scholarly journals 3D Printed MEMS Technology—Recent Developments and Applications

Micromachines ◽  
2020 ◽  
Vol 11 (4) ◽  
pp. 434 ◽  
Author(s):  
Tomasz Blachowicz ◽  
Andrea Ehrmann

Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elements serve as sensors or actuators, e.g., in recent mobile phones, but also in future autonomously driving cars. Most MEMS elements are based on silicon, which is not deformed plastically under a load, as opposed to metals. While highly sophisticated solutions were already found for diverse MEMS sensors, actuators, and other elements, MEMS fabrication is less standardized than pure microelectronics, which sometimes blocks new ideas. One of the possibilities to overcome this problem may be the 3D printing approach. While most 3D printing technologies do not offer sufficient resolution for MEMS production, and many of the common 3D printing materials cannot be used for this application, there are still niches in which the 3D printing of MEMS enables producing new structures and thus creating elements for new applications, or the faster and less expensive production of common systems. Here, we give an overview of the most recent developments and applications in 3D printing of MEMS.

2019 ◽  
Vol 2 (2) ◽  
pp. 175-197 ◽  
Author(s):  
Sanjay Kumar ◽  
Pulak Bhushan ◽  
Mohit Pandey ◽  
Shantanu Bhattacharya

The recent success of additive manufacturing processes (also called, 3D printing) in the manufacturing sector has led to a shift in the focus from simple prototyping to real production-grade technology. The enhanced capabilities of 3D printing processes to build intricate geometric shapes with high precision and resolution have led to their increased use in fabrication of microelectromechanical systems (MEMS). The 3D printing technology has offered tremendous flexibility to users for fabricating custom-built components. Over the past few decades, different types of 3D printing technologies have been developed. This article provides a comprehensive review of the recent developments and significant achievements in most widely used 3D printing technologies for MEMS fabrication, their working methodology, advantages, limitations, and potential applications. Furthermore, some of the emerging hybrid 3D printing technologies are discussed, and the current challenges associated with the 3D printing processes are addressed. Finally, future directions for process improvements in 3D printing techniques are presented.


2014 ◽  
Vol 20 (5) ◽  
pp. 403-412 ◽  
Author(s):  
Victor A. Lifton ◽  
Gregory Lifton ◽  
Steve Simon

Purpose – This study aims to investigate the options for additive rapid prototyping methods in microelectromechanical systems (MEMS) technology. Additive rapid prototyping technologies, such as stereolithography (SLA), fused deposition modeling (FDM) and selective laser sintering (SLS), all commonly known as three-dimensional (3D) printing methods, are reviewed and compared with the resolution requirements of the traditional MEMS fabrication methods. Design/methodology/approach – In the 3D print approach, the entire assembly, parts and prototypes are built using various plastic and metal materials directly from the software file input, completely bypassing any additional processing steps. The review highlights their potential place in the overall process flow to reduce the complexity of traditional microfabrication and long processing cycles needed to test multiple prototypes before the final design is set. Findings – Additive manufacturing (AM) is a promising manufacturing technique in micro-device technology. Practical implications – In the current state of 3D printing, microfluidic and lab-on-a-chip devices for fluid handling and manipulation appear to be the most compatible with the 3D print methods, given their fairly coarse minimum feature size of 50-500 μm. Future directions in the 3D materials and method development are identified, such as adhesion and material compatibility studies of the 3D print materials, wafer-level printing and conductive materials development. One of the most important goals should be the drive toward finer resolution and layer thickness (1-10 μm) to stimulate the use of the 3D printing in a wider array of MEMS devices. Originality/value – The review combines two discrete disciplines, microfabrication and AM, and shows how microfabrication and micro-device commercialization may benefit from employing methods developed by the AM community.


2021 ◽  
Vol 2021 ◽  
pp. 1-11
Author(s):  
Dahua Zhang ◽  
Xiang Zhang

More and more people pay attention to the printing speed and quality of 3D printing tools. In order to understand whether the 3D printing rehabilitation brace can play a role in the treatment and repair of joint trauma, we used 3D printing technology to print the rehabilitation brace and compared with the traditional rehabilitation brace. The printed parts were analyzed in detail. The experimental results prove that the rehabilitation braces made by the two methods can play a role in the repair of joint trauma. However, 3D printed rehabilitation braces can better meet the needs of patients with detailed patient data in application. The braces are more suitable, and their production speed is about 35% faster than traditional methods. Through the survey of patients and doctors, it is found that the satisfaction of patients and doctors with printed braces is above 89%, while the satisfaction with traditionally made braces is only about 60%. This shows that the rehabilitation brace based on the Internet of Things 3D printing technology has a more significant role in the treatment and repair of joint trauma, and the effect is better.


Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 784
Author(s):  
Matthias Kahr ◽  
Harald Steiner ◽  
Wilfried Hortschitz ◽  
Michael Stifter ◽  
Andreas Kainz ◽  
...  

This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.


Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1257
Author(s):  
Haoran Wang ◽  
Yifei Ma ◽  
Qincheng Zheng ◽  
Ke Cao ◽  
Yao Lu ◽  
...  

Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.


Author(s):  
Hamidreza Mosleh ◽  
Shahab Aldin Nazeri ◽  
Mehdi Mehdizadeh ◽  
Fatemeh Moradi ◽  
Hoda Mosleh ◽  
...  

Background: Recent developments in 3D printing have gave orthopedic surgeons among a novel technology that has the ability to revolutionize preoperative planning. The appearance of 3D printing technology (3DPT) enables the digital preoperative plan & simulation to move from the virtual phase to the reality phase. Numerous fields of medicine are lately benefiting from the operate of 3D printing, including the arising part of 3D printing in orthopedic surgery. Methods: We searched on PubMed and Google Scholar databases in January 2020 to find papers and studies about using 3D printing in orthopedy for aim of preplanning. The key words for search were (“3D printing” OR “3D-printed Model” OR “three-dimensional Printer”) AND (“Orthopedy” OR “Orthopedics” OR “Orthopedics”) AND (“Surgery” OR “Operation”) AND (“Pre-planning” OR “Plan”) AND (“Fracture” OR “Trauma”) that we used compound. We exclude the papers which their titles or abstracts were not relevant. At last, we select the most related papers to use in this article. Results: The search on PubMed found 80 Papers and on Google Scholar found 104 papers. After excluding similar and unrelated papers, 44 papers were selected for this review article. Conclusion: Almost all studies have shown us that using a 3D model can have a very positive effect on the surgical process and its outcomes, as well as patient and surgeon satisfaction. Therefore, we anticipate that this technology will be used in many orthopedic surgeries in the near future.


Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 85 ◽  
Author(s):  
Zhen Qiu ◽  
Wibool Piyawattanametha

Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail.


Author(s):  
D. De Luca ◽  
M. Del Giudice ◽  
N. Grasso ◽  
F. Matrone ◽  
A. Osello ◽  
...  

<p><strong>Abstract.</strong> The latest technologies in the field of geomatics and additive manufacturing can provide a significant support to the restoration and conservation activities of Cultural Heritage (CH). In particular, the recent developments for both the 3D scanning techniques and the 3D printing systems are able to speed up the survey and the reconstruction of historical fragments gone lost. This research compares different meshes, obtained with different instruments and techniques, in particular a medium and a short-range volumetric handheld camera, with the aim of evaluating the best solution for the 3D printing and provide some guidelines for this kind of operation. Therefore, the focus is mainly on identifying the most effective solution to describe, represent and subsequently model small architectural details in the most automatic way, in order to step from the survey to the final printed result in the shortest time possible. Moreover, an attempt to integrate and complete not only sculptural details, by now well stated in the state of art, but also architectural elements, respecting the principles of reversibility and material recognisability typical of the modern restoration theories, has been done. The case study examined is an historical wooden gilded door with the lack of some decorative parts, in a church in the centre of Turin (Italy), symbol of the baroque architecture and damaged by a fire occurred during the Second World War.</p>


Author(s):  
Michael A. Luzuriaga ◽  
Danielle R. Berry ◽  
John C. Reagan ◽  
Ronald A. Smaldone ◽  
Jeremiah J. Gassensmith

Biodegradable polymer microneedle (MN) arrays are an emerging class of transdermal drug delivery devices that promise a painless and sanitary alternative to syringes; however, prototyping bespoke needle architectures is expensive and requires production of new master templates. Here, we present a new microfabrication technique for MNs using fused deposition modeling (FDM) 3D printing using polylactic acid, an FDA approved, renewable, biodegradable, thermoplastic material. We show how this natural degradability can be exploited to overcome a key challenge of FDM 3D printing, in particular the low resolution of these printers. We improved the feature size of the printed parts significantly by developing a post fabrication chemical etching protocol, which allowed us to access tip sizes as small as 1 μm. With 3D modeling software, various MN shapes were designed and printed rapidly with custom needle density, length, and shape. Scanning electron microscopy confirmed that our method resulted in needle tip sizes in the range of 1 – 55 µm, which could successfully penetrate and break off into porcine skin. We have also shown that these MNs have comparable mechanical strengths to currently fabricated MNs and we further demonstrated how the swellability of PLA can be exploited to load small molecule drugs and how its degradability in skin can release those small molecules over time.


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