Stripping Photo-Resist with RF Dielectric Barrier Atmospheric Pressure Plasma

2012 ◽  
Vol 260-261 ◽  
pp. 114-119 ◽  
Author(s):  
Shao Xia Jia ◽  
Ling Li Zhao ◽  
Jing Hua Yang ◽  
Chen Zhang ◽  
Shou Gou Wang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Generator ◽  
Ambient Air ◽  
High Energy ◽  
Optical Microscope ◽  
Dielectric Barrier ◽  
Pressure Plasma

A novel radio frequency single-dielectric-barrier-discharge atmospheric pressure plasma generator was designed and utilized to strip AZ9912 photo-resist (PR). Argon (Ar) and oxygen (O2) were employed as the working gases under atmospheric pressure in ambient air. The PR stripping rate was measured as functions of time, input power, and the flow rates of the oxygen/argon. Optical Emission Spectroscopy (OES) was used to measure the optical emission spectra of the plasma to study the mechanism of PR stripping process. It is presumable that C-H bands were broken by high energy electron in the plasma and OH was generated in the process with the participation of O atom. Optical Microscope, Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM) were used to measure the surface of the silicon substrate after the stripping. It is proved that this kind of novel device could strip the AZ9912 PR effectively as high as 850nm/min, without residues and ion bombardment damage on the wafer substrate.

Electrical and spectral property of cold arc plasma at atmospheric pressure

2012 ◽  
Vol 78 (6) ◽  
pp. 617-620
Author(s):  
YUAN ZHONG-CAI ◽  
SHI JIA-MING ◽  
CHEN ZONG-SHENG ◽  
XU BO
Keyword(s):  
Atmospheric Pressure ◽  
Arc Discharge ◽  
Rotational Temperature ◽  
Molecular Nitrogen ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Jet ◽  
Ambient Air ◽  
Arc Plasma

AbstractAn atmospheric pressure plasma jet is generated with a cold arc discharge in ambient air. The current-voltage characteristics and optical emission spectra of plasma discharges are investigated. The molecular nitrogen (N2), hydroxyl radical (OH), and oxygen atom (O) are observed and analyzed. Based on the best fit of the simulated spectra of N2 (C3∏u+ − B3∏g+) band and OH (A2∑+ − X2∏) band transition and the experimentally recorded spectra, the rotational temperature and the vibrational temperature of atmospheric pressure cold arc plasma jet (APCAPJ) are estimated.

scholarly journals Influence of Microwave Frequency and Gas Humidity on the In-Vitro Blood Coagulation in Cold Atmospheric Pressure Plasma

Processes ◽  
2021 ◽  
Vol 9 (10) ◽  
pp. 1837
Author(s):  
Jie Yu ◽  
Li Wu ◽  
Kama Huang
Keyword(s):  
Blood Coagulation ◽  
Atmospheric Pressure ◽  
Blood Clotting ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Microwave Frequency ◽  
Pressure Plasma ◽  
Cold Atmospheric Pressure Plasma

In this article, the effects of microwave frequency (2450 MHz and 5800 MHz) and gas humidity (1%, 2%, 3%, 4%, 6% and 8%) on in vitro blood coagulation with cold atmospheric pressure plasma (CAPP) were investigated. The generation of reactive oxygen species (ROS, OH, O) was measured by optical emission spectra. The exposure temperature on blood droplets under treatment was below 55 °C in all cases, to avoid the thermal effect of plasma on the blood clotting. Investigations showed that, with the increase of frequency, the doses of ROS increased, the blood sample presented a more serious collapse and its surface became drier. The humidity of ionized gas can also accelerate the generation of ROS and the process of blood clotting. Our results propose a method to accelerate in vitro blood coagulation in CAPP by adjusting microwave frequency and gas humidity, and suggest a clinical benefit for plasma treatment as a coagulation device in surgery.

scholarly journals The Effect of Oxygen Admixture with Argon Discharges on the Impact Parameters of Atmospheric Pressure Plasma Jet Characteristics

2021 ◽  
Vol 11 (15) ◽  
pp. 6870
Author(s):  
Atif H. Asghar ◽  
Ahmed Rida Galaly
Keyword(s):  
Flow Rate ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Jet ◽  
Flow Rates ◽  
Jet Length ◽  
Pressure Plasma ◽  
Optical Emission Spectra

Dry argon (Ar) discharge and wet oxygen/argon (O2/Ar) admixture discharge for alternating current atmospheric pressure plasma jets (APPJs) were studied for Ar discharges with flow rates ranging from 0.2 to 4 slm and for O2/Ar discharges with different O2 ratios and flow rates ranging from 2.5 to 15 mslm. The voltage–current waveform signals of APPJ discharge, gas flow rate, photo-imaging of the plasma jet length and width, discharge plasma power, axial temperature distribution, optical emission spectra, and irradiance were investigated. Different behavior for varying oxygen content in the admixture discharge was observed. The temperature recognizably decreased, axially, far away from the nozzle of the jet as the flow rate of dry argon decreased. Similar behavior was observed for wet argon but with a lower temperature than for dry argon. The optical emission spectra and the dose rate of irradiance of a plasma jet discharge were investigated as a function of plasma jet length, for dry and wet Ar discharges, to determine the data compatible with the International Commission on Non-Ionizing Radiation Protection (ICNIRP) data for irradiance exposure limits of the skin, which are suitable for the disinfection of microbes on the skin without harmful effects, equivalent to 30 μJ/mm2.

scholarly journals Degradation of telmisartan (TELMA-H) compounds in aqueous solution using non-thermal atmospheric pressure plasma jet

2019 ◽  
Vol 1 (1) ◽  
pp. 46-52
Author(s):  
Vasu D ◽  
Raji A ◽  
Pandiyaraj K.N ◽  
Padmanabhan P.V.A ◽  
Kandhavelu V
Keyword(s):  
Aqueous Solution ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma ◽  
Spectroscopy Optical ◽  
Optical Emission Spectra

In this study we investigate the degradation of telmisartan (Telma-H) in simulated aqueous solution using non-thermal atmospheric pressure plasma jet (APPJ). Aqueous solution containing Telma-H was treated with APPJ as a function of applied potential and reaction time. The degradation of Telma-H was investigated by means of UV-Visible spectroscopy. Optical emission spectra (OES) of the plasma jet was used to identify the reactive species that contributed to degrade Telma H compounds. The variation of pH and conductivity of the plasma treated Telma H aqueous solution was also measured.

Power Systems of Plasma Reactors for Non-Thermal Plasma Generation

2013 ◽  
Vol 16 (1) ◽  
Author(s):  
Henryka Danuta Stryczewska ◽  
Tomasz Jakubowski ◽  
Stanisław Kalisiak ◽  
Tomasz Giżewski ◽  
Joanna Pawłat
Keyword(s):  
Atmospheric Pressure ◽  
Arc Discharge ◽  
Plasma Reactor ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jets ◽  
Plasma Reactors ◽  
Dielectric Barrier ◽  
Gliding Arc ◽  
Pressure Plasma ◽  
Supply Systems

AbstractRecently, many different plasma sources are being investigated for exhaust gases treatment, odor abatement, VOC removal, soil conditioning, surface decontamination or tissue disinfection and sterilization. Among many different plasma reactors investigated in laboratories, gliding arc discharges (GAD), dielectric barrier discharges (DBD), pulsed discharges (PD), atmospheric pressure glow discharges (APGD) and atmospheric pressure plasma jets (APPJ) seem to be the most promising for high pressure low temperature applications. They can be designed as multi-electrodes’ high power system that can be used in environment protection processes, like decontamination of large surfaces and treatment of large volume of polluted gases, as well as small size and low power devices for biomedical applications, like plasma healing, disinfection and sterilization. Paper presents review of power supply systems for cold plasma reactors. Dielectric Barrier Discharge (DBD), Gliding Arc Discharge (GAD) and atmospheric pressure plasma jet (APPJ) reactors with their supply systems have been discussed from the point view of their characteristics, possibility to control power to the discharge and efficiency. Taking into account the plasma reactor characteristics and nature (nonlinear resistive and/or capacitive) different solutions of power suppliers have been presented: transformer type, AC/DC/AC inverter, RF-frequency system and frequency resonant inverter.

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