang Liu ◽  
Xiang Zhou ◽  
Yunfei Liu ◽  
Dejun Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Power Density ◽  
Energy Gap ◽  
Hydrogenated Amorphous Silicon ◽  
Morphological Characteristics ◽  
Rf Power ◽  
Optical Energy Gap ◽  
Reaction Pressure ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon (a-Si:H) thin films were prepared by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique with silane (SiH[Formula: see text] as reactive gas. The influence of process parameters on the morphological characteristics and optical properties of a-Si:H thin films were systematically investigated. When the RF power density was taken as the only variable, it firstly improves the smoothness of the surface with increasing the RF power density below the value of 0.17 W/cm2, and then exhibits an obvious degradation at further power density. The refractive index, extinction coefficient, optical energy gap initially increase and reach a maximum at 0.17 W/cm2, followed by a significant decrease with further RF power density. When the RF power density was taken as the only variable, the surface of a-Si:H thin films become smoother by increasing the reaction pressure in the investigated range (from 50 Pa to 140 Pa), and the refractive index, extinction coefficient, optical energy gap increase with increasing of reaction pressure. The effect of RF power density and the reaction pressure on the morphological characteristics and optical properties of a-Si:H thin films was obtained, contributing to the further studies of the performance and applications of a-Si:H thin films.

Reduction of Si-H2 Bond Content in Hydrogenated Amorphous Silicon Prepared by Mercury-Sensitized Photochemical Vapor Deposition

1990 ◽  
Vol 192 ◽  
Author(s):  
N. Sakuma ◽  
H. Nozaki ◽  
T. Niiyama ◽  
H. Ito
Keyword(s):  
Light Intensity ◽  
Amorphous Silicon ◽  
Hydrogen Content ◽  
Vapor Deposition ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
The Other ◽  
Photochemical Vapor Deposition ◽  
Hydrogenated Amorphous ◽  
Deposition Conditions

ABSTRACTThe ratio of Si-H2 bonds to hydrogen content in hydrogenated amorphous silicon films, prepared by mercury-sensitized photochemical vapor deposition, depends on the deposition conditions, in particular on the distance between the substrate and the light-transparent window.The ratio is reduced from 20 % to 8 % by decreasing the distance from 30 mm to 8 mm. On the other hand, the hydrogen content remains constant at 15 at.%. Decreasing the distance has been found to be almost equivalent to increasing the light intensity, especially 254 nm-light intensity.

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