scholarly journals FINITE ELEMENT SIMULATION OF MEMS PIEZOELECTRIC ENERGY SCAVENGER BASED ON PZT THIN FILM

2019 ◽  
Vol 20 (1) ◽  
pp. 90-99
Author(s):  
Aliza Aini Md Ralib ◽  
Nur Wafa Asyiqin Zulfakher ◽  
Rosminazuin Ab Rahim ◽  
Nor Farahidah Za'bah ◽  
Noor Hazrin Hany Mohamad Hanif
Keyword(s):  
Thin Film ◽  
Energy Harvesting ◽  
Output Voltage ◽  
Energy Harvester ◽  
Maximum Output Power ◽  
Vibration Energy ◽  
Maximum Output ◽  
Vibration Energy Harvesting ◽  
Piezoelectric Energy ◽  
The World

Vibration energy harvesting has been progressively developed in the advancement of technology and widely used by a lot of researchers around the world. There is a very high demand for energy scavenging around the world due to it being cheaper in price, possibly miniaturized within a system, long lasting, and environmentally friendly. The conventional battery is hazardous to the environment and has a shorter operating lifespan. Therefore, ambient vibration energy serves as an alternative that can replace the battery because it can be integrated and compatible to micro-electromechanical systems. This paper presents the design and analysis of a MEMS piezoelectric energy harvester, which is a vibration energy harvesting type. The energy harvester was formed using Lead Zicronate Titanate (PZT-5A) as the piezoelectric thin film, silicon as the substrate layer and structural steel as the electrode layer. The resonance frequency will provide the maximum output power, maximum output voltage and maximum displacement of vibration. The operating mode also plays an important role to generate larger output voltage with less displacement of cantilever. Some designs also have been studied by varying height and length of piezoelectric materials. Hence, this project will demonstrate the simulation of a MEMS piezoelectric device for a low power electronic performance. Simulation results show PZT-5A piezoelectric energy with a length of 31 mm and height of 0.16 mm generates maximum output voltage of 7.435 V and maximum output power of 2.30 mW at the resonance frequency of 40 Hz. ABSTRAK: Penuaian tenaga getaran telah berkembang secara pesat dalam kemajuan teknologi dan telah digunakan secara meluas oleh ramai penyelidik di seluruh dunia. Terdapat permintaan yang sangat tinggi di seluruh dunia terhadap penuaian tenaga kerana harganya yang lebih murah, bersaiz kecil dalam satu sistem, tahan lama dan mesra alam. Manakala, bateri konvensional adalah berbahaya bagi alam sekitar dan mempunyai jangka hayat yang lebih pendek. Oleh itu, getaran tenaga dari persekitaran lebih sesuai sebagai alternatif kepada bateri kerana ia mudah diintegrasikan dan serasi dengan sistem mikroelektromekanikal. Kertas kerja ini  membentangkan reka bentuk dan analisis tenaga piezoelektrik MEMS iaitu salah satu jenis penuaian tenaga getaran. Penuai tenaga ini dibentuk menggunakan Lead Zicronate Titanate (PZT-5A) sebagai lapisan filem tipis piezoelektrik, silikon sebagai lapisan substrat dan keluli struktur sebagai lapisan elektrod. Frekuensi resonans akan memberikan hasil tenaga maksima, voltan tenaga maksima dan getaran jarak maksima. Mod pengendalian juga memainkan peranan penting bagi menghasilkan tenaga yang lebih besar. Reka bentuk yang mempunyai ketinggian dan panjang berlainan juga telah diuji dengan menggunakan bahan piezoelektrik yang sama. Oleh itu, projek ini akan menghasilkan simulasi piezoelektrik MEMS yang sesuai digunakan bagi alat elektronik berkuasa rendah. Hasil simulasi menunjukkan dengan panjang 31 mm dan ketinggian 0.16 mm, piezoelektrik PZT ini menghasilkan voltan maksima sebanyak 7.435 V dan tenaga output maksima 2.30 mW pada frekuensi resonans 40 Hz.

Modelling of Mechanical Nonlinearity in an Electromagnetic Vibration Energy Harvester Using a Forced Duffing Equation

2012 ◽  
Author(s):  
S. D. Moss ◽  
L. A. Vandewater ◽  
S. C. Galea
Keyword(s):  
Output Power ◽  
Energy Harvester ◽  
Duffing Oscillator ◽  
Maximum Output Power ◽  
Vibration Energy ◽  
Maximum Output ◽  
Vibration Energy Harvesting ◽  
Vibration Energy Harvester ◽  
Homotopy Analysis ◽  
Wire Coil

This work reports on the modelling and experimental validation of a bi-axial vibration energy harvesting approach that uses a permanent-magnet/ball-bearing arrangement and a wire-coil transducer. The harvester’s behaviour is modelled using a forced Duffing oscillator, and the primary first order steady state resonant solutions are found using the homotopy analysis method (or HAM). Solutions found are shown to compare well with measured bearing displacements and harvested output power, and are used to predict the wideband frequency response of this type of vibration energy harvester. A prototype harvesting arrangement produced a maximum output power of 12.9 mW from a 12 Hz, 500 milli-g (or 4.9 m/s2) rms excitation.

Broadband Rotational Energy Harvesting Using Micro Energy Harvester

2018 ◽  
Author(s):  
Jui-Ta Chien ◽  
Yung-Hsing Fu ◽  
Chao-Ting Chen ◽  
Shun-Chiu Lin ◽  
Yi-Chung Shu ◽  
...  
Keyword(s):  
Energy Harvesting ◽  
Output Voltage ◽  
Energy Harvester ◽  
Low Frequency ◽  
Rotational Energy ◽  
Open Circuit ◽  
Maximum Output ◽  
Rotational Excitation ◽  
Rotating Speed ◽  
Piezoelectric Energy

This paper proposes a broadband rotational energy harvesting setup by using micro piezoelectric energy harvester (PEH). When driven in different rotating speed, the PEH can output relatively high power which exhibits the phenomenon of frequency up-conversion transforming the low frequency of rotation into the high frequency of resonant vibration. It aims to power self-powered devices used in the applications, like smart tires, smart bearings, and health monitoring sensors on rotational machines. Through the excitation of the rotary magnetic repulsion, the cantilever beam presents periodically damped oscillation. Under the rotational excitation, the maximum output voltage and power of PEH with optimal impedance is 28.2 Vpp and 663 μW, respectively. The output performance of the same energy harvester driven in ordinary vibrational based excitation is compared with rotational oscillation under open circuit condition. The maximum output voltage under 2.5g acceleration level of vibration is 27.54 Vpp while the peak output voltage of 36.5 Vpp in rotational excitation (in 265 rpm).

scholarly journals Experimental Study on Piezoelectric Energy Harvesting from Vortex-Induced Vibrations and Wake-Induced Vibrations

2016 ◽  
Vol 2016 ◽  
pp. 1-7 ◽  
Author(s):  
Min Zhang ◽  
Junlei Wang
Keyword(s):  
Energy Harvesting ◽  
Output Voltage ◽  
Maximum Output Power ◽  
Load Resistance ◽  
Maximum Output ◽  
Piezoelectric Energy ◽  
Vortex Induced Vibrations ◽  
Flow Induced Vibrations ◽  
Generation Capacity ◽  
Output Characteristics

A rigid circular cylinder with two piezoelectric beams attached on has been tested through vortex-induced vibrations (VIV) and wake-induced vibrations (WIV) by installing a big cylinder fixed upstream, in order to study the influence of the different flow-induced vibrations (FIV) types. The VIV test shows that the output voltage increases with the increases of load resistance; an optimal load resistance exists for the maximum output power. The WIV test shows that the vibration of the small cylinder is controlled by the vortex frequency of the large one. There is an optimal gap of the cylinders that can obtain the maximum output voltage and power. For a same energy harvesting device, WIV has higher power generation capacity; then the piezoelectric output characteristics can be effectively improved.

scholarly journals Performance Evaluation of a Piezoelectric Energy Harvester Based on Flag-Flutter

Micromachines ◽  
2020 ◽  
Vol 11 (10) ◽  
pp. 933 ◽  
Author(s):  
Hassan Elahi ◽  
Marco Eugeni ◽  
Federico Fune ◽  
Luca Lampani ◽  
Franco Mastroddi ◽  
...  
Keyword(s):  
Performance Evaluation ◽  
Wind Tunnel ◽  
Energy Harvesting ◽  
Energy Harvester ◽  
Maximum Output Power ◽  
Research Work ◽  
Maximum Output ◽  
Operational Environment ◽  
Subsonic Wind Tunnel ◽  
Piezoelectric Energy

In the last few decades, piezoelectric (PZT) materials have played a vital role in the aerospace industry because of their energy harvesting capability. PZT energy harvesters (PEH) absorb the energy from an operational environment and can transform it into useful energy to drive nano/micro-electronic components. In this research work, a PEH based on the flag-flutter mechanism is presented. This mechanism is based on fluid-structure interaction (FSI). The flag is subjected to the axial airflow in the subsonic wind tunnel. The performance evaluation of the harvester and aeroelastic analysis is investigated numerically and experimentally. A novel solution is presented to extract energy from Limit Cycle Oscillations (LCOs) phenomenon by means of PZT transduction. The PZT patch absorbs the flow-induced structural vibrations and transforms it into electrical energy. Furthermore, the optimal resistance and length of the flag is predicted to maximize the energy harvesting. Different configurations of flag i.e., with Aluminium (Al) patch and PZT patch for flutter mode vibration mode are studied numerically and experimentally. The bifurcation diagram is constructed for the experimental campaign for the flutter instability of a cantilevered flag in subsonic wind-tunnel. Moreover, the flutter boundary conditions are analysed for reduced critical velocity and frequency. The designed PZT energy harvester via flag-flutter mechanism is suitable for energy harvesting in aerospace engineering applications to drive wireless sensors. The maximum output power that can be generated from the designed harvester is 6.72 mW and the optimal resistance is predicted to be 0.33 MΩ.

Energy Harvesting Performance of Vertically Staggered Rectangle-Through-Holes Cantilevered in Piezoelectric Vibration Energy Harvester

2019 ◽  
Author(s):  
Shan Gao ◽  
Hongrui Ao ◽  
Hongyuan Jiang
Keyword(s):  
Energy Harvesting ◽  
Integrated Circuits ◽  
Resonant Frequency ◽  
High Power ◽  
Energy Harvester ◽  
Vibration Energy ◽  
Vibration Energy Harvesting ◽  
Vibration Energy Harvester ◽  
Piezoelectric Energy ◽  
Piezoelectric Vibration

Abstract Piezoelectric vibration energy harvesting technology has attracted significant attention for its applications in integrated circuits, microelectronic devices and wireless sensors due to high power density, easy integration, simple configuration and other outstanding features. Among piezoelectric vibration energy harvesting structures, cantilevered beam is one of the simplest and most commonly used structures. In this work, a vertically staggered rectangle-through-holes (VS-RTH) cantilevered model of mesoscale piezoelectric energy harvester is proposed, which focuses on the multi-directional vibration collection and low resonant frequency. To verify the output performances of the device, this paper employs basic materials and fabrication methods with mathematical modeling. The simulations are conducted through finite element methods to discuss the properties of VS-RTH energy harvester on resonant frequency and output characteristics. Besides, an energy storage circuit with high power collection rate is adopted as collection system. This harvester is beneficial to the further application of devices working with continuous vibrations and low power requirements.

scholarly journals Topology Optimisation for High Frequency Vibration Energy Harvesting

2021 ◽  
Keyword(s):  
Energy Harvesting ◽  
High Frequency ◽  
Energy Harvester ◽  
Spring Steel ◽  
Condition Based Maintenance ◽  
Vibration Energy ◽  
Topology Optimisation ◽  
Vibration Energy Harvesting ◽  
Piezoelectric Energy ◽  
Maintenance Systems

Abstract. Topology optimisation has been used to design a piezoelectric energy harvester capable of harvesting the vibration present on a helicopter gearbox. The gearbox vibrations, with frequencies in the kilo-hertz range and having amplitudes of 10-100g (where g = 9.81 m/s2), are generated by gear-meshing within the transmission. These accelerations, large in amplitude and high in frequency, are ideal sources for vibration energy harvesting, with the harvested power potentially used to power autonomous condition-based-maintenance systems. This paper will discuss the first and simplest of the harvesters that were designed and manufactured, i.e. a 0.51 mm thick spring steel cantilever that uses a Pz27 piezoceramic transducer, which is sensitive to 1900 Hz gearbox vibrations and can produce 300 µW from a 2g host acceleration.

A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

2013 ◽  
Vol 562-565 ◽  
pp. 1052-1057 ◽  
Author(s):  
Xing Qiang Zhao ◽  
Zhi Yu Wen ◽  
Li Cheng Deng ◽  
Guo Xi Luo ◽  
Zheng Guo Shang ◽  
...  
Keyword(s):  
Energy Harvesting ◽  
Resonance Frequency ◽  
Cantilever Beam ◽  
Maximum Output Power ◽  
Vibration Energy ◽  
Cmos Process ◽  
Maximum Output ◽  
Vibration Energy Harvesting ◽  
Beam Array ◽  
Piezoelectric Cantilever

A micro piezoelectric cantilever beam array is designed for vibration energy harvesting. A single degree of freedom analytical model is developed to predict the properties of the device and is verified by finite element method. The piezoelectric material Aluminum Nitride was chosen for the compatibility with the CMOS process. The devices consisting of 5 piezoelectric cantilever beams and one proof mass were fabricated using micromachining technology. The resonance frequency, voltage and power were tested at excitation acceleration of 5.0 g. The maximum output power of the device is 9.13 μW at the resonance frequency of 1315 Hz when piezoelectric beams are connected in parallel.

The benefits of a magnetically coupled asymmetric monostable dual-cantilever energy harvester under random excitation

2019 ◽  
Vol 30 (20) ◽  
pp. 3136-3145 ◽  
Author(s):  
Zhengqiu Xie ◽  
Shengxi Zhou ◽  
Jitao Xiong ◽  
Wenbin Huang
Keyword(s):  
Energy Harvesting ◽  
Cantilever Beam ◽  
Energy Harvester ◽  
Mechanical Strain ◽  
Magnetic Coupling ◽  
Random Excitation ◽  
Superior Performance ◽  
Vibration Energy ◽  
Vibration Energy Harvesting ◽  
Piezoelectric Energy

Piezoelectric vibration energy harvesting is a promising technique to power wireless sensor networks. This article originally presents a magnetically coupled asymmetric monostable dual-cantilever piezoelectric energy harvester consisting of a generating piezoelectric cantilever beam and an auxiliary cantilever beam. Theoretical and experimental results both verify that the asymmetric harvester has the superior performance compared with the conventional magnetically coupled symmetric bistable dual-cantilever piezoelectric energy harvester, yielding higher voltage output under different magnetic coupling intensities and different power densities of the band-limited Gaussian white noise random excitation. More importantly, the mechanical strain of the asymmetric harvester is much smaller than that of the symmetric harvester, being lower than half of the latter one under strong magnetic coupling. Therefore, due to its higher energy conversion efficiency and better durability, the proposed asymmetric harvester is beneficial for practical environment vibration energy harvesting.

Research on Resonant Frequency and Output Power of Piezoelectric Energy-Harvesting Micro-Device

2013 ◽  
Author(s):  
Yu-ji Gao ◽  
Yong-gang Leng ◽  
Lin-chen Shen ◽  
Yan Guo
Keyword(s):  
Energy Harvesting ◽  
Resonant Frequency ◽  
Output Power ◽  
Cross Section ◽  
Energy Harvester ◽  
Maximum Output Power ◽  
Vibration Energy ◽  
Maximum Output ◽  
Section Shape ◽  
To Receive

A vibration energy harvester is typically composed of a spring–mass system, with the advantage of high energy density, simple structure and easily being miniaturized. Recently, effects of cantilever beam’s structural parameters and cross-section shape on energy-harvesting micro-device is concerned and investigated in this paper, so as to study its performance of energy harvesting to meet the needs of low resonant frequency and maximum output power. The effect of a cantilever beam’s structure dimensions as well as quality of the mass on the device’s resonance frequency and maximum output power can be detected through formula computing. Further study on effect of a cantilever beam’s cross-section shape has also been worked out. According to the simulation experimental results gained from ANSYS with appropriate parameters defined by theoretical derivation, we manage to receive concordant conclusions. To receive a better performance of the energy harvester, we should choose a shorter, wider and thicker cantilever beam with rectangular cross-section and heavier mass at its end. However, to meet the requirement of low resonant frequency for piezoelectric vibration energy harvesting, we still need to define either an upper or a lower limit while choosing parameters of the device.

Modeling and experiment of vibro-impact vibration energy harvester based on a partial interlayer-separated piezoelectric beam

2020 ◽  
pp. 1045389X2096605
Author(s):  
Dong-Xing Cao ◽  
Wei Xia ◽  
Xiang-Ying Guo ◽  
Siu-Kai Lai
Keyword(s):  
Energy Harvesting ◽  
Energy Harvester ◽  
Maximum Output Power ◽  
Electric Energy ◽  
Beam Theory ◽  
Vibration Energy ◽  
Maximum Output ◽  
Vibration Energy Harvester ◽  
Voltage Output ◽  
Piezoelectric Beam

Piezoelectric-based energy harvesting techniques offer a promising way to transform vibration energy into electric energy. However, many vibration energy harvesters (VEH) can only work under narrow bandwidths and limited high frequencies to restrict their working performance. In this paper, a vibro-impact piezoelectric VEH is proposed, where a partial interlayer-separated piezoelectric beam is designed to improve the voltage output and frequency bandwidth of the VEH. First, the mechanism of the proposed VEH is introduced and the electromechanical model is derived based on the Euler-Bernoulli beam theory and vibro-impact dynamic model. Voltage-frequency responses are then obtained by using an approximate analytical method. In addition, the effect of partial interlayer-separated piezoelectric beams on the energy harvesting performance is investigated numerically. A parametric study is performed to investigate the influence of system parameters on the voltage output in terms of bandwidth and magnitude. Finally, the theoretical solutions are validated by experimental results, the voltage output of the proposed VEH is higher than the non-impact type. The maximum output power of the proposed VEH is about 12 times more than that of the conventional one under a 0.2 g acceleration. Due to the good agreement of the variation trend between the theoretical values and experiment results, the proposed partial interlayer-separated beam VEH can be used for a further optimization of the vibration energy harvester.

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