scholarly journals Super-Resolution Optical Microscopy for Investigations of Defects in Semiconductor Device

2021 ◽  
Author(s):  
Nagendra Prasad Yadav ◽  
Guozhen Hu ◽  
Zhengpeng Yao
Keyword(s):  
Close Agreement ◽  
Semiconductor Device ◽  
Super Resolution ◽  
Resolving Power ◽  
Microscopic Imaging ◽  
Semiconductor Fabrication ◽  
Conventional Microscopy ◽  
Semiconductor Circuits ◽  
Microscopy Techniques ◽  
Better Than

Abstract Ripples scattering of sidewall in pattern devices is efficient and necessary for monitoring the semiconductor fabrication process. As a step towards improving the imaging quality in terms of scattering, an attempt has been made to use our recently reported method called Parametric Indirect Microscopic Imaging (PIMI) for the thin layer of pattern devices. The present study demonstrates that the resolving power of PIMI imaging for the sidewall of the pattern devices is better than that of the conventional microscopy techniques. The better resolving power of the present PIMI technique for imaging the sidewalls paves the (new) way for its industrial application for the inspection of the integrated semiconductor circuits. For the demonstration, PIMI images have been compared with AFM, which are very close agreement.

scholarly journals Super-Resolution Imaging with Graphene

Biosensors ◽  
2021 ◽  
Vol 11 (9) ◽  
pp. 307
Author(s):  
Xiaoxiao Jiang ◽  
Lu Kong ◽  
Yu Ying ◽  
Qiongchan Gu ◽  
Jiangtao Lv ◽  
...  
Keyword(s):  
Optical Imaging ◽  
Near Field ◽  
Super Resolution ◽  
High Resolution Imaging ◽  
The Past ◽  
Working Principle ◽  
Resolution Imaging ◽  
Conventional Microscopy ◽  
Microscopy Techniques ◽  
Research Domain

Super-resolution optical imaging is a consistent research hotspot for promoting studies in nanotechnology and biotechnology due to its capability of overcoming the diffraction limit, which is an intrinsic obstacle in pursuing higher resolution for conventional microscopy techniques. In the past few decades, a great number of techniques in this research domain have been theoretically proposed and experimentally demonstrated. Graphene, a special two-dimensional material, has become the most meritorious candidate and attracted incredible attention in high-resolution imaging domain due to its distinctive properties. In this article, the working principle of graphene-assisted imaging devices is summarized, and recent advances of super-resolution optical imaging based on graphene are reviewed for both near-field and far-field applications.

scholarly journals Nanoscale Spatial Resolution in Far-Field Raman Imaging Using Hyperspectral Unmixing in Combination with Positivity Constrained Super-Resolution

2020 ◽  
Vol 74 (7) ◽  
pp. 780-790
Author(s):  
Dominik J. Winterauer ◽  
Daniel Funes-Hernando ◽  
Jean-Luc Duvail ◽  
Saïd Moussaoui ◽  
Tim Batten ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Spatial Resolution ◽  
Single Channel ◽  
Near Field ◽  
Resolution Enhancement ◽  
Super Resolution ◽  
Resolving Power ◽  
Far Field ◽  
Hyperspectral Unmixing ◽  
Better Than

This work introduces hyper-resolution (HyRes), a numerical approach for spatial resolution enhancement that combines hyperspectral unmixing and super-resolution image restoration (SRIR). HyRes yields a substantial increase in spatial resolution of Raman spectroscopy while simultaneously preserving the undistorted spectral information. The resolving power of this technique is demonstrated on Raman spectroscopic data from a polymer nanowire sample. Here, we demonstrate an achieved resolution of better than 14 nm, a more than eightfold improvement on single-channel image-based SRIR and [Formula: see text] better than regular far-field Raman spectroscopy, and comparable to near-field probing techniques.

scholarly journals X10 Expansion Microscopy Enables 25 nm Resolution on Conventional Microscopes

2017 ◽  
Author(s):  
Sven Truckenbrodt ◽  
Manuel Maidorn ◽  
Dagmar Crzan ◽  
Hanna Wildhagen ◽  
Selda Kabatas ◽  
...  
Keyword(s):  
Cell Cultures ◽  
Imaging Technique ◽  
Super Resolution ◽  
Sample Volume ◽  
Diffraction Limit ◽  
Color Images ◽  
Expansion Factor ◽  
Major Improvement ◽  
Conventional Microscopy ◽  
Better Than

ABSTRACTExpansion microscopy is a recently introduced imaging technique that achieves super-resolution through physically expanding the specimen by ~4x, after embedding into a swellable gel. The resolution attained is, correspondingly, approximately 4-fold better than the diffraction limit, or ~70 nm. This is a major improvement over conventional microscopy, but still lags behind modern STED or STORM setups, whose resolution can reach 20-30 nm. We addressed this issue here by introducing an improved gel recipe that enables an expansion factor of ~10x in each dimension, which corresponds to an expansion of the sample volume by more than 1000-fold. Our protocol, which we termed X10 microscopy, achieves a resolution of 25-30 nm on conventional epifluorescence microscopes. X10 provides multi-color images similar or even superior to those produced with more challenging methods, such as STED, STORM and iterative expansion microscopy (iExM), in both cell cultures and tissues.

Closing the GAP—A 5Å Scanning Microscope

1969 ◽  
Vol 27 ◽  
pp. 6-7
Author(s):  
A. V. Crewe
Keyword(s):  
Normal Form ◽  
The Other ◽  
Resolving Power ◽  
Scanning Microscope ◽  
Conventional Microscope ◽  
Other Hand ◽  
Closing The Gap ◽  
Thermal Sources ◽  
Better Than ◽  
Transmission Microscope

We have become accustomed to differentiating between the scanning microscope and the conventional transmission microscope according to the resolving power which the two instruments offer. The conventional microscope is capable of a point resolution of a few angstroms and line resolutions of periodic objects of about 1Å. On the other hand, the scanning microscope, in its normal form, is not ordinarily capable of a point resolution better than 100Å. Upon examining reasons for the 100Å limitation, it becomes clear that this is based more on tradition than reason, and in particular, it is a condition imposed upon the microscope by adherence to thermal sources of electrons.

Resolution and measurement in the scanning electron microscope

1987 ◽  
Vol 45 ◽  
pp. 534-537 ◽  
Author(s):  
Michael T. Postek
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Engineering Design ◽  
Resolving Power ◽  
Practical Applications ◽  
Instrument Resolution ◽  
Accurate Definition ◽  
Definition Of ◽  
Scanning Electron ◽  
Better Than

The term ultimate resolution or resolving power is the very best performance that can be obtained from a scanning electron microscope (SEM) given the optimum instrumental conditions and sample. However, as it relates to SEM users, the conventional definitions of this figure are ambiguous. The numbers quoted for the resolution of an instrument are not only theoretically derived, but are also verified through the direct measurement of images on micrographs. However, the samples commonly used for this purpose are specifically optimized for the measurement of instrument resolution and are most often not typical of the sample used in practical applications.SEM RESOLUTION. Some instruments resolve better than others either due to engineering design or other reasons. There is no definitively accurate definition of how to quantify instrument resolution and its measurement in the SEM.

scholarly journals ESA’s X-Ray Astronomy Mission, XMM

1990 ◽  
Vol 123 ◽  
pp. 129-140
Author(s):  
B.G. Taylor ◽  
A. Peacock
Keyword(s):  
Resolving Power ◽  
Science Program ◽  
Eccentric Orbit ◽  
Ccd Cameras ◽  
Optical Telescope ◽  
X Ray ◽  
Medium Resolution ◽  
Reflection Gratings ◽  
Better Than

AbstractESA’s X-ray Astronomy Mission, XMM, scheduled for launch in 1998, is the second of four cornerstones of ESA’s long term science program Horizon 2000. Covering the range from about 0.1 to 10 keV, it will provide a high throughput of 5000 cm2 at 7 keV with three independant telescopes, and have a spatial resolution better than 30 arcsec. Broadband spectrophotometry is provided by CCD cameras while reflection gratings provide medium resolution spectroscopy (resolving power of about 400) in the range 0.3–3 keV. Long uninterrupted observations will be made from the 24 hr period, highly eccentric orbit, reaching a sensitivity approaching 10−15 erg cm−2 s−1 in one orbit. A 30 cm UV/optical telescope is bore-sighted with the x-ray telescopes to provide simultaneous optical counterparts to the numerous serendipitous X-ray sources which will be detected during every observation.

scholarly journals Storm-Lite: An Inexpensive Tool to Demonstrate Stochastic Super Resolution Microscopy Techniques in the Classroom

2017 ◽  
Vol 112 (3) ◽  
pp. 464a
Author(s):  
Anthony Wu ◽  
Lark Moreno ◽  
Maxim Prigozhin ◽  
Sharlene Denos
Keyword(s):  
Super Resolution ◽  
Microscopy Techniques ◽  
Super Resolution Microscopy

scholarly journals The biochemical resolving power of fluorescence lifetime imaging

2021 ◽  
Author(s):  
Andrew L. Trinh ◽  
Alessandro Esposito
Keyword(s):  
Fluorescence Lifetime ◽  
Resolving Power ◽  
Fluorescence Lifetime Imaging ◽  
Time Resolved ◽  
Instrument Response Function ◽  
Lifetime Imaging ◽  
Use Of Time ◽  
Single Living Cells ◽  
Microscopy Techniques

AbstractA deeper understanding of spatial resolution in microscopy fostered a technological revolution that is now permitting us to investigate the structure of the cell with nanometer resolution. Although fluorescence microscopy techniques enable scientists to investigate both the structure and biochemistry of the cell, the biochemical resolving power of a microscope is a physical quantity that is not well-defined or studied. To overcome this limitation, we carried out a theoretical investigation of the biochemical resolving power in fluorescence lifetime imaging microscopy, one of the most effective tools to investigate biochemistry in single living cells. With the theoretical analysis of information theory and Monte Carlo simulations, we describe how the ‘biochemical resolving power’ in time-resolved sensing depends on instrument specifications. We unravel common misunderstandings on the role of the instrument response function and provide theoretical insights that have significant practical implications in the design and use of time-resolved instrumentation.

scholarly journals Nanobody Detection of Standard Fluorescent Proteins Enables Multi-Target DNA-PAINT with High Resolution and Minimal Displacement Errors

2018 ◽  
Author(s):  
Shama Sograte-Idrissi ◽  
Nazar Oleksiievets ◽  
Sebastian Isbaner ◽  
Mariana Eggert-Martinez ◽  
Jörg Enderlein ◽  
...  
Keyword(s):  
Fluorescent Proteins ◽  
Super Resolution ◽  
Resolving Power ◽  
Acquisition Time ◽  
Efficient Manner ◽  
Target Dna ◽  
Multiplexed Imaging ◽  
Dna Strands ◽  
Linkage Error ◽  
20 Nm

AbstractDNA-PAINT is a rapidly developing fluorescence super-resolution technique which allows for reaching spatial resolutions below 10 nm. It also enables the imaging of multiple targets in the same sample. However, using DNA-PAINT to observe cellular structures at such resolution remains challenging. Antibodies, which are commonly used for this purpose, lead to a displacement between the target protein and the reporting fluorophore of 20-25 nm, thus limiting the resolving power. Here, we used nanobodies to minimize this linkage error to ~4 nm. We demonstrate multiplexed imaging by using 3 nanobodies, each able to bind to a different family of fluorescent proteins. We couple the nanobodies with single DNA strands via a straight forward and stoichiometric chemical conjugation. Additionally, we built a versatile computer-controlled microfluidic setup to enable multiplexed DNA-PAINT in an efficient manner. As a proof of principle, we labeled and imaged proteins on mitochondria, the Golgi apparatus, and chromatin. We obtained super-resolved images of the 3 targets with 20 nm resolution, and within only 35 minutes acquisition time.

Nanomechanical and Nanotribological Properties of Nano- and Micro-Particle Filled Polymer Composites Used for Dental Restorative Applications

2007 ◽  
Author(s):  
D. Devaprakasam ◽  
P. V. Hatton ◽  
G. Moebus ◽  
B. J. Inkson
Keyword(s):  
Polymer Composites ◽  
Filled Polymer ◽  
Shape Distribution ◽  
Micro Particles ◽  
Reinforced Polymer ◽  
Urethane Dimethacrylate ◽  
Microscopy Techniques ◽  
Dental Restorative ◽  
Friction And Wear Characteristics ◽  
Better Than

The objective of this work is to quantify nanomechanical and nanotribological properties of nano- and micro-particles filled polymer composites used for the dental restorative applications. Nanotribological performances of the two polymer composites with different reinforcing particulates were investigated using advanced microscopy techniques. Both the polymer composites composed of same dimethacrylate based monomeric mixture, Bisphenol-A-glycidyldimethacrylate (Bis-GMA), triethylene glycoldimethacrylate (TEGDMA), urethane dimethacrylate (UDMA), as matrix. It was found that the elastic modulus, hardness, particle size, shape, distribution and agglomeration significantly influence the friction and wear characteristics of the polymer composites. The results show that nanotribological performance of nanoparticle reinforced polymer composites is better than the microparticle reinforced polymer composites.

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