Структурные и магнитные характеристики однослойных и многослойных наногранулированных пленок Co-Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-, полученных методом твердофазного синтеза
Keyword(s):
AbstractThe results of structural and magnetic investigations of nanogranular Co–Al_2O_3 films formed from Co_3O_4/Al thin-film layered structures upon vacuum annealing are reported. The Co_3O_4/Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a medium consisting of the Ar + O_2 gas mixture and magnetron sputtering of an aluminum target in the pure argon atmosphere. It is shown that such a technique makes it possible to obtain nanogranular Co–Al_2O_3 single- and multilayer thin films with a well-controlled size of magnetic grains and their distribution over the film thickness.
2014 ◽
Vol 43
(1)
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pp. 29-35
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2019 ◽
Vol 1238
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pp. 012051
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Dodecane Sensing with Double Substituted LaCoO3 Nanowires Deposited by Reactive Magnetron Sputtering
2013 ◽
Vol 543
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pp. 192-195
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2016 ◽
Vol 37
(5)
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pp. 407-414
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High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2015 ◽
Vol 19
(2)
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pp. 105-112
Keyword(s):
Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering
2011 ◽
Vol 26
(12)
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pp. 1287-1292
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