scholarly journals Ultra-Low-Loss Silicon Waveguides for Heterogeneously Integrated Silicon/III-V Photonics

2018 ◽  
Author(s):  
Minh Tran ◽  
Duanni Huang ◽  
Tin Komljenovic ◽  
Jonathan Peters ◽  
Aditya Malik ◽  
...  
Keyword(s):  
High Performance ◽  
Photonic Devices ◽  
Low Noise ◽  
Integrated Photonics ◽  
Delay Lines ◽  
Low Loss ◽  
Silicon Waveguides ◽  
High Q ◽  
Silicon Waveguide ◽  
Ultra Low Noise

Integrated ultra-low-loss waveguides are highly desired for integrated photonics to enable applications that require long delay lines, high-Q resonators, narrow filters, etc. Here we present an ultra-low-loss silicon waveguide on 500 nm thick SOI platform. Meter-scale delay lines, million-Q resonators and tens of picometer bandwidth grating filters are experimentally demonstrated. We design a low-loss low-reflection taper to seamlessly integrate the ultra-low-loss waveguide with standard heterogeneous Si/III-V integrated photonics platform to allow realization of high-performance photonic devices such as ultra-low-noise lasers and optical gyroscopes.

scholarly journals Ultra-Low-Loss Silicon Waveguides for Heterogeneously Integrated Silicon/III-V Photonics

2018 ◽  
Author(s):  
Minh Tran ◽  
Duanni Huang ◽  
Tin Komljenovic ◽  
Jonathan Peters ◽  
Aditya Malik ◽  
...  
Keyword(s):  
High Performance ◽  
Photonic Devices ◽  
Low Noise ◽  
Integrated Photonics ◽  
Delay Lines ◽  
Low Loss ◽  
Silicon Waveguides ◽  
High Q ◽  
Silicon Waveguide ◽  
Ultra Low Noise

Integrated ultra-low-loss waveguides are highly desired for integrated photonics to enable applications that require long delay lines, high-Q resonators, narrow filters, etc. Here we present an ultra-low-loss silicon waveguide on 500 nm thick SOI platform. Meter-scale delay lines, million-Q resonators and tens of picometer bandwidth grating filters are experimentally demonstrated. We design a low-loss low-reflection taper to seamlessly integrate the ultra-low-loss waveguide with standard heterogeneous Si/III-V integrated photonics platform to allow realization of high-performance photonic devices such as ultra-low-noise lasers and optical gyroscopes.

scholarly journals Ultra-Low-Loss Silicon Waveguides for Heterogeneously Integrated Silicon/III-V Photonics

2018 ◽  
Vol 8 (7) ◽  
pp. 1139 ◽  
Author(s):  
Minh Tran ◽  
Duanni Huang ◽  
Tin Komljenovic ◽  
Jonathan Peters ◽  
Aditya Malik ◽  
...  
Keyword(s):  
High Performance ◽  
Photonic Devices ◽  
Low Noise ◽  
Silicon On Insulator ◽  
Integrated Photonics ◽  
Delay Lines ◽  
Low Loss ◽  
Silicon Waveguides ◽  
Silicon Waveguide ◽  
Ultra Low Noise

Integrated ultra-low-loss waveguides are highly desired for integrated photonics to enable applications that require long delay lines, high-Q resonators, narrow filters, etc. Here, we present an ultra-low-loss silicon waveguide on 500 nm thick Silicon-On-Insulator (SOI) platform. Meter-scale delay lines, million-Q resonators and tens of picometer bandwidth grating filters are experimentally demonstrated. We design a low-loss low-reflection taper to seamlessly integrate the ultra-low-loss waveguide with standard heterogeneous Si/III-V integrated photonics platform to allow realization of high-performance photonic devices such as ultra-low-noise lasers and optical gyroscopes.

scholarly journals A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1071
Author(s):  
Bo Jiang ◽  
Yan Su ◽  
Guowen Liu ◽  
Lemin Zhang ◽  
Fumin Liu
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Resonant Mode ◽  
Low Noise ◽  
Silicon On Insulator ◽  
Q Factor ◽  
Wafer Level ◽  
High Q ◽  
Ring Structures ◽  
Static Performance

Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise.

scholarly journals A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer

Micromachines ◽  
2018 ◽  
Vol 9 (12) ◽  
pp. 675 ◽  
Author(s):  
Xiangyu Li ◽  
Jianping Hu ◽  
Xiaowei Liu
Keyword(s):  
High Performance ◽  
Low Noise ◽  
Electromechanical System ◽  
Digital Interface ◽  
Interface Circuit ◽  
Mems Accelerometer ◽  
High Q ◽  
Front End ◽  
Micro Electromechanical System ◽  
Micro Accelerometer

Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noise of the MEMS accelerometer is decreased by the application of a vacuum-packaged sensitive element. The quantization noise in the baseband of the interface circuit is greatly suppressed by a 4th-order loop shaping. The digital output is attained by the interface circuit based on a low-noise front-end charge-amplifier and a 4th-order Sigma-Delta (ΣΔ) modulator. The stability of high-order ΣΔ was studied by the root locus method. The gain of the integrators was reduced by using the proportional scaling technique. The low-noise front-end detection circuit was proposed with the correlated double sampling (CDS) technique to eliminate the 1/f noise and offset. The digital interface circuit was implemented by 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology. The high-performance digital accelerometer system was implemented by double chip integration and the active interface circuit area was about 3.3 mm × 3.5 mm. The high-Q MEMS accelerometer system consumed 10 mW from a single 5 V supply at a sampling frequency of 250 kHz. The micro-accelerometer system could achieve a third harmonic distortion of −98 dB and an average noise floor in low-frequency range of less than −140 dBV; a resolution of 0.48 μg/Hz1/2 (@300 Hz); a bias stability of 18 μg by the Allen variance program in MATLAB.

scholarly journals A Survey of MMIC Active Filters

Electronics ◽  
2021 ◽  
Vol 10 (14) ◽  
pp. 1680
Author(s):  
Leonardo Pantoli ◽  
Giorgio Leuzzi ◽  
Francois Deborgies ◽  
Petar Jankovic ◽  
Francesco Vitulli
Keyword(s):  
Dynamic Range ◽  
High Dynamic Range ◽  
Low Noise ◽  
Active Filters ◽  
Low Loss ◽  
Practical Applications ◽  
High Q ◽  
The Past ◽  
Potential Applications ◽  
High Dynamic

High-Q filters are a critical component in many systems. However, high-Q filters require very low-loss passive elements that are not compatible with monolithic technology. Therefore, filters are often implemented as off-chip components. Tunable high-Q filters require even larger space and weight, and are usually quite bulky. Active filters have been proposed in the past for a monolithic implementation. However, it is not easy to fulfil such requirements as a high dynamic range, low power consumption, low noise, wide tunability, stability, etc. With this study, we propose a survey of the main solutions presented in the literature, investigating the fulfilment of all or most requirements and their potential applications and feasibility, to be used in practical applications.

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