Nanocrystalline Germanium and Germanium Carbide Films and Devices

2005 ◽  
Vol 862 ◽  
Author(s):  
Xuejun Niu ◽  
Jeremy Booher ◽  
Vikram L. Dalal
Keyword(s):  
Grain Size ◽  
Plasma Deposition ◽  
Open Circuit ◽  
Image Sensors ◽  
High Hydrogen ◽  
Strong Function ◽  
Germanium Carbide ◽  
Ecr Plasma ◽  
Hydrogen Dilution ◽  
Steel Substrates

AbstractNanocrystalline Ge and its alloys with C are potentially useful materials for solar cells, thin film transistors and image sensors. In this paper, we discuss the growth and properties of these materials using remote, low pressure ECR plasma deposition. The materials and devices were grown from mixtures of germane, methane and hydrogen. It was found that high hydrogen dilutions (>40:1) were needed to crystallize the films. Studies of x-ray spectra revealed that the grains were primarily <220> oriented. The grain size was a strong function of hydrogen dilution and growth temperature. Higher growth temperatures resulted in larger grain size. High hydrogen dilution tended to reduce grain size. These results can be explained by recognizing that excessive amounts of bonded H can inhibit the growth of <220> grain, which is the thermodynamically favorable direction for grain growth. Grain sizes as large as 80 nm were obtained in nc-Ge. Addition of C reduced the crystallinity. Mobility and carrier concentrations in nc-Ge were measured using Hall effect. Mobility values of ˜5cm2/V-sand carrier concentrations of ˜1x1016/cm3were obtained in larger grains. p+nn+ devices were fabricated on stainless steel substrates and compared with similar devices deposited in nc-Si:H. It was found that the voltage decreased and current increased in nc-Ge devices, in comparison with devices in nc-Si:H. Addition of C to Ge devices increased the open circuit voltage and shifted the quantum efficiency to larger photon energies, as expected.

Properties of Substrate-Type a-Sihh Devices Prepared Using ECR Conditions

1996 ◽  
Vol 420 ◽  
Author(s):  
Vikram L. Dalal ◽  
Sanjeev Kaushal ◽  
Robert Girvan ◽  
Levent Sipahi ◽  
Swati Hariasra
Keyword(s):  
Stainless Steel ◽  
Quantum Efficiency ◽  
High Temperatures ◽  
Plasma Deposition ◽  
Type A ◽  
Substrate Type ◽  
Ecr Plasma ◽  
Hydrogen Dilution ◽  
Steel Substrates ◽  
Deposition Techniques

AbstractWe report on the preparation and properties of a-Si:H devices prepared at high temperatures on stainless steel substrates using low pressure ECR plasma deposition techniques. The devices were prepared using either Hydrogen or Helium as the plasma diluent gas. The use of He as the plasma gas led to films having significantly lower H concentration(4–5%) and a lower bandgap than comparable films made using hydrogen dilution. We find that we can make excellent devices, with good fill factors(over 70%) and voltages(over 0.86 V) using either H or He dilution. The use of He led to devices having smaller bandgap, by about 35–40 meV compared to devices made using H dilution. Detailed quantum efficiency measurements show that the hole collection in both types of devices is excellent, and that Urbach energies of tail states in each case is in the range of 43–45 meV.

Properties of Nanocrystalline Germanium-Carbon Films and Devices

2003 ◽  
Vol 762 ◽  
Author(s):  
X.J. Niu ◽  
Vikram L. Dalal ◽  
Max Noack
Keyword(s):  
Crystal Structure ◽  
Plasma Deposition ◽  
Amorphous Material ◽  
Carbon Films ◽  
Open Circuit ◽  
Base Layer ◽  
Photovoltaic Properties ◽  
Ecr Plasma ◽  
Hydrogen Dilution ◽  
N Doping

AbstractNanocrystalline Germanium-Carbon alloys, denoted by nc- (Ge,C):H, are a potentially useful new electronic material whose bandgap can be varied by changing the Ge:C ratios. We have shown previously that nanocrystalline (Ge,C):H films can be grown using remote ECR plasma deposition. In this paper, we report on the crystal structure, electron mobility and some device related properties of these materials. The materials were grown using mixtures of either Germane and methane, with significant hydrogen dilution, or from mixtures of ethylene and germane, also with significant hydrogen dilution. X-ray diffraction measurements indicated a predominantly <111> crystal structure. The grain size was in the range of 10 nm. Raman measurements clearly show the 300 cm-1 Ge peak in the films. Electron Hall mobilities were measured in these films and were found to be in the range of 2.5-3 cm2/V-sec. Proof-of-concept p+nn+ junction devices were fabricated and showed distinct photovoltaic properties. The open circuit voltage was found to be a strong function of the itnerfaces between n+ and n layers, and between p+ and n layers. The use of an amorphous n+/n interface at the back of the improved the device performance significantly. Capacitance measurements indicated that the device behaved according to standard p/n junction theory, with the n- doping in the base layer being in the 1017/cm3 range. Thus, the base layer was not intrinsic, but rather n type, as may be expected for a crystalline as opposed to amorphous material. Quantum efficiency data indicated that as C was added to the material, the edge of the QE curve shifted to higher photon energies, indicating larger bandgaps.

Film and Solar Cell Properties of a-SiC:H Alloys

1992 ◽  
Vol 258 ◽  
Author(s):  
Yuan-Min Li ◽  
A. Catalano ◽  
B.F. Fieselmann
Keyword(s):  
Open Circuit ◽  
The Novel ◽  
High Hydrogen ◽  
Cell Efficiency ◽  
Hydrogen Dilution ◽  
Silicon Carbon ◽  
Degradation Rates ◽  
Cell Stability ◽  
Hydrogenated Amorphous ◽  
Substrate Temperatures

ABSTRACTHydrogenated amorphous silicon-carbon alloys (a-SiC:H) with 1.9–2.0 eV bandgaps have been grown by glow-discharge using methane as the source of carbon with high hydrogen dilution (CH4+H2) at various substrate temperatures. A thickness dependence of the properties of un-doped films is observed. The photo-electronic properties have been much improved in these undoped alloys compared to those of CH4 based films without H-dilution, however the CH4+H2 based boron doped a-SiC:H films show little improvement. Simple p-i-n single junction solar cells using improved wide-gap a-SiC:H Mayers, based on the CH4+H2 recipe and the novel carbon feedstock trisilylmethane (TSM), show high open circuit voltages and high fill factors. The cell stability under illumination has been tested. There is no correlation in degradation rates between the a-SiC:H cell efficiency and the photoconductivity of the corresponding i-layer films.

Grain Growth and Mobility in Nanocrystalline Ge Films

2012 ◽  
Vol 1426 ◽  
pp. 359-364
Author(s):  
Siva Konduri ◽  
Max Noack ◽  
Vikram Dalal
Keyword(s):  
Grain Size ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Deposition Pressure ◽  
High Hydrogen ◽  
Strong Function ◽  
X Ray ◽  
Grain Sizes ◽  
Frequency Plasma ◽  
Hydrogen Mixtures

ABSTRACTIn this paper, we report on deposition and properties of nanocrystalline Ge:H films . The films were grown from germane and hydrogen mixtures using Radio frequency Plasma-enhanced chemical vapor deposition (RF-PECVD) process using ∼45 MHz frequency. The crystallinity of the films was measured using Raman measurements and from x-ray diffraction techniques, it was found that the grain size was a strong function of deposition pressure, temperature and hydrogen/germane ratios. High hydrogen ratios and high powers led to films with smaller grains. Higher pressures and smaller hydrogen/germane ratio led to films with larger grain sizes, as did higher growth temperatures. The mobility of electrons and holes was measured using space charge limited current (SCLC) techniques in n+-n-n+ devices. It was found that nominally undoped films were generally n type with carrier concentrations in the 1E14/cm3 range. Mobility was found to increase with grain size, with 60 nm grains showing mobility in the 2-3 cm2/V-s range.

Properties of a-SiC:H films and solar cells

2000 ◽  
Vol 77 (9) ◽  
pp. 699-704
Author(s):  
R Gharbi ◽  
M Fathallah ◽  
C F Pirri ◽  
E Tresso ◽  
G Crovini ◽  
...  
Keyword(s):  
Solar Cells ◽  
Vapor Deposition ◽  
Open Circuit Voltage ◽  
Energy Gap ◽  
Chemical Vapor ◽  
Open Circuit ◽  
Light Illumination ◽  
High Hydrogen ◽  
Hydrogen Dilution ◽  
Effect Of Light

a-SiC:H samples and solar cells were made by plasma-enhanced chemical vapor deposition (PECVD) using a multichamber deposition system. The effect of light illumination on samples prepared with and without hydrogen dilution was studied. The phototransport properties of the samples prepared with high hydrogen dilution were more stable versus time of illumination than non diluted ones.The samples were inserted as an intrinsic layer in semitransparent solar cells. The performance of solar cells depends on the energy gap and thickness of the intrinsic layer. High hydrogen dilution may increase the energy gap and act to decrease the structure uniformity. The results show that open circuit voltage Voc decreases with light illumination and depends on the doped p+ layer quality and created defects in the intrinsic layer. PACS Nos.: 70, 72, 40

Microstructural Defects of Device Quality Hot-Wire Cvd Poly-Silicon Films

1999 ◽  
Vol 557 ◽  
Author(s):  
J.K. Rath ◽  
F.D. Tichelaar ◽  
R.E.I. Schropp
Keyword(s):  
Volume Fraction ◽  
Nucleation Density ◽  
Hot Wire ◽  
Compact Structure ◽  
High Oxygen Content ◽  
High Hydrogen ◽  
Hydrogen Dilution ◽  
Si Films ◽  
Spherical Voids ◽  
Steel Substrates

AbstractTwo types of poly-Si:H thin films made by Hot Wire CVD have been evaluated with respect to utilisation in solar cells. Poly-Si:H films made at high hydrogen dilution are highly porous and have large interconnected voids. The void density is 25000/μm-3 as determined by XTEM. On the other hand, poly-Si:H layers made at low hydrogen dilution have a compact structure and a much smaller density of voids. In these films, two types of voids exist: globular voids smaller than 15 nm, and elongated voids, often located between columns of large crystals of 150-250 nm wide at the top. The density for the 5 - 15 nm spherical voids is usually -50/μm3, but larger concentrations often occur locally, up to 1000/pm3, i.e., 0.05% volume fraction. High oxygen content in the poly-Si films made at high hydrogen dilution is largely due to post deposition intrusion of water vapour through the interconnected voids. Profiled layers are made by depositing device quality poly-Si:H layers (low hydrogen dilution) on top of a seed layer (high hydrogen dilution) of high nucleation density. Cells incorporating profiled poly-Si:H films as i-layers at a deposition rate of 0.5 nm/s were made on stainless steel substrates in the configuration SS/n-μc-Si:H(PECVD)/i-poly-Si:H(HWCVD)/p-μc-Si:H(PECVD)/ITO. For our n-i-p solar cell with poly-Si i-layer we obtained an efficiency of 4.41% and a FF of 0.607. Due to native surface texture a current density of 19.95 mA/cm2 is generated in only ~1.22 μm thick i-layer without back reflector.

Recombination in n-i-p (Substrate) a-Si:H Solar Cells with Silicon Carbide and Protocrystalline p-Layers

2003 ◽  
Vol 762 ◽  
Author(s):  
V. Vlahos ◽  
J. Deng ◽  
J.M. Pearce ◽  
R.J. Koval ◽  
G.M. Ferreira ◽  
...  
Keyword(s):  
Solar Cells ◽  
Forward Bias ◽  
Open Circuit ◽  
High Hydrogen ◽  
Beneficial Effects ◽  
Hydrogen Dilution ◽  
Cell Structures ◽  
Current Characteristics ◽  
Hydrogenated Amorphous

AbstractA study was carried out on hydrogenated amorphous silicon (a-Si:H) n-i-p (substrate) solar cell structures with p-a-SiC:H and highly diluted p-Si:H layers grown with different dilution ratios R=[H2]/[SiH4]. The contributions of the recombination at the p/i interfaces to the forward bias dark current characteristics were identified and quantified for the different cell structures. In both cell structures the role of the p/i interfaces was identified and it is found that the lowest p/i interface recombination is obtained with protocrystalline p-Si:H layers having no microcrystalline component. The results with p-Si:H layers are attributed not only to their properties but also to the subsurface modification of the intrinsic layer. Evidence is also presented that points to the beneficial effects of the high hydrogen dilution and power used in the deposition of these p-layers in creating the p/i interface regions. The limitations on 1 sun open circuit voltage (VOC) imposed by the p/i recombination present in all the cell structures is consistent with the mechanisms proposed by Deng et al.[1]. The results presented here also point to why the 1 sun VOC in protocrystalline p-Si:H solar cells is higher than that in p-a-SiC:H cells.

Defect Densities, Diffusion Lengths and Device Physics in Nanocrystalline Si:H Solar Cells

2004 ◽  
Vol 808 ◽  
Author(s):  
Vikram L. Dalal ◽  
Puneet Sharma ◽  
David Staab ◽  
Max Noack ◽  
Keqin Han
Keyword(s):  
Solar Cells ◽  
Quantum Efficiency ◽  
Diffusion Length ◽  
Deep Level ◽  
Plasma Deposition ◽  
Solar Spectrum ◽  
Base Layer ◽  
Degree Of Crystallinity ◽  
High Hydrogen ◽  
Ecr Plasma

ABSTRACTWe report on the properties of nanocrystalline Si:H solar cells. The solar cells were of the p+nn+ type, with the n+ layer deposited first on a stainless steel substrates. The solar cells were prepared under high hydrogen dilution conditions using either ECR plasma deposition, or VHF diode plasma deposition processes. The deposition pressures were kept low, 5 mTorr in the ECR reactor and 50 mTorr in the VHF reactor. All the solar cells reported showed a high Raman ratio of crystalline to amorphous peaks. Properties such as dark current, deep level defects and shallow doping densities, and hole diffusion lengths were measured in these cells. It was found that the base layer was always n type, but that its doping could be changed by adding ppm levels of B during growth. A sufficient B doping even type converted the base layer to p type. It was found that there was a good one-to-one correlation between the shallow doping and deep level defects, suggesting that the same element, probably oxygen, is responsible for generating both shallow dopants and deep levels. The diffusion length of holes was measured in these cells using quantum efficiency vs. voltage techniques, and it was found that the diffusion length data could be explained very well by invoking trap-controlled recombination statistics. The dark I(V) curves could be represented by a standard diode model for highly crystalline materials, but as the degree of crystallinity was reduced, the diode factor increased. Voltage could be improved by reducing the crystallinity of the layer, but doing so resulted in a decrease in quantum efficiency in the infrared regions of the solar spectrum.

Microcrystalline (Si,Ge):H Solar Cells

2003 ◽  
Vol 762 ◽  
Author(s):  
Jianhua Zhu ◽  
Vikram L. Dalal
Keyword(s):  
Solar Cells ◽  
Buffer Layer ◽  
Quantum Efficiency ◽  
Fill Factor ◽  
Open Circuit Voltage ◽  
Defect Density ◽  
Cell Structure ◽  
Open Circuit ◽  
Base Layer ◽  
Ecr Plasma

AbstractWe report on the growth and properties of microcrystalline Si:H and (Si,Ge):H solar cells on stainless steel substrates. The solar cells were grown using a remote, low pressure ECR plasma system. In order to crystallize (Si,Ge), much higher hydrogen dilution (∼40:1) had to be used compared to the case for mc-Si:H, where a dilution of 10:1 was adequate for crystallization. The solar cell structure was of the p+nn+ type, with light entering the p+ layer. It was found that it was advantageous to use a thin a-Si:H buffer layer at the back of the cells in order to reduce shunt density and improve the performance of the cells. A graded gap buffer layer was used at the p+n interface so as to improve the open-circuit voltage and fill factor. The open circuit voltage and fill factor decreased as the Ge content increased. Quantum efficiency measurements indicated that the device was indeed microcrystalline and followed the absorption characteristics of crystalline ( Si,Ge). As the Ge content increased, quantum efficiency in the infrared increased. X-ray measurements of films indicated grain sizes of ∼ 10nm. EDAX measurements were used to measure the Ge content in the films and devices. Capacitance measurements at low frequencies ( ~100 Hz and 1 kHz) indicated that the base layer was indeed behaving as a crystalline material, with classical C(V) curves. The defect density varied between 1x1016 to 2x1017/cm3, with higher defects indicated as the Ge concentration increased.

Hot-Wire CVD Poly-Silicon Films for Thin Film Devices

1998 ◽  
Vol 507 ◽  
Author(s):  
J.K. Rath ◽  
F.D. Tichelaar ◽  
H. Meiling ◽  
R.E.I. Schropp
Keyword(s):  
Defect Density ◽  
Initial Growth ◽  
Oriented Growth ◽  
Compact Structure ◽  
High Hydrogen ◽  
New Approach ◽  
Intrinsic Nature ◽  
Bias Stress ◽  
Hydrogen Dilution ◽  
Long Duration

ABSTRACTSolar cell using profiled poly-Si:H by HWCVD as i-layer in the configuration SS/n-µSi:H(PECVD)/i-poly-Si:H(HWCVD)/p-µc-Si:H(PECVD)/ITO showed 3.7% efficiency. A current of 23.6 mA/cm2 was generated in only 1.5 µm thick poly-Si:H i-layer grown at ∼5Å/s. TFTs made with the poly-Si:H films (grown at ≥ 9Å/s) exhibited remarkable stability to long duration of 23 hours of gate bias stress of ∼lMV/cm. A saturation mobility of 1.5 cm2/Vs for the TFT has been achieved. Films made at low hydrogen dilution (Poly2) showed device quality (purely intrinsic nature, ambipolar diffusion length of 568 nm, only (220) oriented growth and low ESR defect density of <1017/cm3with complete absence of signal due to conduction electrons) but with an incubation phase of amorphous initial growth, whereas the films made at high hydrogen dilution (Polyl) had a polycrystalline initial growth, though with higher defect density, incorporated oxygen and randomly oriented grains. Poly2 films are compact and hydrogen bonding is at compact Si-H sites manifested as 2000 cm−1IR vibration and high temperature hydrogen evolution peak. Exchange interaction of spins and spin pairing are observed while increasing defects in such a compact structure. A new approach has been used to integrate these two regimes of growth to make profiled poly-Si:H layers. The new layers show good electronic properties as well as complete elimination of incubation phase.

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