Investigation of Cell-Sensor Hybrid Structures by Focused Ion Beam (FIB) Technology

2006 ◽  
Vol 983 ◽  
Author(s):  
Andreas Heilmann ◽  
Frank Altmann ◽  
Andreas Cismak ◽  
Werner Baumann ◽  
Mirko Lehmann
Keyword(s):  
Cross Section ◽  
Mammalian Cells ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Nerve Cells ◽  
Cross Sectional ◽  
Dimensional Reconstruction ◽  
The Cross ◽  
Silicon Interface

AbstractFor the investigation of the adhesion of mammalian cells on a semiconductor biosensor structure, nerve cells on silicon neurochips were prepared for scanning electron microscopy investigations (SEM) and cross-sectional preparation by focused ion beam technology (FIB). The cross-sectional pattern demonstrates the focal adhesion points of the nerve cells on the chip. Finally, SEM micrographs were taken parallel to the FIB ablation to investigate the cross section of the cells slice by slice in order to demonstrate the spatial distribution of focal contact positions for a possible three-dimensional reconstruction of the cell-silicon interface.

Automated Diagonal Slice and View Solution for 3D Device Structure Analysis

2018 ◽  
Author(s):  
Sang Hoon Lee ◽  
Jeff Blackwood ◽  
Stacey Stone ◽  
Michael Schmidt ◽  
Mark Williamson ◽  
...  
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Image Data ◽  
Planar Surface ◽  
Device Structure ◽  
Cross Sectional ◽  
Device Structures ◽  
The Cross ◽  
Planar Analysis

Abstract The cross-sectional and planar analysis of current generation 3D device structures can be analyzed using a single Focused Ion Beam (FIB) mill. This is achieved using a diagonal milling technique that exposes a multilayer planar surface as well as the cross-section. this provides image data allowing for an efficient method to monitor the fabrication process and find device design errors. This process saves tremendous sample-to-data time, decreasing it from days to hours while still providing precise defect and structure data.

Site-Specific Low Angle Plasma FIB Milling for Cross-Sectional Electrical Characterization

2019 ◽  
Author(s):  
Chuan Zhang ◽  
Jane Y. Li ◽  
John Aguada ◽  
Howard Marks
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Electrical Characteristic ◽  
Preparation Method ◽  
Ion Beam ◽  
Grazing Angle ◽  
Electrical Characterization ◽  
Sample Preparation Method ◽  
Cross Sectional ◽  
Site Specific

Abstract This paper introduces a novel sample preparation method using plasma focused ion-beam (pFIB) milling at low grazing angle. Efficient and high precision preparation of site-specific cross-sectional samples with minimal alternation of device parameters can be achieved with this method. It offers the capability of acquiring a range of electrical characteristic signals from specific sites on the cross-section of devices, including imaging of junctions, Fins in the FinFETs and electrical probing of interconnect metal traces.

Long waves in a straight channel with non-uniform cross-section

2015 ◽  
Vol 770 ◽  
pp. 156-188 ◽  
Author(s):  
Patricio Winckler ◽  
Philip L.-F. Liu
Keyword(s):  
Boundary Layer ◽  
Wave Propagation ◽  
Cross Section ◽  
Three Dimensional ◽  
Channel Cross Section ◽  
Cross Sectional ◽  
New Model ◽  
One Dimensional ◽  
Uniform Channel ◽  
The Cross

A cross-sectionally averaged one-dimensional long-wave model is developed. Three-dimensional equations of motion for inviscid and incompressible fluid are first integrated over a channel cross-section. To express the resulting one-dimensional equations in terms of the cross-sectional-averaged longitudinal velocity and spanwise-averaged free-surface elevation, the characteristic depth and width of the channel cross-section are assumed to be smaller than the typical wavelength, resulting in Boussinesq-type equations. Viscous effects are also considered. The new model is, therefore, adequate for describing weakly nonlinear and weakly dispersive wave propagation along a non-uniform channel with arbitrary cross-section. More specifically, the new model has the following new properties: (i) the arbitrary channel cross-section can be asymmetric with respect to the direction of wave propagation, (ii) the channel cross-section can change appreciably within a wavelength, (iii) the effects of viscosity inside the bottom boundary layer can be considered, and (iv) the three-dimensional flow features can be recovered from the perturbation solutions. Analytical and numerical examples for uniform channels, channels where the cross-sectional geometry changes slowly and channels where the depth and width variation is appreciable within the wavelength scale are discussed to illustrate the validity and capability of the present model. With the consideration of viscous boundary layer effects, the present theory agrees reasonably well with experimental results presented by Chang et al. (J. Fluid Mech., vol. 95, 1979, pp. 401–414) for converging/diverging channels and those of Liu et al. (Coast. Engng, vol. 53, 2006, pp. 181–190) for a uniform channel with a sloping beach. The numerical results for a solitary wave propagating in a channel where the width variation is appreciable within a wavelength are discussed.

A Direct and Quantitative Three-Dimensional Reconstruction of the Internal Structure of Disordered Mesoporous Carbon with Tailored Pore Size

2013 ◽  
Vol 19 (3) ◽  
pp. 745-750 ◽  
Author(s):  
Juan Balach ◽  
Flavio Soldera ◽  
Diego F. Acevedo ◽  
Frank Mücklich ◽  
César A. Barbero
Keyword(s):  
Pore Size ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Quantitative Characterization ◽  
Resorcinol Formaldehyde ◽  
Dual Beam ◽  
Dimensional Reconstruction ◽  
A New Technique

AbstractA new technique that allows direct three-dimensional (3D) investigations of mesopores in carbon materials and quantitative characterization of their physical properties is reported. Focused ion beam nanotomography (FIB-nt) is performed by a serial sectioning procedure with a dual beam FIB-scanning electron microscopy instrument. Mesoporous carbons (MPCs) with tailored mesopore size are produced by carbonization of resorcinol-formaldehyde gels in the presence of a cationic surfactant as a pore stabilizer. A visual 3D morphology representation of disordered porous carbon is shown. Pore size distribution of MPCs is determined by the FIB-nt technique and nitrogen sorption isotherm methods to compare both results. The obtained MPCs exhibit pore sizes of 4.7, 7.2, and 18.3 nm, and a specific surface area of ca. 560 m2/g.

Three-dimensional structure analysis of melanocytes and keratinocytes in senile lentigo

Microscopy ◽  
2020 ◽  
Author(s):  
Yuki Mizutani ◽  
Mika Yamashita ◽  
Rie Hashimoto ◽  
Toru Atsugi ◽  
Akemi Ryu ◽  
...  
Keyword(s):  
Electron Micrographs ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Normal Skin ◽  
Three Dimensional ◽  
Dimensional Structure ◽  
Confocal Laser ◽  
Scanning Electron Micrographs ◽  
Large Numbers ◽  
Dimensional Reconstruction

Abstract Senile lentigo or age spots are hyperpigmented macules of skin that commonly develop following long-term exposure to ultraviolet radiation. This condition is caused by accumulation of large numbers of melanosomes (melanin granules) produced by melanocytes within neighboring keratinocytes. However, there is still no consensus regarding the melanosome transfer mechanism in senile lentigo. To date, most pathohistological studies of skin have been two-dimensional and do not provide detailed data on the complex interactions of the melanocyte–keratinocyte network involved in melanosome transfer. We performed a three-dimensional reconstruction of the epidermal microstructure in senile lentigo using three different microscopic modalities to visualize the topological melanocyte–keratinocyte relationship and melanosome distribution. Confocal laser microscopy images showed that melanocyte dendritic processes are more frequently branched and elongated in senile lentigo skin than in normal skin. Serial transmission electron micrographs showed that dendritic processes extend into intercellular spaces between keratinocytes. Focused ion beam-scanning electron micrographs showed that dendritic processes in senile lentigo encircle adjacent keratinocytes and accumulate large numbers of melanosomes. Moreover, melanosomes transferred to keratinocytes are present not only in the supranuclear area but throughout the perinuclear area except on the basal side. The use of these different microscopic methods helped to elucidate the three-dimensional morphology and topology of melanocytes and keratinocytes in senile lentigo. We show that the localization of melanosomes in dendritic processes to the region encircling recipient keratinocytes contributes to efficient melanosome transfer in senile lentigo.

FIB Micro-Pillar Sampling of Si Devices and its 3D Observation

2003 ◽  
Author(s):  
T. Yaguchi ◽  
T. Kamino ◽  
T. Ohnishi ◽  
T. Hashimoto ◽  
K. Umemura ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Sampling Technique ◽  
Scanning Transmission Electron Microscope ◽  
Dark Field ◽  
Limiting Factor ◽  
Sem Images ◽  
Cross Sectional ◽  
Scanning Transmission

Abstract A novel technique for three-dimensional structural and elemental analyses using a dedicated focused ion beam (FIB) and scanning transmission electron microscope (STEM) has been developed. The system employs an FIB-STEM compatible sample holder with sample stage rotation mechanism. A piece of sample (micro sample) is extracted from the area to be characterized by the micro-sampling technique [1-3]. The micro sample is then transferred onto the tip of the stage (needle stage) and bonded by FIB assisted metal deposition. STEM observation of the micro sample is carried out after trimming the sample into a micro-pillar 2-5 micron squared in cross-section and 10 -15 micron in length (micro-pillar sample). High angle annular dark field (HAADF) STEM, bright field STEM and secondary electron microscopy (SEM) images are obtained at 200kV resulting in threedimensional and cross sectional representations of the microsample. The geometry of the sample and the needle stage allows observation of the sample from all directions. The specific site can be located for further FIB milling whenever it is required. Since the operator can choose materials for the needle stage, the geometry of the original specimen is not a limiting factor for quantitative energy dispersive X-ray (EDX) analysis.

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