scholarly journals A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump

Sensors ◽  
2016 ◽  
Vol 16 (3) ◽  
pp. 389 ◽  
Author(s):  
Yixing Chu ◽  
Jingxin Dong ◽  
Baoyong Chi ◽  
Yunfeng Liu
Author(s):  
Hui Pan ◽  
Thomas Gibson

Abstract In recent years, there have been many advances in the equipment and techniques used to isolate faults. There are many options available to the failure analyst. The available techniques fall into the categories of electrical, photonic, thermal and electron/ion beam [1]. Each technique has its advantages and its limitations. In this paper, we introduce a case of successful failure analysis using a combination of several fault localization techniques on a 0.15um CMOS device with seven layers of metal. It includes electrical failure mode characterization, front side photoemission, backside photoemission, Focused Ion Beam (FIB), Scanning Electron Microscope (SEM) and liquid crystal. Electrical characterization along with backside photoemission proved most useful in this case as a poly short problem was found to be causing a charge pump failure. A specific type of layout, often referred to as a hammerhead layout, and the use of Optical Proximity Correction (OPC) contributed to the poly level shorts.


Electronics ◽  
2021 ◽  
Vol 10 (10) ◽  
pp. 1212
Author(s):  
Kazuma Koketsu ◽  
Toru Tanzawa

This paper describes a charge pump system for a flexible thermoelectric generator (TEG). Even though the TEG has high-output impedance, the system controls the input voltage to keep it higher than the minimum operating voltage by modulating the input impedance of the charge pump using two-phase operation with low- and high-input impedance modes. The average input impedance can be matched with the output impedance of the TEG. How the system can be designed is also described in detail. A design demonstration was performed for the TEG with 400 Ω. The fabricated system was also measured with a flexible-type TEG based on carbon nanotubes. Even with an output impedance of 1.4 kΩ, the system converted thermal energy into electric power of 30 μW at 2.5 V to the following sensor ICs.


2013 ◽  
Vol 9 (10) ◽  
pp. 783-786 ◽  
Author(s):  
Chih-Lung Lin ◽  
Fu-Chieh Chang ◽  
Po-Chun Lai ◽  
Po-Syun Chen ◽  
Wen-Yen Chang

Sensors ◽  
2022 ◽  
Vol 22 (2) ◽  
pp. 504
Author(s):  
Ranran Zhao ◽  
Yuming Zhang ◽  
Hongliang Lv ◽  
Yue Wu

This paper realized a charge pump phase locked loop (CPPLL) frequency source circuit based on 0.15 μm Win GaAs pHEMT process. In this paper, an improved fully differential edge-triggered frequency discriminator (PFD) and an improved differential structure charge pump (CP) are proposed respectively. In addition, a low noise voltage-controlled oscillator (VCO) and a static 64:1 frequency divider is realized. Finally, the phase locked loop (PLL) is realized by cascading each module. Measurement results show that the output signal frequency of the proposed CPPLL is 3.584 GHz–4.021 GHz, the phase noise at the frequency offset of 1 MHz is −117.82 dBc/Hz, and the maximum output power is 4.34 dBm. The chip area is 2701 μm × 3381 μm, and the power consumption is 181 mw.


2019 ◽  
Vol 33 (12) ◽  
pp. 1950112 ◽  
Author(s):  
Xianshan Dong ◽  
Qinwen Huang ◽  
Junhua Zhu ◽  
Wei Xu ◽  
Ping Lai

In MEMS closed-loop accelerometer, excitation voltage is an important design parameter that is related to many performance indexes, and the bias temperature coefficient is a key point for MEMS accelerometer. But the effect of excitation voltage on bias temperature coefficient is not clear and their relation has not yet been established. This paper studies the effect of excitation voltage on bias temperature coefficient of MEMS sandwich accelerometer. The mechanism of their relation is point out, and experiments of bias temperature drift with different excitation voltages are carried out. The measured results show that the excitation voltage influences the bias temperature coefficient of MEMS sandwich accelerometer greatly, and the frame of sensor structure is the main source of bias temperature drift in MEMS sandwich accelerometer. This paper is also helpful for researchers to further understand the source of bias drift in MEMS sandwich accelerometer and make corresponding improvement.


Sign in / Sign up

Export Citation Format

Share Document