Development of Piezo Driven Motion Amplified Stage
2014 ◽
Vol 541-542
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pp. 742-746
Keyword(s):
This paper presents a novel piezo driven motion stage employing multiple motion levers allowing for an amplification ratio that exceeds 60x enabled by a newly contrived cross hinge structure. Measurements of the motion stage were made using an optical microscope. The motion stage was incorporated into a visually served close loop motion control scheme and experimental results prove that the feedback system is capable of 20nm nanostepping.
1989 ◽
Vol 111
(3)
◽
pp. 452-461
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Keyword(s):
Integrated Motion Control Scheme for Four-Wheel-Independent Vehicles Considering Critical Conditions
2019 ◽
Vol 68
(8)
◽
pp. 7488-7497
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2009 ◽
Vol 10
(1)
◽
Keyword(s):