Рентгеновская фотоэлектронная спектроскопия пленок стабилизированного диоксида циркония со встроенными наночастицами Au, сформированными в процессе облучения ионами золота
Keyword(s):
X Ray
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AbstractNanosized films of stabilized zirconia with Au nanoparticles formed by implanting Au ions are studied by X-ray photoelectron spectroscopy and transmission electron microscopy. The effect of irradiation of films with Au ions and postimplantation annealing on the distribution of chemical elements and zirconium- containing ZrO_ x compounds over the depth of the films is studied. Based on the data on the dimensional shift of the Au 4 f photoelectron line, the average value of the nanoparticle size is determined.
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