Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA

In the present work, a micro-electro-mechanical system (MEMS)-based electrostatic micromotor is designed and fabricated. Finite element analysis is done and various parameters affecting the torque are studied. Maximum torque is achieved at 120° phase angle. The effect of change in voltage, micromotor height and frequency is analysed and discussed. UV-SLIGA, a microfabrication technique, is used for the fabrication of electrostatic micromotor of height 30µm and higher. UV lithography is conducted by both positive AZ P4620 and negative (SU-8 10 and SU-8 2150) photoresists. Copper (Cu) is used as a sacrificial layer to release the rotor (the movable part) of the electrostatic micromotor. Electroformed nickel (Ni) is used for making stator, rotor and axle, whereas chromium (Cr) is used as a seed layer. The micromotor is fabricated with a stator-rotor pole having configuration ratio of 3:2. The gap between the rotor and axle is 20 µm. Wet chemical etching is used to etch the deposited metal layers (Cr, Ni and Cu). Challenges such as the adhesion between the photoresist mould and substrate, cracks, seepage and misalignment are faced during the microfabrication. These challenges are overcome by optimizing the various parameters. The fabrication of electrostatic micromotor is done successfully and the results are discussed in the article.

A Universal Atomic Substitution Conversion Strategy Towards Synthesis of Large-Size Ultrathin Nonlayered Two-Dimensional Materials

Nonlayered two-dimensional (2D) materials have attracted increasing attention, due to novel physical properties, unique surface structure, and high compatibility with microfabrication technique. However, owing to the inherent strong covalent bonds, the direct synthesis of 2D planar structure from nonlayered materials, especially for the realization of large-size ultrathin 2D nonlayered materials, is still a huge challenge. Here, a general atomic substitution conversion strategy is proposed to synthesize large-size, ultrathin nonlayered 2D materials. Taking nonlayered CdS as a typical example, large-size ultrathin nonlayered CdS single-crystalline flakes are successfully achieved via a facile low-temperature chemical sulfurization method, where pre-grown layered CdI2 flakes are employed as the precursor via a simple hot plate assisted vertical vapor deposition method. The size and thickness of CdS flakes can be controlled by the CdI2 precursor. The growth mechanism is ascribed to the chemical substitution reaction from I to S atoms between CdI2 and CdS, which has been evidenced by experiments and theoretical calculations. The atomic substitution conversion strategy demonstrates that the existing 2D layered materials can serve as the precursor for difficult-to-synthesize nonlayered 2D materials, providing a bridge between layered and nonlayered materials, meanwhile realizing the fabrication of large-size ultrathin nonlayered 2D materials.

Stepwise neuronal network pattern formation in agarose gel during cultivation using non-destructive microneedle photothermal microfabrication

Conventional neuronal network pattern formation techniques cannot control the arrangement of axons and dendrites because network structures must be fixed before neurite differentiation. To overcome this limitation, we developed a non-destructive stepwise microfabrication technique that can be used to alter microchannels within agarose to guide neurites during elongation. Micropatterns were formed in thin agarose layer coating of a cultivation dish using the tip of a 0.7 $$\upmu \mathrm{m}$$ μ m -diameter platinum-coated glass microneedle heated by a focused 1064-nm wavelength infrared laser, which has no absorbance of water. As the size of the heat source was 0.7 $$\upmu \mathrm{m}$$ μ m , which is smaller than the laser wavelength, the temperature fell to 45 $$^\circ \hbox {C}$$ ∘ C within a distance of 7.0 $$\upmu \mathrm{m}$$ μ m from the edge of the etched agarose microchannel. We exploited the fast temperature decay property to guide cell-to-cell connection during neuronal network cultivation. The first neurite of a hippocampal cell from a microchamber was guided to a microchannel leading to the target neuron with stepwise etching of the micrometer resolution microchannel in the agarose layer, and the elongated neurites were not damaged by the heat of etching. The results indicate the potential of this new technique for fully direction-controlled on-chip neuronal network studies.

Viscous flow through microfabricated axisymmetric contraction/expansion geometries

We employ a state-of-the-art microfabrication technique (selective laser-induced etching) to fabricate a set of axisymmetric microfluidic geometries featuring a 4:1 contraction followed by a 1:4 downstream expansion in the radial dimension. Three devices are fabricated: the first has a sudden contraction followed by a sudden expansion, the second features hyperbolic contraction and expansion profiles, and the third has a numerically optimized contraction/expansion profile intended to provide a constant extensional/compressional rate along the axis. We use micro-particle image velocimetry to study the creeping flow of a Newtonian fluid through the three devices and we compare the obtained velocity profiles with finite-volume numerical predictions, with good agreement. This work demonstrates the capability of this new microfabrication technique for producing accurate non-planar microfluidic geometries with complex shapes and with sufficient clarity for optical probes. The axisymmetric microfluidic geometries examined have potential to be used for the study of the extensional properties and non-linear dynamics of viscoelastic flows, and to investigate the transport and deformation dynamics of bubbles, drops, cells, and fibers. Graphic abstract

Electrochemical nanoimprinting of silicon

Scalable nanomanufacturing enables the commercialization of nanotechnology, particularly in applications such as nanophotonics, silicon photonics, photovoltaics, and biosensing. Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite efforts to extend NIL’s library of patternable media, imprinting of inorganic semiconductors has been plagued by concomitant generation of crystallography defects during imprinting. Here, we use an electrochemical nanoimprinting process—called Mac-Imprint—for directly patterning electronic-grade silicon with 3D microscale features. It is shown that stamps made of mesoporous metal catalysts allow for imprinting electronic-grade silicon without the concomitant generation of porous silicon damage while introducing mesoscale roughness. Unlike most NIL processes, Mac-Imprint does not rely on plastic deformation, and thus, it allows for replicating hard and brittle materials, such as silicon, from a reusable polymeric mold, which can be manufactured by almost any existing microfabrication technique.

Biodegradable 3D Printed Polymer Microneedles for Transdermal Drug Delivery

Biodegradable polymer microneedle (MN) arrays are an emerging class of transdermal drug delivery devices that promise a painless and sanitary alternative to syringes; however, prototyping bespoke needle architectures is expensive and requires production of new master templates. Here, we present a new microfabrication technique for MNs using fused deposition modeling (FDM) 3D printing using polylactic acid, an FDA approved, renewable, biodegradable, thermoplastic material. We show how this natural degradability can be exploited to overcome a key challenge of FDM 3D printing, in particular the low resolution of these printers. We improved the feature size of the printed parts significantly by developing a post fabrication chemical etching protocol, which allowed us to access tip sizes as small as 1 μm. With 3D modeling software, various MN shapes were designed and printed rapidly with custom needle density, length, and shape. Scanning electron microscopy confirmed that our method resulted in needle tip sizes in the range of 1 – 55 µm, which could successfully penetrate and break off into porcine skin. We have also shown that these MNs have comparable mechanical strengths to currently fabricated MNs and we further demonstrated how the swellability of PLA can be exploited to load small molecule drugs and how its degradability in skin can release those small molecules over time.

Biodegradable 3D Printed Polymer Microneedles for Transdermal Drug Delivery

Biodegradable polymer microneedle (MN) arrays are an emerging class of transdermal drug delivery devices that promise a painless and sanitary alternative to syringes; however, prototyping bespoke needle architectures is expensive and requires production of new master templates. Here, we present a new microfabrication technique for MNs using fused deposition modeling (FDM) 3D printing using polylactic acid, an FDA approved, renewable, biodegradable, thermoplastic material. We show how this natural degradability can be exploited to overcome a key challenge of FDM 3D printing, in particular the low resolution of these printers. We improved the feature size of the printed parts significantly by developing a post fabrication chemical etching protocol, which allowed us to access tip sizes as small as 1 μm. With 3D modeling software, various MN shapes were designed and printed rapidly with custom needle density, length, and shape. Scanning electron microscopy confirmed that our method resulted in needle tip sizes in the range of 1 – 55 µm, which could successfully penetrate and break off into porcine skin. We have also shown that these MNs have comparable mechanical strengths to currently fabricated MNs and we further demonstrated how the swellability of PLA can be exploited to load small molecule drugs and how its degradability in skin can release those small molecules over time.

Fabrication of Micro-Channels in PMMA by Tip-Based Microfabrication Technique: Depth and Friction Analysis

In this paper, millimeter-scale straight parallel micro-channels were fabricated in PMMA (Polymethyl-methacrylate) using the tip-based micro-fabrication method. The dimensional characteristics (channel width, channel depth and pile-up height) of micro-channels were evaluated and the effects of normal load and speed on the micro-channel geometry and friction were examined. A logarithmic relationship between the normal load and micro-channel depth was identified. The experimental results indicate that the selection of the normal load is critical to achieve a desired micro-channel geometry using a single pass scratching. To machine a micro-channel with a finite depth in PMMA, the normal load must be higher than 4.5 N. Within the range of the tested normal loads, about 70% of the channel height was elastically recovered after a single pass, and pile-ups as high as 50–60% of the depth were observed along the micro-channel sides.