Large Scale Production of Carbon Nanotube Transistors: A Generic Platform for Chemical Sensors
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AbstractWe report our work on the fabrication of nanotube-based field effect transistors (NTFET). Nanotubes were grown by chemical vapor deposition using various approaches, including a new formulation of nanotube growth catalysts that were directly patterned using UV lithography. We also report NTFETs based on randomly oriented nanotube networks that have a modulation of one. Finally, we report that a systematical and statistical characterization of millions of devices has led to the development of a robust process that may be useful in large scale production of reproducible, nanotube-based FETs, which, in turn, can be used as a generic platform for chemical sensors.
2016 ◽
Vol 852
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pp. 514-519
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2012 ◽
Vol 367
(1)
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pp. 115-119
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2007 ◽
Vol 24
(2)
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pp. 347-349
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2016 ◽
Vol 4
(6)
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pp. 2137-2146
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