Influence of high-temperature annealing on the characteristics of fast electron-irradiated p-n-structures based on neutron doped silicon

The investigation results of the annealing influence (Тann = 300–800 ºС) on the minority charge currier lifetime tP in the n-base of p-n-structures, manufactured on the base of neutron transmutation doped silicon (NTD) КОФ300, irradiated at room temperature by different fluences (F = 1 · 1014 – 3 · 1016 cm–2) of electrons with the energy of Еe = 4 MeV are presented. It is established that at low electron fluences (F = 1 · 1014 cm–2), the annealing of minority charge currier lifetime tP in the n-base of p-n-structures occurs in two stages: the first – 320–400 ºС and the second – 550–650 ºС. At higher electron fluences (F = 5 · 1015–2 · 1016 cm–2), three annealing stages occur: the first – 400–450 ºС, the second – 520–650 ºС and the third – 710–770 ºС. At this, the structure barrier capacitance C dependences on Тann at high electron fluences show the geometry capacitance up to the annealing temperatures Тann = 400 ºС. In the annealing temperature range of Тann = 420–570 ºС, the increase in С with maximum is seen at Тann = 480 ºС and a subsequent decrease in the geometry capacitance is seen in the annealing temperature range of Тann = 600–670 ºС, and then again the increase in С occurs in the annealing temperature range of Тann = 720–770 ºС reaching the С values corresponding to those of the non-irradiated samples in the annealing temperature range of Тann = 770–800 ºС. The analysis of the DLTS-spectra of the investigated structures has allowed establishing the formation in the annealing process of the deep acceptor level ЕС – 0.68 eV at Тann > 400 ºС, the deep donor level ЕС – 0.32 eV in the annealing temperature range of Тann = 420–570 ºС and the deep acceptor level ЕС – 0.53 eV at Тann > 700 ºС, which satisfactorily explains the dependences of t P and С on Тann obtained in this paper.