3D-Printed MEMS Magnetometer Featuring Compliant Mechanism
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This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables ‘true’ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector.
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2018 ◽
Vol 10
(1)
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pp. 3-8
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2019 ◽
Vol XLII-2/W15
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pp. 605-607
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