scholarly journals Indium Tin Oxide Thin Film Deposition by Magnetron Sputtering at Room Temperature for the Manufacturing of Efficient Transparent Heaters

Coatings ◽  
2021 ◽  
Vol 11 (1) ◽  
pp. 92
Author(s):  
Jago Txintxurreta ◽  
Eva G-Berasategui ◽  
Rocío Ortiz ◽  
Oihane Hernández ◽  
Lucía Mendizábal ◽  
...  

Indium tin oxide (ITO) thin films are widely used as transparent electrodes in electronic devices. Many of those electronic devices are heat sensitive, thus their manufacturing process steps should not exceed 100 °C. Manufacturing competitive high-quality ITO films at low temperature at industrial scale is still a challenge. Magnetron sputtering technology is the most suitable technology fulfilling those requirements. However, ITO layer properties and the reproducibility of the process are extremely sensitive to process parameters. Here, morphological, structural, electrical, and optical characterization of the ITO layers deposited at low temperature has been successfully correlated to magnetron sputtering process parameters. It has been demonstrated that the oxygen flow controls and influences layer properties. For oxygen flow between 3–4 sccm, high quality crystalline layers were obtained with excellent optoelectronic properties (resistivity <8 × 10−4 Ω·cm and visible transmittance >80%). The optimized conditions were applied to successfully manufacture transparent ITO heaters on large area glass and polymeric components. When a low supply voltage (8 V) was applied to transparent heaters (THs), de-icing of the surface was produced in less than 2 min, showing uniform thermal distribution. In addition, both THs (glass and polycarbonate) showed a great stability when exposed to saline solution.

2021 ◽  
Author(s):  
Longfei Song ◽  
Tony Schenk ◽  
Emmanuel Defay ◽  
Sebastjan Glinsek

Highly conductive (conductivity 620 S cm−1) and transparent ITO thin films are achieved at low temperature (350 °C) through effective combustion solution processing via multistep coating. The properties show potential for next generation flexible and transparent electronics.


2015 ◽  
Vol 3 (43) ◽  
pp. 11464-11470 ◽  
Author(s):  
Zheng Chen ◽  
Xichao Qin ◽  
Teng Zhou ◽  
Xinzhou Wu ◽  
Shuangshuang Shao ◽  
...  

ITO inks are synthesized by the addition of different concentrations of ethanolamine in reactions for low resistivity high quality films, cooperating with a water washing in film preparation.


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